JPH0241361U - - Google Patents
Info
- Publication number
- JPH0241361U JPH0241361U JP11917888U JP11917888U JPH0241361U JP H0241361 U JPH0241361 U JP H0241361U JP 11917888 U JP11917888 U JP 11917888U JP 11917888 U JP11917888 U JP 11917888U JP H0241361 U JPH0241361 U JP H0241361U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- transport
- path
- conveyance path
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11917888U JPH0743680Y2 (ja) | 1988-09-10 | 1988-09-10 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11917888U JPH0743680Y2 (ja) | 1988-09-10 | 1988-09-10 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0241361U true JPH0241361U (cs) | 1990-03-22 |
| JPH0743680Y2 JPH0743680Y2 (ja) | 1995-10-09 |
Family
ID=31364188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11917888U Expired - Lifetime JPH0743680Y2 (ja) | 1988-09-10 | 1988-09-10 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743680Y2 (cs) |
-
1988
- 1988-09-10 JP JP11917888U patent/JPH0743680Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743680Y2 (ja) | 1995-10-09 |
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