JPH0248171U - - Google Patents

Info

Publication number
JPH0248171U
JPH0248171U JP12910988U JP12910988U JPH0248171U JP H0248171 U JPH0248171 U JP H0248171U JP 12910988 U JP12910988 U JP 12910988U JP 12910988 U JP12910988 U JP 12910988U JP H0248171 U JPH0248171 U JP H0248171U
Authority
JP
Japan
Prior art keywords
liquid
container
path
valve
dripping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12910988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614831Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12910988U priority Critical patent/JPH0614831Y2/ja
Publication of JPH0248171U publication Critical patent/JPH0248171U/ja
Application granted granted Critical
Publication of JPH0614831Y2 publication Critical patent/JPH0614831Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP12910988U 1988-09-30 1988-09-30 滴下装置 Expired - Lifetime JPH0614831Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12910988U JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12910988U JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Publications (2)

Publication Number Publication Date
JPH0248171U true JPH0248171U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-04-03
JPH0614831Y2 JPH0614831Y2 (ja) 1994-04-20

Family

ID=31383080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12910988U Expired - Lifetime JPH0614831Y2 (ja) 1988-09-30 1988-09-30 滴下装置

Country Status (1)

Country Link
JP (1) JPH0614831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (ja) * 1991-03-22 1992-10-19 Rohm Co Ltd 薬液塗布装置における薬液供給装置
JPH0520853U (ja) * 1991-08-30 1993-03-19 株式会社アツギユニシア 切削機械のドリルユニツト構造
JP2013098479A (ja) * 2011-11-04 2013-05-20 Tokyo Electron Ltd 処理液供給方法、プログラム、コンピュータ記憶媒体及び処理液供給装置
JP2017220547A (ja) * 2016-06-07 2017-12-14 東京エレクトロン株式会社 処理液供給装置、機器ユニット、処理液供給方法及び記憶媒体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (ja) * 1991-03-22 1992-10-19 Rohm Co Ltd 薬液塗布装置における薬液供給装置
JPH0520853U (ja) * 1991-08-30 1993-03-19 株式会社アツギユニシア 切削機械のドリルユニツト構造
JP2013098479A (ja) * 2011-11-04 2013-05-20 Tokyo Electron Ltd 処理液供給方法、プログラム、コンピュータ記憶媒体及び処理液供給装置
JP2017220547A (ja) * 2016-06-07 2017-12-14 東京エレクトロン株式会社 処理液供給装置、機器ユニット、処理液供給方法及び記憶媒体
CN107470051A (zh) * 2016-06-07 2017-12-15 东京毅力科创株式会社 处理液供给装置、设备单元、处理液供给方法和存储介质

Also Published As

Publication number Publication date
JPH0614831Y2 (ja) 1994-04-20

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