JPH0248784Y2 - - Google Patents
Info
- Publication number
- JPH0248784Y2 JPH0248784Y2 JP13281884U JP13281884U JPH0248784Y2 JP H0248784 Y2 JPH0248784 Y2 JP H0248784Y2 JP 13281884 U JP13281884 U JP 13281884U JP 13281884 U JP13281884 U JP 13281884U JP H0248784 Y2 JPH0248784 Y2 JP H0248784Y2
- Authority
- JP
- Japan
- Prior art keywords
- water
- cooling
- cooling water
- tank
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 claims description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 20
- 239000003507 refrigerant Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13281884U JPH0248784Y2 (US06272168-20010807-M00014.png) | 1984-08-31 | 1984-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13281884U JPH0248784Y2 (US06272168-20010807-M00014.png) | 1984-08-31 | 1984-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6149280U JPS6149280U (US06272168-20010807-M00014.png) | 1986-04-02 |
| JPH0248784Y2 true JPH0248784Y2 (US06272168-20010807-M00014.png) | 1990-12-20 |
Family
ID=30691373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13281884U Expired JPH0248784Y2 (US06272168-20010807-M00014.png) | 1984-08-31 | 1984-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248784Y2 (US06272168-20010807-M00014.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015001372A (ja) * | 2013-06-17 | 2015-01-05 | ファイン セミテック コーポレーション | 半導体プロセス用冷却装置 |
-
1984
- 1984-08-31 JP JP13281884U patent/JPH0248784Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015001372A (ja) * | 2013-06-17 | 2015-01-05 | ファイン セミテック コーポレーション | 半導体プロセス用冷却装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6149280U (US06272168-20010807-M00014.png) | 1986-04-02 |
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