JPH0241169Y2 - - Google Patents

Info

Publication number
JPH0241169Y2
JPH0241169Y2 JP7272583U JP7272583U JPH0241169Y2 JP H0241169 Y2 JPH0241169 Y2 JP H0241169Y2 JP 7272583 U JP7272583 U JP 7272583U JP 7272583 U JP7272583 U JP 7272583U JP H0241169 Y2 JPH0241169 Y2 JP H0241169Y2
Authority
JP
Japan
Prior art keywords
frequency power
high frequency
power source
electrode
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7272583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59178899U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7272583U priority Critical patent/JPS59178899U/ja
Publication of JPS59178899U publication Critical patent/JPS59178899U/ja
Application granted granted Critical
Publication of JPH0241169Y2 publication Critical patent/JPH0241169Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP7272583U 1983-05-16 1983-05-16 プラズマ発生装置 Granted JPS59178899U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7272583U JPS59178899U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7272583U JPS59178899U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS59178899U JPS59178899U (ja) 1984-11-29
JPH0241169Y2 true JPH0241169Y2 (enExample) 1990-11-01

Family

ID=30202859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7272583U Granted JPS59178899U (ja) 1983-05-16 1983-05-16 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPS59178899U (enExample)

Also Published As

Publication number Publication date
JPS59178899U (ja) 1984-11-29

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