JPH0241183B2 - - Google Patents

Info

Publication number
JPH0241183B2
JPH0241183B2 JP55172046A JP17204680A JPH0241183B2 JP H0241183 B2 JPH0241183 B2 JP H0241183B2 JP 55172046 A JP55172046 A JP 55172046A JP 17204680 A JP17204680 A JP 17204680A JP H0241183 B2 JPH0241183 B2 JP H0241183B2
Authority
JP
Japan
Prior art keywords
resistance element
metal film
shield metal
gauge resistance
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55172046A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5796573A (en
Inventor
Yukio Takahashi
Michitaka Shimazoe
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55172046A priority Critical patent/JPS5796573A/ja
Publication of JPS5796573A publication Critical patent/JPS5796573A/ja
Publication of JPH0241183B2 publication Critical patent/JPH0241183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP55172046A 1980-12-08 1980-12-08 Semiconductor strain transducer Granted JPS5796573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55172046A JPS5796573A (en) 1980-12-08 1980-12-08 Semiconductor strain transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55172046A JPS5796573A (en) 1980-12-08 1980-12-08 Semiconductor strain transducer

Publications (2)

Publication Number Publication Date
JPS5796573A JPS5796573A (en) 1982-06-15
JPH0241183B2 true JPH0241183B2 (enrdf_load_stackoverflow) 1990-09-14

Family

ID=15934526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55172046A Granted JPS5796573A (en) 1980-12-08 1980-12-08 Semiconductor strain transducer

Country Status (1)

Country Link
JP (1) JPS5796573A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127793A (ja) * 2010-12-15 2012-07-05 Panasonic Corp 半導体圧力センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU503379B1 (en) * 1978-08-28 1979-08-30 Babcock & Wilcox Co., The Pressure transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012127793A (ja) * 2010-12-15 2012-07-05 Panasonic Corp 半導体圧力センサ

Also Published As

Publication number Publication date
JPS5796573A (en) 1982-06-15

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