JPH0248408A - 窒化アルミニウム粉末の製造方法 - Google Patents
窒化アルミニウム粉末の製造方法Info
- Publication number
- JPH0248408A JPH0248408A JP19880088A JP19880088A JPH0248408A JP H0248408 A JPH0248408 A JP H0248408A JP 19880088 A JP19880088 A JP 19880088A JP 19880088 A JP19880088 A JP 19880088A JP H0248408 A JPH0248408 A JP H0248408A
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- powder
- mixture
- alpha
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 74
- 239000002245 particle Substances 0.000 claims abstract description 41
- 239000000203 mixture Substances 0.000 claims abstract description 33
- 239000002243 precursor Substances 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 28
- 230000001590 oxidative effect Effects 0.000 claims abstract description 7
- 239000012298 atmosphere Substances 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 18
- 238000009826 distribution Methods 0.000 abstract description 15
- 239000000126 substance Substances 0.000 abstract description 7
- 238000001354 calcination Methods 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 230000007704 transition Effects 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 5
- 238000005121 nitriding Methods 0.000 description 5
- 230000006911 nucleation Effects 0.000 description 5
- 238000010899 nucleation Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 229910001593 boehmite Inorganic materials 0.000 description 4
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 238000005261 decarburization Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 aluminum alkoxide Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19880088A JPH0248408A (ja) | 1988-08-11 | 1988-08-11 | 窒化アルミニウム粉末の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19880088A JPH0248408A (ja) | 1988-08-11 | 1988-08-11 | 窒化アルミニウム粉末の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0248408A true JPH0248408A (ja) | 1990-02-19 |
| JPH0535682B2 JPH0535682B2 (enrdf_load_stackoverflow) | 1993-05-27 |
Family
ID=16397122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19880088A Granted JPH0248408A (ja) | 1988-08-11 | 1988-08-11 | 窒化アルミニウム粉末の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248408A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021161883A1 (enrdf_load_stackoverflow) * | 2020-02-10 | 2021-08-19 |
-
1988
- 1988-08-11 JP JP19880088A patent/JPH0248408A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021161883A1 (enrdf_load_stackoverflow) * | 2020-02-10 | 2021-08-19 | ||
| WO2021161883A1 (ja) * | 2020-02-10 | 2021-08-19 | 株式会社トクヤマ | 窒化アルミニウム粉末および製造方法 |
| US12384678B2 (en) | 2020-02-10 | 2025-08-12 | Tokuyama Corporation | Aluminum nitride powder and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0535682B2 (enrdf_load_stackoverflow) | 1993-05-27 |
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