JPH0247264A - Diamond coating method - Google Patents
Diamond coating methodInfo
- Publication number
- JPH0247264A JPH0247264A JP19545788A JP19545788A JPH0247264A JP H0247264 A JPH0247264 A JP H0247264A JP 19545788 A JP19545788 A JP 19545788A JP 19545788 A JP19545788 A JP 19545788A JP H0247264 A JPH0247264 A JP H0247264A
- Authority
- JP
- Japan
- Prior art keywords
- hard alloy
- sintered hard
- diamond
- treatment
- diamond film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 36
- 239000010432 diamond Substances 0.000 title claims abstract description 36
- 238000000576 coating method Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000010306 acid treatment Methods 0.000 claims abstract description 7
- 238000011282 treatment Methods 0.000 claims abstract description 7
- 238000005498 polishing Methods 0.000 claims description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 12
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 4
- 239000000843 powder Substances 0.000 abstract description 4
- 239000011259 mixed solution Substances 0.000 abstract description 3
- 239000002253 acid Substances 0.000 abstract description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract 8
- 229910045601 alloy Inorganic materials 0.000 abstract 8
- 239000003082 abrasive agent Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
本発明はダイヤモンドコーティング法に関し、特に耐久
摩耗部品や工具に適したダイヤモンド膜をコーティング
する方法に係わる。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a diamond coating method, and more particularly to a method for coating a diamond film suitable for durable wear parts and tools.
［従来の技術と課題］
周知の如く、気相合成されるダイヤモンドは、基材であ
る超硬合金を予めダイヤモンドパウダーなどで研磨しな
ければ膜状に成長しない。即ち、超硬合金の表面へ一様
に傷を付け、そこを核としてダイヤモンド膜は成長する
。[Prior Art and Problems] As is well known, diamond synthesized in a vapor phase does not grow into a film unless the cemented carbide base material is polished with diamond powder or the like in advance. That is, scratches are uniformly made on the surface of the cemented carbide, and a diamond film grows using the scratches as nuclei.
しかしながら、超硬合金にダイヤモンド膜をコーティン
グする場合、研磨処理のみでは良質なダイヤモンド膜を
得ることができない。これは、超硬合金に含有されてい
るコバルトやニッケルがダイヤモンド膜合成に悪影響を
及ぼしているからである。即ち、コバルトやニッケルが
基材表面に存在すると、炭素がコバルトやニッケル内へ
拡散し、合成されたダイヤモンドはアモルファス成分を
多量に含有してしまい、良質なダイヤモンド膜は合成で
きない。However, when coating a cemented carbide with a diamond film, a high-quality diamond film cannot be obtained by polishing alone. This is because cobalt and nickel contained in the cemented carbide have an adverse effect on diamond film synthesis. That is, if cobalt or nickel exists on the surface of the base material, carbon will diffuse into the cobalt or nickel, and the synthesized diamond will contain a large amount of amorphous components, making it impossible to synthesize a high-quality diamond film.
そこで、基材を希硝酸などによって酸処理し、基材表面
のコバルトなどを除却することが考えられるが、この場
合発生した気泡が基材表面を覆ってしまって反応が進行
し難くなる。Therefore, it is conceivable to acid-treat the base material with dilute nitric acid or the like to remove cobalt and the like on the surface of the base material, but in this case, the generated air bubbles cover the surface of the base material, making it difficult for the reaction to proceed.
本発明は上記事情に鑑みてなされたもので、超硬合金へ
のダイヤモンド膜の被覆を気泡等を生じさせることなく
容易に実現し得るダイヤモンドコーティング法を提供す
ることを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a diamond coating method that can easily coat a cemented carbide with a diamond film without producing bubbles or the like.
［課題を解決するための手段］
本発明は、基材である超硬合金に研磨処理と酸処理とを
同時に行う工程と、前記超硬合金にダイヤモンド膜を被
覆する工程とを具備することを要旨とする。本発明にお
いて、酸処理は例えば硝酸等を用いて行う。[Means for Solving the Problems] The present invention includes a step of simultaneously subjecting a cemented carbide, which is a base material, to a polishing treatment and an acid treatment, and a step of coating the cemented carbide with a diamond film. This is the summary. In the present invention, the acid treatment is performed using, for example, nitric acid.
［作用〕
本発明においては、研磨液中に硝酸等を混入す面は活性
状態に保たれ、良質なダイヤモンド膜を超硬合金に形成
できる。又、再現性にも富んでいる。しかるに、従来の
ように酸処理のみでは、基材表面を気泡が覆ってしまい
、反応が進行し難くなる。[Function] In the present invention, the surface where nitric acid or the like is mixed into the polishing liquid is kept in an active state, and a high-quality diamond film can be formed on the cemented carbide. Moreover, it is highly reproducible. However, if only acid treatment is used as in the past, the surface of the base material will be covered with bubbles, making it difficult for the reaction to proceed.
［実施例］ 以下、本発明の一実施例について説明する。[Example] An embodiment of the present invention will be described below.
■まず、粒径２０〜４０．ｍのダイヤモンドパウダー１
ｇをエタノール２０ｃｃ中に分散させた研磨液に硝酸５
ｃｃ混入した混合液（研磨液）中に、１０■Ｘ５■Ｘ２
ａ＋ｓｔの超硬合金を投入した。つづいて、４５ＫＨｚ
、６０Ｗの超音波洗浄器により該混合液に超音波震動を
与え、処理を２０分間行った。■First, the particle size is 20-40. m diamond powder 1
5 g of nitric acid is added to the polishing liquid in which 5 g of nitric acid is dispersed in 20 cc of ethanol.
In the mixed liquid (polishing liquid) mixed with cc, 10 x 5 x 2
A+st cemented carbide was introduced. Next, 45KHz
The mixed solution was subjected to ultrasonic vibration using a 60 W ultrasonic cleaner, and the treatment was carried out for 20 minutes.
■次に、マイクロ波プラズマＣＶＤ法により、前記超硬
合金上にダイヤモンドをコーティング（被覆）した。こ
こで、被覆は、原料ガスにＣＨ４１％、Ｈ２９９％の混
合ガスを使用し、ガス流ｍ ７０５ｅｃＩｌ、ガス圧力
３０ ｔｏｒｒ、マイクロ波出力３２０Ｗの条件で３時
間行った。(2) Next, the cemented carbide was coated with diamond by microwave plasma CVD. Here, the coating was carried out for 3 hours using a mixed gas of 41% CH and 99% H2 as the raw material gas under the conditions of a gas flow m of 705 ecIl, a gas pressure of 30 torr, and a microwave output of 320 W.
しかして、上記実施例によれば、超硬合金にダイヤモン
ド膜を形成する前に、予めダイヤモンドパウダーなどを
含んだ研磨液に硝酸を混入した混合液で超硬合金の前処
理を行うため、従来のように超硬合金表面を気泡が覆う
ことなく、良質なダイヤモンド膜を形成できる。However, according to the above embodiment, before forming a diamond film on the cemented carbide, the cemented carbide is pretreated with a mixture of polishing fluid containing diamond powder and the like mixed with nitric acid. A high-quality diamond film can be formed without bubbles covering the cemented carbide surface.
事実、上記のようにして作られたダイヤモンド膜（本発
明）のラマンスペクトルを硝酸の混入しない研磨液で同
一処理を行なったダイヤモンド膜（従来）と比較したと
ころ、第１図に示す特性図が得られた。なお、図中の曲
線（イ）は本発明の場合、曲線（ロ）は従来の場合を示
し、両凸線ともピークはダイヤモンド膜のスペクトルを
示す。In fact, when we compared the Raman spectrum of the diamond film (this invention) made as described above with that of a diamond film (conventional) that had been subjected to the same treatment using a polishing liquid that did not contain nitric acid, the characteristic diagram shown in Figure 1 was obtained. Obtained. In addition, the curve (a) in the figure shows the case of the present invention, the curve (b) shows the conventional case, and the peaks of both convex lines show the spectrum of the diamond film.
同図より、曲線（ロ）の場合はピークの左側にアモルフ
ァスのスペクトルの山が見えることが確認できるが、曲
線（イ）にはその山がないことを確認できる。これによ
り、硝酸を混入した混合液（研磨液）で処理し、作成し
たダイヤモンド膜の方がアモルファス成分を余り含まな
い良質なダイヤモンド膜であることが確認できた。また
、硝酸の混°入量を３ｃｃとした場合、ダイヤモンド膜
のアモルファス成分は増加した。このことにより、硝酸
の混入量を変化させることにより、ダイヤモンド膜中の
アモルファス成分の量を制御することが可能であること
も合せて確認できた。即ち、超硬合金との密着性を良く
するために、アモルファス成分の量を調整することが望
ましい。From the same figure, it can be confirmed that in the case of curve (B), a peak of the amorphous spectrum can be seen on the left side of the peak, but it can be confirmed that there is no such peak in curve (B). As a result, it was confirmed that the diamond film prepared by processing with a mixed liquid (polishing liquid) containing nitric acid was a high-quality diamond film containing less amorphous components. Furthermore, when the amount of nitric acid mixed was 3 cc, the amorphous component of the diamond film increased. This also confirmed that by changing the amount of nitric acid mixed in, it was possible to control the amount of amorphous components in the diamond film. That is, in order to improve the adhesion with the cemented carbide, it is desirable to adjust the amount of the amorphous component.
なお、上記実施例では、酸処理の材料として硝酸を用い
た場合について述べたが、これに限定されることなく、
他の酸を用いてもよい。In addition, although the above-mentioned example described the case where nitric acid was used as the material for acid treatment, the present invention is not limited to this.
Other acids may also be used.
〔発明の効果］
以上詳述した如く本発明によれば、超硬合金へのダイヤ
モンド膜の被覆を気泡等を生じさせることなく容易に実
現し得、工業的にを用なコーティング法を提供できる。[Effects of the Invention] As detailed above, according to the present invention, it is possible to easily coat a cemented carbide with a diamond film without creating bubbles, and it is possible to provide an industrially useful coating method. .
第１図は本発明法及び従来方法により作成したダイヤモ
ンド法のラマンスペクトルを示す特性図である。
出願人代理人 弁理士 鈴江武彦FIG. 1 is a characteristic diagram showing Raman spectra of the diamond method prepared by the method of the present invention and the conventional method. Applicant's agent Patent attorney Takehiko Suzue
Claims (1)
工程と、前記超硬合金にダイヤモンド膜を被覆する工程
とを具備することを特徴とするダイヤモンドコーティン
グ法。A diamond coating method comprising the steps of simultaneously subjecting a cemented carbide as a base material to polishing treatment and acid treatment, and coating the cemented carbide with a diamond film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63195457A JP2548778B2 (en) | 1988-08-05 | 1988-08-05 | Diamond coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63195457A JP2548778B2 (en) | 1988-08-05 | 1988-08-05 | Diamond coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0247264A true JPH0247264A (en) | 1990-02-16 |
| JP2548778B2 JP2548778B2 (en) | 1996-10-30 |
Family
ID=16341389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63195457A Expired - Fee Related JP2548778B2 (en) | 1988-08-05 | 1988-08-05 | Diamond coating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2548778B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7473666B2 (en) | 2003-03-05 | 2009-01-06 | Asahi Kasei Chemicals Corporation | Particulate porous ammoxidation catalyst |
| CN102242374A (en) * | 2011-06-30 | 2011-11-16 | 南京航空航天大学 | Production method of titanium-based boron-doping diamond coating electrode |
-
1988
- 1988-08-05 JP JP63195457A patent/JP2548778B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7473666B2 (en) | 2003-03-05 | 2009-01-06 | Asahi Kasei Chemicals Corporation | Particulate porous ammoxidation catalyst |
| CN102242374A (en) * | 2011-06-30 | 2011-11-16 | 南京航空航天大学 | Production method of titanium-based boron-doping diamond coating electrode |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2548778B2 (en) | 1996-10-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |