JPH0246051Y2 - - Google Patents
Info
- Publication number
- JPH0246051Y2 JPH0246051Y2 JP12505184U JP12505184U JPH0246051Y2 JP H0246051 Y2 JPH0246051 Y2 JP H0246051Y2 JP 12505184 U JP12505184 U JP 12505184U JP 12505184 U JP12505184 U JP 12505184U JP H0246051 Y2 JPH0246051 Y2 JP H0246051Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- turntable
- main body
- sealed
- elevating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 19
- 230000003028 elevating effect Effects 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 24
- 229910052786 argon Inorganic materials 0.000 description 12
- 238000007789 sealing Methods 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12505184U JPS6139935U (ja) | 1984-08-17 | 1984-08-17 | スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12505184U JPS6139935U (ja) | 1984-08-17 | 1984-08-17 | スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6139935U JPS6139935U (ja) | 1986-03-13 |
| JPH0246051Y2 true JPH0246051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-05 |
Family
ID=30683736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12505184U Granted JPS6139935U (ja) | 1984-08-17 | 1984-08-17 | スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6139935U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2625310B2 (ja) * | 1991-01-08 | 1997-07-02 | シマテク，インコーポレイテッド | シリコンウェハーの製造方法および装置 |
-
1984
- 1984-08-17 JP JP12505184U patent/JPS6139935U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6139935U (ja) | 1986-03-13 |
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