JPH0242061U - - Google Patents
Info
- Publication number
- JPH0242061U JPH0242061U JP12027088U JP12027088U JPH0242061U JP H0242061 U JPH0242061 U JP H0242061U JP 12027088 U JP12027088 U JP 12027088U JP 12027088 U JP12027088 U JP 12027088U JP H0242061 U JPH0242061 U JP H0242061U
- Authority
- JP
- Japan
- Prior art keywords
- electrode member
- vacuum chamber
- transparent plate
- monitoring window
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12027088U JPH0242061U (bg) | 1988-09-12 | 1988-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12027088U JPH0242061U (bg) | 1988-09-12 | 1988-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0242061U true JPH0242061U (bg) | 1990-03-23 |
Family
ID=31366229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12027088U Pending JPH0242061U (bg) | 1988-09-12 | 1988-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0242061U (bg) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08315432A (ja) * | 1995-05-15 | 1996-11-29 | Nippondenso Co Ltd | 光情報記録媒体の製造装置及び製造方法 |
-
1988
- 1988-09-12 JP JP12027088U patent/JPH0242061U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08315432A (ja) * | 1995-05-15 | 1996-11-29 | Nippondenso Co Ltd | 光情報記録媒体の製造装置及び製造方法 |
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