JPH024847B2 - - Google Patents
Info
- Publication number
- JPH024847B2 JPH024847B2 JP4294684A JP4294684A JPH024847B2 JP H024847 B2 JPH024847 B2 JP H024847B2 JP 4294684 A JP4294684 A JP 4294684A JP 4294684 A JP4294684 A JP 4294684A JP H024847 B2 JPH024847 B2 JP H024847B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- leak detection
- detection container
- outflow pipe
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 40
- 239000007788 liquid Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 description 11
- 239000002699 waste material Substances 0.000 description 5
- 238000010926 purge Methods 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4294684A JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4294684A JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60187839A JPS60187839A (ja) | 1985-09-25 |
| JPH024847B2 true JPH024847B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-30 |
Family
ID=12650175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4294684A Granted JPS60187839A (ja) | 1984-03-08 | 1984-03-08 | 漏洩検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60187839A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3759492B2 (ja) | 2002-12-03 | 2006-03-22 | 近藤工業株式会社 | ミニエンバライメント方式の半導体製造装置 |
| CN112504573B (zh) * | 2021-01-11 | 2021-07-27 | 广东大冢制药有限公司 | 一种袋装液体密封性检测装置 |
-
1984
- 1984-03-08 JP JP4294684A patent/JPS60187839A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60187839A (ja) | 1985-09-25 |
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