JPH0241585B2 - - Google Patents
Info
- Publication number
- JPH0241585B2 JPH0241585B2 JP16316085A JP16316085A JPH0241585B2 JP H0241585 B2 JPH0241585 B2 JP H0241585B2 JP 16316085 A JP16316085 A JP 16316085A JP 16316085 A JP16316085 A JP 16316085A JP H0241585 B2 JPH0241585 B2 JP H0241585B2
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- main magnet
- target
- target body
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 26
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000011949 advanced processing technology Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16316085A JPS6223979A (ja) | 1985-07-24 | 1985-07-24 | マグネトロンスパツタリング用タ−ゲツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16316085A JPS6223979A (ja) | 1985-07-24 | 1985-07-24 | マグネトロンスパツタリング用タ−ゲツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223979A JPS6223979A (ja) | 1987-01-31 |
| JPH0241585B2 true JPH0241585B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-18 |
Family
ID=15768369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16316085A Granted JPS6223979A (ja) | 1985-07-24 | 1985-07-24 | マグネトロンスパツタリング用タ−ゲツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6223979A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511677U (ja) * | 1991-07-26 | 1993-02-12 | ソニー株式会社 | カードコマンダ |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4592852B2 (ja) * | 1999-11-12 | 2010-12-08 | キヤノンアネルバ株式会社 | スパッタリング装置のマグネトロンカソード |
| PL2661514T3 (pl) | 2011-01-06 | 2020-11-16 | Bühler AG | Zespół magnetronowy i system rozpylania zawierający zespół magnetronowy |
| CN103046009A (zh) * | 2011-10-13 | 2013-04-17 | 鸿富锦精密工业（深圳）有限公司 | 平面磁控溅射阴极 |
| JP2015530482A (ja) | 2012-09-04 | 2015-10-15 | スパッタリング・コンポーネンツ・インコーポレーテッド | スパッタリング装置 |
-
1985
- 1985-07-24 JP JP16316085A patent/JPS6223979A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511677U (ja) * | 1991-07-26 | 1993-02-12 | ソニー株式会社 | カードコマンダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223979A (ja) | 1987-01-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |