JPH0244046A - Transparent plate having blue-green reflected color and its preparation - Google Patents
Transparent plate having blue-green reflected color and its preparationInfo
- Publication number
- JPH0244046A JPH0244046A JP19389488A JP19389488A JPH0244046A JP H0244046 A JPH0244046 A JP H0244046A JP 19389488 A JP19389488 A JP 19389488A JP 19389488 A JP19389488 A JP 19389488A JP H0244046 A JPH0244046 A JP H0244046A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- transparent plate
- transparent
- film
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 238000004544 sputter deposition Methods 0.000 claims abstract description 13
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 22
- 229910044991 metal oxide Inorganic materials 0.000 claims description 20
- 150000004706 metal oxides Chemical class 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 229910001887 tin oxide Inorganic materials 0.000 claims description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 229910001882 dioxygen Inorganic materials 0.000 claims description 4
- 229910003437 indium oxide Inorganic materials 0.000 claims description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 230000008685 targeting Effects 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 230000012447 hatching Effects 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 19
- 229910052719 titanium Inorganic materials 0.000 abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract 5
- 229910052718 tin Inorganic materials 0.000 abstract 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 3
- 239000008246 gaseous mixture Substances 0.000 abstract 2
- 229910052727 yttrium Inorganic materials 0.000 abstract 2
- 229910052725 zinc Inorganic materials 0.000 abstract 2
- 229910052726 zirconium Inorganic materials 0.000 abstract 2
- 239000010408 film Substances 0.000 description 43
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000005546 reactive sputtering Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は青色乃至緑色を有する透明板とくに建築用、ま
たは自動車用の窓ガラスに用いるのに好適な反射色を有
する熱線反射性能を有する透明板およびその製造方法に
関するものである。Detailed Description of the Invention [Industrial Application Field] The present invention is directed to a transparent plate having a blue to green color, particularly a transparent plate having heat ray reflecting performance and a reflective color suitable for use in architectural or automobile window glass. The present invention relates to a plate and a method for manufacturing the same.
従来青色乃至緑色の反射色を有する透明体としては、特
開昭６０−３６３５５にみられるように、ガラス板の表
面に約１０ｎｍの酸化錫を形成し、その上に約１２ｎｍ
の厚みの窒化クロム膜を形成し、さらにその上に酸化錫
、酸化チタンなどの透明な金属酸化物の膜を形成した３
Ｎからなる被膜を付着したものが知られている。一方、
窒化チタンの単層膜でもその膜厚を調整することにより
、青色乃至緑色の反射色調が光の干渉作用により得られ
ることが知られている。Conventionally, as a transparent body having a blue to green reflection color, tin oxide of about 10 nm is formed on the surface of a glass plate, and about 12 nm of tin oxide is formed on the surface of a glass plate, as shown in Japanese Patent Application Laid-Open No. 60-36355.
A chromium nitride film with a thickness of
It is known that a film made of N is attached. on the other hand,
It is known that even with a single layer film of titanium nitride, by adjusting the film thickness, a reflected color tone of blue to green can be obtained due to the interference effect of light.
従来の技術では、金属酸化物の光学膜厚は、反射の色調
が青色を呈するには、約２００ｒ＋ｗ＋、緑色を呈する
には約２４０ｎａ＋と厚くなり、膜厚が厚（なるが故に
極めて生産性が悪く、生産コストが高くつくという欠点
を有するとともに、反射の色調が金属酸化物の膜の厚み
に鋭敏に影響を受けるため、再現性良く色調を確保する
ことが困難であるという重大な欠点を有する。一方窒化
チタンの単層膜からなる場合は反射色調の再現性は比較
的容易であるが、あざやかな青色や緑色が得られないと
いう欠点をもっている。In conventional technology, the optical film thickness of the metal oxide is approximately 200r+w+ for the reflected color to be blue, and approximately 240na+ for the reflected color to be green. However, it has the disadvantage of high production costs, and also has the serious disadvantage that it is difficult to ensure a good color tone with good reproducibility because the color tone of reflection is sensitively affected by the thickness of the metal oxide film. On the other hand, when it is made of a single layer film of titanium nitride, the reproducibility of the reflected color tone is relatively easy, but it has the disadvantage that vivid blue or green colors cannot be obtained.
本発明は上記した３層構成からなる場合の反射色調の再
現性の問題点を改善し、また生産コストが高いという問
題点を解決しようとするものであり、さらに従来の窒化
チタン膜単独からなるものよりも、あざやかな色調を得
る目的でなされたものである。The present invention aims to improve the problem of reproducibility of reflected color tone when the three-layer structure is used as described above, and also to solve the problem of high production cost. This was done for the purpose of obtaining a more vivid color tone.
本発明は、反射光が青色乃至緑色を有し、耐候性のある
単板使用可能な透明体を提供するものであって、すなわ
ちガラス板の如き透明板の一方の表面に窒化チタン膜を
付着し、該窒化チタン膜上に高屈折率の金属酸化物被膜
を付着した構造を有しく第２図参照）、該透明板の他方
の表面からの反射色が青色乃至緑色を呈する透明板を提
供するものである。ここに透明板としては、屈折率が１
、４〜１．７のガラス板もしくは合成樹脂板が用いられ
、合成樹脂板としてはアクリル樹脂板、ポリカーボネイ
ト樹脂板、ポリエチレン樹脂板が用いられる。また本発
明に於いて前記金属酸化物としては、屈折率が１．９〜
２．６のものを用いることが好ましい、透明板の被膜面
の他方の表面からの反射色は、前記金属酸化物の被膜の
膜厚と該窒化チタン被膜の膜厚との組合せにより変化す
る。青色乃至緑色系の反射色は上記した窒化チタン膜と
酸化物膜との膜厚が第１図で示されるある特定の範囲内
にある場合にとくに好ましい。The present invention provides a transparent body that reflects blue to green in color and is weather resistant and can be used as a single plate. In other words, a titanium nitride film is attached to one surface of a transparent plate such as a glass plate. The present invention provides a transparent plate having a structure in which a metal oxide film with a high refractive index is attached on the titanium nitride film (see Fig. 2), and the color reflected from the other surface of the transparent plate is blue to green. It is something to do. Here, as a transparent plate, the refractive index is 1.
, 4 to 1.7 glass plates or synthetic resin plates are used, and as the synthetic resin plates, acrylic resin plates, polycarbonate resin plates, and polyethylene resin plates are used. Further, in the present invention, the metal oxide has a refractive index of 1.9 to 1.9.
The color reflected from the other surface of the coated surface of the transparent plate, which is preferably 2.6, changes depending on the combination of the thickness of the metal oxide coating and the thickness of the titanium nitride coating. A blue to green reflected color is particularly preferable when the thicknesses of the titanium nitride film and the oxide film are within a certain range shown in FIG.
金属酸化物の被膜としては、色調をあざやかにするため
に高屈折である方が望ましく、通常５５０ｎｍの波長に
おける屈折率が１．９〜２．６である酸化チタン、酸化
錫、酸化亜鉛、酸化タンタル、酸化ジルコニウム、酸化
インジウム、酸化錫をドープした酸化インジウムのいず
れかが好んで用いられる。The metal oxide film preferably has a high refractive index in order to make the color tone vivid, and titanium oxide, tin oxide, zinc oxide, and titanium oxide, which usually have a refractive index of 1.9 to 2.6 at a wavelength of 550 nm, are used. Any of tantalum, zirconium oxide, indium oxide, and indium oxide doped with tin oxide is preferably used.
第１図に於いて金属酸化物の膜厚が５ｎａ＋より小さく
なると、反射色のあざやかさが急速に失われるので、金
属窒化物の上に被覆すべき酸化物の膜の厚みは５ｎｍ以
上が有用である。またある程度の熱線遮へい性を確保す
るために、窒化チタンの膜の厚みは５ｎｍ以上が必要で
ある。同じ窒化チタンの厚みでは、第１図の斜線を越え
ない範囲内で金属酸化物の厚みが増加するのに従い青色
系から緑色系に漸次変化していき、第１図の斜めの境界
線で示される境界を越えると黄色から金色の色を帯び始
める。したがって反射色が青色乃至緑色の反射色を呈す
る窒化チタンの膜と金属酸化物の膜の膜厚の好ましい組
合わせは、上記した３つの境界線により囲まれた領域で
ある。In Figure 1, when the thickness of the metal oxide film becomes less than 5nm, the vividness of the reflected color is rapidly lost, so it is useful to have a thickness of 5nm or more for the oxide film to be coated on the metal nitride. It is. Further, in order to ensure a certain degree of heat ray shielding property, the thickness of the titanium nitride film needs to be 5 nm or more. For the same thickness of titanium nitride, as the thickness of the metal oxide increases within the range not exceeding the diagonal line in Figure 1, the color gradually changes from blue to green, as shown by the diagonal boundary line in Figure 1. Once it crosses the border, it begins to take on a yellow to gold color. Therefore, a preferable combination of the film thicknesses of the titanium nitride film and the metal oxide film, which exhibit a blue to green reflection color, is a region surrounded by the above three boundary lines.
窒化チタンの被膜はチタニウムをターゲットとするアル
ゴンと窒素の混合ガスあるいは純窒素ガスによる反応性
スバ・ツタリング法により、透明基体上に直接つくるこ
とができる。このときに使用されるスパッタを行うため
のガスの組成は、窒素が３０体積％以上であることが好
ましいが、被膜の付着速度との関係で一義的には定めに
くい。窒化チタン膜は膜中のＴＩ ：Ｎの組成比がかな
らずしもｌ：１である必要はなく、化学量論的に窒素が
過剰のものでも良く、また窒素不足の状態であっても良
い。また窒化チタン膜中に若干の酸素が含まれていても
良く、その組成比が原子比で０／Ｎく１であれば窒化チ
タン被膜の熱線遮へい能力は維持され得る。一方窒化チ
タン膜上に被覆される酸化物の被膜は、金属をターゲッ
トとして、アルゴンと酸素の混合ガスあるいは純酸素ガ
スによる反応性スパッタリングにより得ることができる
。A titanium nitride film can be formed directly on a transparent substrate by a reactive sputtering method using a mixed gas of argon and nitrogen or pure nitrogen gas, targeting titanium. The composition of the gas for sputtering used at this time is preferably 30% by volume or more of nitrogen, but it is difficult to determine it unambiguously in relation to the deposition rate of the film. The titanium nitride film does not necessarily have to have a TI:N composition ratio of 1:1, and may have a stoichiometric excess of nitrogen or may be deficient in nitrogen. Further, the titanium nitride film may contain some oxygen, and as long as its composition ratio is 0/N/1 in atomic ratio, the heat ray shielding ability of the titanium nitride film can be maintained. On the other hand, the oxide film coated on the titanium nitride film can be obtained by reactive sputtering using a mixed gas of argon and oxygen or pure oxygen gas, using a metal as a target.
とくに第３図に示すような１つのスパッタリング装置内
に２つ以上のスパッタリングカソードをそなえた装置に
おいては、１つのカソードにチタン金属のターゲットを
、他のカソードに反応性スパッタリングにより金属酸化
物被膜を形成するための金属ターゲットを設置すれば、
真空槽を大気に開放することなくカソードへの電力印加
と、供給ガス種の交換により、容易に２層からなる被膜
を被覆することができる。In particular, in a sputtering device equipped with two or more sputtering cathodes as shown in Fig. 3, one cathode is coated with a titanium metal target and the other cathode is coated with a metal oxide film by reactive sputtering. If you set up a metal target for forming,
A two-layer coating can be easily formed by applying power to the cathode and exchanging the supplied gas species without opening the vacuum chamber to the atmosphere.
本発明に係る透明板では、透明金属酸化物と金属膜との
膜厚がある範囲内に設定されると、被膜を被覆した面の
他の面の反射の色調は、光の干渉作用により青色乃至緑
色を呈する。In the transparent plate according to the present invention, when the film thickness of the transparent metal oxide and the metal film is set within a certain range, the color tone of the reflection on the other surface of the surface coated with the film becomes blue due to the interference effect of light. It exhibits a green to green color.
また窒化チタンや酸化チタンの如き金属窒化物や金属酸
化物を、金属をターゲットとしてそれぞれ窒素や酸素の
如き反応性ガスを含む雰囲気でスパッタリングし、化合
物の膜を形成するときは反応性ガスはターゲット金属と
反応し化合物をつくる作用をする。In addition, when sputtering metal nitrides and metal oxides such as titanium nitride and titanium oxide in an atmosphere containing reactive gases such as nitrogen and oxygen, respectively, using the metal as a target to form a compound film, the reactive gas is used as the target. It reacts with metals and creates compounds.
第３図は本発明の実施を行うために使用したスパッタリ
ング装置である。ｌは電気的にアースされたスパッタリ
ング装置の真空槽であり、真空槽本体は真空ポンプ４に
よりオリフィスバルブ２とメインバルブ３を介して接続
され、真空槽内の気体が排気される。マグネトロンカソ
ード５，６は真空槽１から電気的に絶縁されており、外
部の直流電源８から電力が印加される。真空ポンプ４に
より高真空に真空槽ｌ内を排気後、ガス供給管１０から
可変バルブ９を調整して一定量のアルゴンと窒素の混合
ガス、アルゴンと酸素の混合ガス、窒素ガスあるいは酸
素ガスの如きスパッタリング用のガスを供給し、真空槽
ｌ内を一定の圧力に維持する。直流電源から電力を印加
して放電を生じさせ、基板ホルダー７にセントしたガラ
ス基板１４を搬送ベルトを動かすことによりターゲット
の前面を通加させて被膜の付着を行う。FIG. 3 shows a sputtering apparatus used to carry out the present invention. 1 is a vacuum chamber of the sputtering apparatus which is electrically grounded, and the main body of the vacuum chamber is connected to a vacuum pump 4 via an orifice valve 2 and a main valve 3, and the gas in the vacuum chamber is exhausted. The magnetron cathodes 5 and 6 are electrically insulated from the vacuum chamber 1, and power is applied from an external DC power source 8. After evacuating the inside of the vacuum chamber l to a high vacuum using the vacuum pump 4, the variable valve 9 is adjusted from the gas supply pipe 10 to supply a certain amount of mixed gas of argon and nitrogen, mixed gas of argon and oxygen, nitrogen gas, or oxygen gas. A gas for sputtering is supplied to maintain a constant pressure inside the vacuum chamber. Electric power is applied from a DC power supply to cause discharge, and the glass substrate 14 placed in the substrate holder 7 is moved by a conveyor belt, thereby applying power to the front surface of the target to deposit a film.
以下具体的に実施例で説明する。This will be explained in detail below using examples.
９９．９％の金属チタニウムをターゲット１２としてカ
ソード５に取付け、基板ホルダー７の上に６１鳳厚で一
辺がＬｏｏｍ−の洗浄されたガラス板１４をのせる。真
空槽１内を６．７ Ｘ １０−’Ｐａに減圧後窒素ガス
をガス供給管より導入し、０．２７Ｐａとした。カソー
ド５に５５０Ｖの負電位を印加し、ガラス基板をカソー
ドの下を通過させながら、被膜を付着させた。窒素のガ
ス供給を停止し真空槽ｌ内を再び６．７ Ｘ Ｉ Ｏ−
’Ｐａまで減圧後、ガス供給管より元のボンベを取替え
て酸素ガスを導入し、真空槽１内を０．２７Ｐａにした
。カソード６に４５０Ｖの負電圧を印加して再びガラス
基板１４をカソードの下を再度通過させた。かくしてガ
ラス基板の上に窒化チタンと酸素チタンの第２図で示さ
れる２層構成からなる膜を被覆した。窒化チタンと酸化
チタンの膜厚を種々変えて同様の手順でガラス基板上に
２層構成からなる被膜を作成し、得られた熱線反射性能
を有するガラスの光学特性を測定し、表１の結果を得た
。A 99.9% titanium metal is attached to the cathode 5 as a target 12, and a cleaned glass plate 14 with a 61mm thickness and a loom side on one side is placed on the substrate holder 7. After reducing the pressure inside the vacuum chamber 1 to 6.7 x 10-'Pa, nitrogen gas was introduced through the gas supply pipe to bring the pressure to 0.27Pa. A negative potential of 550 V was applied to the cathode 5, and the film was deposited while passing the glass substrate under the cathode. Stop the nitrogen gas supply and return the inside of the vacuum chamber to 6.7
After the pressure was reduced to 'Pa, the original cylinder was replaced through the gas supply pipe and oxygen gas was introduced to bring the inside of the vacuum chamber 1 to 0.27 Pa. A negative voltage of 450 V was applied to the cathode 6, and the glass substrate 14 was passed under the cathode again. In this way, a film consisting of two layers of titanium nitride and titanium oxygen as shown in FIG. 2 was coated on the glass substrate. A two-layer film was created on a glass substrate using the same procedure with various film thicknesses of titanium nitride and titanium oxide, and the optical properties of the resulting glass with heat ray reflection performance were measured. The results are shown in Table 1. I got it.
以上の実施例から、窒化チタニウムの膜厚とその上の酸
化物被膜の膜厚が第１図の斜線の範囲内であると、青色
から緑色の反射色調の熱線反射ガラス板が得られること
が判る。From the above examples, it can be seen that when the thickness of the titanium nitride film and the thickness of the oxide film thereon are within the range of the diagonal lines in Fig. 1, a heat ray reflective glass plate with a reflection color ranging from blue to green can be obtained. I understand.
合せを示す図である。第２図は本発明の透明体の断面図
である。第３図は本発明の実施に使用したスパッタリン
グ装置の概略図である。FIG. FIG. 2 is a sectional view of the transparent body of the present invention. FIG. 3 is a schematic diagram of a sputtering apparatus used to implement the present invention.
２１：金属酸化物膜、２２：金属窒化物膜。21: Metal oxide film, 22: Metal nitride film.
２３ニガラス
〔本発明の効果〕
以上の発明によれば、被膜面側であるガラス面からの反
射色が青色から緑色を呈する熱線反射性能を有するガラ
ス板が得られ、建築物に被膜面側を外側にして本透明板
を使用すれば、落ちついた雰囲気を建物に与えることが
できる。また被ｎりは２層構成から成るため色の再現性
が優れているのと同時に、被膜の耐候性、耐久性がある
ため、複層ガラスにすることなく単板で使用することが
できる。23 Nigarasu [Effects of the Invention] According to the above invention, a glass plate having heat ray reflection performance in which the reflection color from the glass surface, which is the coated side, changes from blue to green, can be obtained, and the coated side can be attached to a building. By using this transparent board on the outside, you can give the building a calm atmosphere. Furthermore, since the coating has a two-layer structure, it has excellent color reproducibility, and at the same time, the coating has weather resistance and durability, so it can be used as a single sheet without having to use double-layered glass.
またガラス側に第１層として被覆される金属窒化物の膜
とその上に被覆される金属酸化物の膜の両者を、金属を
ターゲットとする反応性スパッタリング法で被覆すると
、スパッタリングガスの切替のみで真空を破ることなく
、したがって能率よ＜２１！構成からなる被膜を有する
透明板が得られる。Furthermore, if both the metal nitride film coated as the first layer on the glass side and the metal oxide film coated thereon are coated using a reactive sputtering method using a metal as a target, it is possible to simply switch the sputtering gas. Without breaking the vacuum, the efficiency is <21! A transparent plate having a coating consisting of the following is obtained.
第１図は本発明の第１層目の窒化チタン膜とその上に被
覆される金属酸化物の膜厚の好ましい組第
図
第
図
第
図Figure 1 shows a preferred set of film thicknesses for the first titanium nitride film of the present invention and the metal oxide coated thereon.
Claims (4)
れ、該窒化チタン膜上に透明な金属酸化物からなる被膜
が形成された、該透明基体の他方の面に於ける反射光が
青色乃至緑色を呈する透明体。(1) A titanium nitride film is formed on one surface of a transparent substrate, and a coating made of a transparent metal oxide is formed on the titanium nitride film, and the reflected light on the other surface of the transparent substrate is A transparent body that exhibits a blue to green color.
第１図の斜線で示される範囲内にありかつ、該金属酸化
物の屈折率が１．９〜２．６である特許請求範囲第１項
記載の透明板。(2) The film thickness of the titanium nitride film and the metal oxide is
1. The transparent plate according to claim 1, wherein the metal oxide has a refractive index of 1.9 to 2.6 within the range shown by hatching in FIG.
、酸化タンタル、酸化ジルコニウム、錫ドープ酸化イン
ジウムおよび酸化インジウムのいずれかからなる特許請
求範囲第１項または第２項記載の透明板。(3) The transparent plate according to claim 1 or 2, wherein the metal oxide is made of any one of titanium oxide, tin oxide, zinc oxide, tantalum oxide, zirconium oxide, tin-doped indium oxide, and indium oxide.
、該真空容器と電気的に絶縁され、負電圧の印加が外部
の電源からできる複数のカソードを有する装置において
、該カソードに対向する位置にある基体に窒化チタン膜
にひき続き透明な金属酸化物膜を、夫々金属をターゲッ
トとして減圧された不活性ガスと、窒素ガスあるいは酸
素ガスの混合ガスからなる雰囲気によるスパッタリング
により被覆する、青色乃至緑色を呈する透明板の製造方
法。(4) In an apparatus having a plurality of cathodes in a vacuum container in which a reduced pressure atmosphere gas can be adjusted, which are electrically insulated from the vacuum container and to which a negative voltage can be applied from an external power source, facing the cathodes. A transparent metal oxide film is coated on the substrate at the position by sputtering in an atmosphere consisting of a mixed gas of reduced pressure inert gas and nitrogen gas or oxygen gas, targeting the respective metals. A method for manufacturing a transparent plate exhibiting green color.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63193894A JP2722509B2 (en) | 1988-08-03 | 1988-08-03 | Transparent plate exhibiting blue to green reflection color and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63193894A JP2722509B2 (en) | 1988-08-03 | 1988-08-03 | Transparent plate exhibiting blue to green reflection color and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0244046A true JPH0244046A (en) | 1990-02-14 |
| JP2722509B2 JP2722509B2 (en) | 1998-03-04 |
Family
ID=16315513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63193894A Expired - Fee Related JP2722509B2 (en) | 1988-08-03 | 1988-08-03 | Transparent plate exhibiting blue to green reflection color and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2722509B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02164744A (en) * | 1988-12-20 | 1990-06-25 | Asahi Glass Co Ltd | Optical body excellent in durability and heat ray reflecting glass |
| FR2722775A1 (en) * | 1994-07-25 | 1996-01-26 | Glaverbel | GLAZING WITH PYROLYTIC COATING |
| JP2007319731A (en) * | 2006-05-30 | 2007-12-13 | Ｙｋｋ Ａｐ株式会社 | Photocatalytically active film-coated article |
| JP2016503378A (en) * | 2012-11-08 | 2016-02-04 | サン−ゴバン グラス フランスＳａｉｎｔ−Ｇｏｂａｉｎ Ｇｌａｓｓ Ｆｒａｎｃｅ | Window glass with switchable optical properties |
| WO2016060083A1 (en) * | 2014-10-14 | 2016-04-21 | 旭硝子株式会社 | Window glass and transparent substrate provided with layered film |
| WO2016060082A1 (en) * | 2014-10-14 | 2016-04-21 | 旭硝子株式会社 | Layered-film-equipped transparent base plate and production method therefor |
| CN112811828A (en) * | 2020-12-31 | 2021-05-18 | 安徽天柱绿色能源科技有限公司 | Gradient solar front plate, manufacturing method thereof and solar assembly packaging structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60187671A (en) * | 1984-03-06 | 1985-09-25 | Asahi Glass Co Ltd | Formation of laminated film by reactive sputtering method |
-
1988
- 1988-08-03 JP JP63193894A patent/JP2722509B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60187671A (en) * | 1984-03-06 | 1985-09-25 | Asahi Glass Co Ltd | Formation of laminated film by reactive sputtering method |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02164744A (en) * | 1988-12-20 | 1990-06-25 | Asahi Glass Co Ltd | Optical body excellent in durability and heat ray reflecting glass |
| FR2722775A1 (en) * | 1994-07-25 | 1996-01-26 | Glaverbel | GLAZING WITH PYROLYTIC COATING |
| NL1000882C2 (en) * | 1994-07-25 | 1996-04-15 | Glaverbel | Pyrolytic coated glazing panel. |
| BE1008681A3 (en) * | 1994-07-25 | 1996-07-02 | Glaverbel | Glass carrying pyrolytic coating. |
| JP2007319731A (en) * | 2006-05-30 | 2007-12-13 | Ｙｋｋ Ａｐ株式会社 | Photocatalytically active film-coated article |
| US10061178B2 (en) | 2012-11-08 | 2018-08-28 | Saint-Gobain Glass France | Glazing having switchable optical properties |
| JP2016503378A (en) * | 2012-11-08 | 2016-02-04 | サン−ゴバン グラス フランスＳａｉｎｔ−Ｇｏｂａｉｎ Ｇｌａｓｓ Ｆｒａｎｃｅ | Window glass with switchable optical properties |
| WO2016060083A1 (en) * | 2014-10-14 | 2016-04-21 | 旭硝子株式会社 | Window glass and transparent substrate provided with layered film |
| JP2016079052A (en) * | 2014-10-14 | 2016-05-16 | 旭硝子株式会社 | Window pane, and transparent substrate with laminated film |
| JP2016079051A (en) * | 2014-10-14 | 2016-05-16 | 旭硝子株式会社 | Laminated film-equipped transparent substrate, and method for producing the same |
| WO2016060082A1 (en) * | 2014-10-14 | 2016-04-21 | 旭硝子株式会社 | Layered-film-equipped transparent base plate and production method therefor |
| CN112811828A (en) * | 2020-12-31 | 2021-05-18 | 安徽天柱绿色能源科技有限公司 | Gradient solar front plate, manufacturing method thereof and solar assembly packaging structure |
| CN112811828B (en) * | 2020-12-31 | 2023-02-21 | 安徽天柱绿色能源科技有限公司 | Gradient solar front plate, manufacturing method thereof and solar assembly packaging structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2722509B2 (en) | 1998-03-04 |
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