JPH0242061U - - Google Patents
Info
- Publication number
- JPH0242061U JPH0242061U JP12027088U JP12027088U JPH0242061U JP H0242061 U JPH0242061 U JP H0242061U JP 12027088 U JP12027088 U JP 12027088U JP 12027088 U JP12027088 U JP 12027088U JP H0242061 U JPH0242061 U JP H0242061U
- Authority
- JP
- Japan
- Prior art keywords
- electrode member
- vacuum chamber
- transparent plate
- monitoring window
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例である監視用窓２
０を用いた真空アーク放電型ＰＶＤ装置の基本的
な構成を示す系統図、第２図は前記監視用窓２０
の構成を拡大して示す断面図、第３図は典型的な
先行技術の基本的な構成を示す簡略化した断面図
である。
１１……真空槽、１２……カソード、１３……
基材、１６……アーク電源、１８……放射温度計
、１９……透孔、２０……監視用窓、２２……電
極部材、２３……絶縁ホルダ、２５……透明板、
２６……バイアス電源、３８……金属イオン。
Figure 1 shows a monitoring window 2 which is an embodiment of this invention.
FIG. 2 is a system diagram showing the basic configuration of a vacuum arc discharge type PVD apparatus using
FIG. 3 is a simplified cross-sectional view showing the basic structure of a typical prior art. 11... Vacuum chamber, 12... Cathode, 13...
Base material, 16... Arc power supply, 18... Radiation thermometer, 19... Through hole, 20... Monitoring window, 22... Electrode member, 23... Insulating holder, 25... Transparent plate,
26...bias power supply, 38...metal ion.
Claims (1)
形成し、この透孔に透明板を固定して前記真空槽
内を外部から監視することができるようにした薄
膜形成装置の監視用窓において、 前記透明板に対向して、この透明板近傍の前記
真空槽内に、網体、多孔板、またはスリツト板で
構成した電極部材を配置し、この電極部材に正の
バイアス電圧を印加するようにしたことを特徴と
する薄膜形成装置の監視用窓。[Claims for Utility Model Registration] A thin film in which a through hole is formed in a vacuum chamber that generates metal ions inside the chamber, and a transparent plate is fixed to the through hole so that the inside of the vacuum chamber can be monitored from the outside. In the monitoring window of the forming apparatus, an electrode member made of a net, a perforated plate, or a slit plate is placed in the vacuum chamber near the transparent plate, facing the transparent plate, and a positive electrode member is placed on the electrode member. A monitoring window for a thin film forming apparatus, characterized in that a bias voltage of .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12027088U JPH0242061U (en) | 1988-09-12 | 1988-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12027088U JPH0242061U (en) | 1988-09-12 | 1988-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242061U true JPH0242061U (en) | 1990-03-23 |
Family
ID=31366229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12027088U Pending JPH0242061U (en) | 1988-09-12 | 1988-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242061U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08315432A (en) * | 1995-05-15 | 1996-11-29 | Nippondenso Co Ltd | Apparatus for producing optical information recording medium and production method therefor |
-
1988
- 1988-09-12 JP JP12027088U patent/JPH0242061U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08315432A (en) * | 1995-05-15 | 1996-11-29 | Nippondenso Co Ltd | Apparatus for producing optical information recording medium and production method therefor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS53121454A (en) | Electron source of thin film electric field emission type and its manufacture | |
| CA2030965A1 (en) | Ionizable substance detector | |
| JPH0242061U (en) | ||
| JPH0435392U (en) | ||
| JPS5878557U (en) | Field emission ion source | |
| US3984720A (en) | Discharge display device | |
| JPS6354241U (en) | ||
| JPH02106457U (en) | ||
| JPS62110264U (en) | ||
| JPS6218796U (en) | ||
| JPS6339164U (en) | ||
| JPS6418568U (en) | ||
| JPS59129872U (en) | plasma etching equipment | |
| JPS62130498U (en) | ||
| JPS6438748U (en) | ||
| JPH0281038U (en) | ||
| JPH0158661U (en) | ||
| JPH01142453U (en) | ||
| SE7812025L (en) | IONIZATION CHAMBER | |
| JPS62193659U (en) | ||
| JPH01307284A (en) | Discharge electrode | |
| JPS62110266U (en) | ||
| GB1273778A (en) | Apparatus for making visible invisible radiation | |
| JPH0334261U (en) | ||
| JPS63135495U (en) |