JPH0249717Y2 - - Google Patents
Info
- Publication number
- JPH0249717Y2 JPH0249717Y2 JP2700488U JP2700488U JPH0249717Y2 JP H0249717 Y2 JPH0249717 Y2 JP H0249717Y2 JP 2700488 U JP2700488 U JP 2700488U JP 2700488 U JP2700488 U JP 2700488U JP H0249717 Y2 JPH0249717 Y2 JP H0249717Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- wafers
- base
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 173
- 239000004065 semiconductor Substances 0.000 claims description 28
- 239000011295 pitch Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700488U JPH0249717Y2 (enrdf_load_stackoverflow) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700488U JPH0249717Y2 (enrdf_load_stackoverflow) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130538U JPH01130538U (enrdf_load_stackoverflow) | 1989-09-05 |
| JPH0249717Y2 true JPH0249717Y2 (enrdf_load_stackoverflow) | 1990-12-27 |
Family
ID=31249133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700488U Expired JPH0249717Y2 (enrdf_load_stackoverflow) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249717Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-02-29 JP JP2700488U patent/JPH0249717Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01130538U (enrdf_load_stackoverflow) | 1989-09-05 |
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