JPH0242457U - - Google Patents

Info

Publication number
JPH0242457U
JPH0242457U JP1988121705U JP12170588U JPH0242457U JP H0242457 U JPH0242457 U JP H0242457U JP 1988121705 U JP1988121705 U JP 1988121705U JP 12170588 U JP12170588 U JP 12170588U JP H0242457 U JPH0242457 U JP H0242457U
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
sealed container
gas
outer diameter
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988121705U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521896Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988121705U priority Critical patent/JPH0521896Y2/ja
Publication of JPH0242457U publication Critical patent/JPH0242457U/ja
Application granted granted Critical
Publication of JPH0521896Y2 publication Critical patent/JPH0521896Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1988121705U 1988-09-16 1988-09-16 Expired - Lifetime JPH0521896Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988121705U JPH0521896Y2 (https=) 1988-09-16 1988-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988121705U JPH0521896Y2 (https=) 1988-09-16 1988-09-16

Publications (2)

Publication Number Publication Date
JPH0242457U true JPH0242457U (https=) 1990-03-23
JPH0521896Y2 JPH0521896Y2 (https=) 1993-06-04

Family

ID=31368961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988121705U Expired - Lifetime JPH0521896Y2 (https=) 1988-09-16 1988-09-16

Country Status (1)

Country Link
JP (1) JPH0521896Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022544452A (ja) * 2019-07-12 2022-10-19 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510153A (en) * 1978-07-07 1980-01-24 Arai Pump Mfg Co Ltd Seal and bearing
JPS5598847A (en) * 1979-01-22 1980-07-28 Hitachi Ltd High voltage resistant semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510153A (en) * 1978-07-07 1980-01-24 Arai Pump Mfg Co Ltd Seal and bearing
JPS5598847A (en) * 1979-01-22 1980-07-28 Hitachi Ltd High voltage resistant semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022544452A (ja) * 2019-07-12 2022-10-19 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ
JP2025041975A (ja) * 2019-07-12 2025-03-26 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ

Also Published As

Publication number Publication date
JPH0521896Y2 (https=) 1993-06-04

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