JPH0242457U - - Google Patents

Info

Publication number
JPH0242457U
JPH0242457U JP1988121705U JP12170588U JPH0242457U JP H0242457 U JPH0242457 U JP H0242457U JP 1988121705 U JP1988121705 U JP 1988121705U JP 12170588 U JP12170588 U JP 12170588U JP H0242457 U JPH0242457 U JP H0242457U
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
sealed container
gas
outer diameter
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988121705U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521896Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988121705U priority Critical patent/JPH0521896Y2/ja
Publication of JPH0242457U publication Critical patent/JPH0242457U/ja
Application granted granted Critical
Publication of JPH0521896Y2 publication Critical patent/JPH0521896Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1988121705U 1988-09-16 1988-09-16 Expired - Lifetime JPH0521896Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988121705U JPH0521896Y2 (enExample) 1988-09-16 1988-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988121705U JPH0521896Y2 (enExample) 1988-09-16 1988-09-16

Publications (2)

Publication Number Publication Date
JPH0242457U true JPH0242457U (enExample) 1990-03-23
JPH0521896Y2 JPH0521896Y2 (enExample) 1993-06-04

Family

ID=31368961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988121705U Expired - Lifetime JPH0521896Y2 (enExample) 1988-09-16 1988-09-16

Country Status (1)

Country Link
JP (1) JPH0521896Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022544452A (ja) * 2019-07-12 2022-10-19 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510153A (en) * 1978-07-07 1980-01-24 Arai Pump Mfg Co Ltd Seal and bearing
JPS5598847A (en) * 1979-01-22 1980-07-28 Hitachi Ltd High voltage resistant semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5510153A (en) * 1978-07-07 1980-01-24 Arai Pump Mfg Co Ltd Seal and bearing
JPS5598847A (en) * 1979-01-22 1980-07-28 Hitachi Ltd High voltage resistant semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022544452A (ja) * 2019-07-12 2022-10-19 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ
JP2025041975A (ja) * 2019-07-12 2025-03-26 ピヴォタル システムズ コーポレーション 予圧型圧電アクチュエータ及び当該アクチュエータを使用したガスバルブ

Also Published As

Publication number Publication date
JPH0521896Y2 (enExample) 1993-06-04

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