JPH0247491Y2 - - Google Patents

Info

Publication number
JPH0247491Y2
JPH0247491Y2 JP5753482U JP5753482U JPH0247491Y2 JP H0247491 Y2 JPH0247491 Y2 JP H0247491Y2 JP 5753482 U JP5753482 U JP 5753482U JP 5753482 U JP5753482 U JP 5753482U JP H0247491 Y2 JPH0247491 Y2 JP H0247491Y2
Authority
JP
Japan
Prior art keywords
rod
inspected
actuator
measurement area
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5753482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58160342U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5753482U priority Critical patent/JPS58160342U/ja
Publication of JPS58160342U publication Critical patent/JPS58160342U/ja
Application granted granted Critical
Publication of JPH0247491Y2 publication Critical patent/JPH0247491Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP5753482U 1982-04-20 1982-04-20 表面欠陥検査装置 Granted JPS58160342U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5753482U JPS58160342U (ja) 1982-04-20 1982-04-20 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5753482U JPS58160342U (ja) 1982-04-20 1982-04-20 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58160342U JPS58160342U (ja) 1983-10-25
JPH0247491Y2 true JPH0247491Y2 (cs) 1990-12-13

Family

ID=30067978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5753482U Granted JPS58160342U (ja) 1982-04-20 1982-04-20 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58160342U (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285869A (ja) * 2006-04-17 2007-11-01 Denso Corp 表面検査装置及び表面検査方法
JP5506359B2 (ja) * 2009-12-11 2014-05-28 三菱重工業株式会社 き裂検査装置及びき裂解析装置、方法、並びにプログラム

Also Published As

Publication number Publication date
JPS58160342U (ja) 1983-10-25

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