JPH0240953A - Semicustomized semiconductor integrated circuit - Google Patents
Semicustomized semiconductor integrated circuitInfo
- Publication number
- JPH0240953A JPH0240953A JP19162988A JP19162988A JPH0240953A JP H0240953 A JPH0240953 A JP H0240953A JP 19162988 A JP19162988 A JP 19162988A JP 19162988 A JP19162988 A JP 19162988A JP H0240953 A JPH0240953 A JP H0240953A
- Authority
- JP
- Japan
- Prior art keywords
- unit cell
- island
- integrated circuit
- semiconductor integrated
- semiconductor region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 abstract description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11803—Masterslice integrated circuits using field effect technology
- H01L27/11807—CMOS gate arrays
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はセミカスタム集積回路に関し、特にディジタル
回路とアナログ回路を含むセミカスタム半導体集積回路
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to semi-custom integrated circuits, and particularly to semi-custom semiconductor integrated circuits including digital circuits and analog circuits.
従来、ディジタル回路の分野では、標準化された抵抗や
トランジスタ等の素子で構成した単位セルをチップ上に
規則的に配列し、種々の回路設計に応じて任意の配線を
形成することにより所望の集積回路を構成するようにし
たゲートアレイと称されるセミカスタム半導体集積回路
が広く用いられている。Conventionally, in the field of digital circuits, unit cells made of standardized resistors, transistors, and other elements are regularly arranged on a chip, and desired integration is achieved by forming arbitrary wiring according to various circuit designs. Semi-custom semiconductor integrated circuits called gate arrays are widely used.
例えば、第5図は従来のCMOSゲートアレイの構成を
示す平面図である。通常、矩形に定義された単位セル1
の内部にPチャネル、Nチャネルの各MO3)ランジス
タを形成しておりこれらの単位セル1を規則的に並べて
複数個のセル行列2を形成している。また、セル行列2
の間には配線領域3を画成し、更にチップ外周領域4に
は入出力バッド5や人出力バッファ回路等を配置してい
る。そして、単位セル1を1個或いは複数個用いて種々
の回路プコックを構成し、これらをセル行列2の適当な
位置に割り当て、これらを配線領域3を利用して配線接
続することにより、所望の回路が実現できる。For example, FIG. 5 is a plan view showing the configuration of a conventional CMOS gate array. Unit cell 1, usually defined as a rectangle
P-channel and N-channel MO3) transistors are formed inside the cell, and these unit cells 1 are regularly arranged to form a plurality of cell matrices 2. Also, cell matrix 2
A wiring area 3 is defined between them, and an input/output pad 5, a human output buffer circuit, etc. are arranged in the chip outer peripheral area 4. Then, by configuring various circuit blocks using one or more unit cells 1, assigning these to appropriate positions in the cell matrix 2, and connecting them using the wiring area 3, desired results can be realized. The circuit can be realized.
ところで、最近の半導体集積回路の大規模化に伴い、例
えば従来ではディジタル回路をCMO3素子で、またア
ナログ回路をバイポーラ素子で夫々構成していたシステ
ムを、単一チップで構成することが要求され、それまで
ディジタル回路用のCMOSプロセスをアナログ回路に
利用する回路技術や、バイポーラ素子とCMO3素子と
を同時に形成スるBiCMO3(パイシーモス)プロセ
ス技術が開発されてきている。By the way, with the recent increase in the scale of semiconductor integrated circuits, for example, it is now required to configure a system in which the digital circuit was conventionally configured with three CMO elements and the analog circuit with bipolar elements on a single chip. Until then, circuit technology that utilizes CMOS processes for digital circuits for analog circuits and BiCMO3 (PiCMOS) process technology that simultaneously forms bipolar elements and CMO3 elements have been developed.
しかしながら、上述した従来の構成では、ディジタル回
路を前提にして設計されているため、単位セルを用いて
定義されるブロックは全てディジタル回路用ゲートとな
っており、この種の半導体集積回路にそのままアナログ
回路を実現することができず、上述した最近の要求に応
えることができないという問題が生じている。However, since the above-mentioned conventional configuration is designed assuming a digital circuit, all blocks defined using unit cells are gates for digital circuits, and analog A problem has arisen in that the circuit cannot be realized and the recent demands mentioned above cannot be met.
本発明はディジタル回路はもとより、アナログ回路を実
現することが可能なゲートアレイ構成のセミカスタム半
導体集積回路を提供することを目的としている。An object of the present invention is to provide a semi-custom semiconductor integrated circuit having a gate array configuration that can realize not only a digital circuit but also an analog circuit.
〔課題を解決するための手段〕
本発明のセミカスタム半導体集積回路は、単位セルに隣
接する配線領域位置に、基板と逆導電型の島状半導体領
域を形成し、かっこの島状半導体領域の一部を単位セル
内に延在させた構成としている。[Means for Solving the Problems] The semi-custom semiconductor integrated circuit of the present invention forms an island-shaped semiconductor region of a conductivity type opposite to that of the substrate at a wiring region position adjacent to a unit cell. It has a configuration in which a part of it extends inside the unit cell.
上述した構成では、島状半導体領域を抵抗素子又は容量
素子として利用でき、その一部において単位セルにコン
タクト接続することにより、単位セルをディジタルブロ
ックはもとより、アナログブロックとして構成すること
が可能となる。In the above-described configuration, the island-shaped semiconductor region can be used as a resistive element or a capacitive element, and by contact-connecting a part of the island-shaped semiconductor region to a unit cell, it becomes possible to configure the unit cell not only as a digital block but also as an analog block. .
次に、本発明を図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の第1実施例の平面図である。FIG. 1 is a plan view of a first embodiment of the present invention.
図において、矩形に定義されて内部にPチャネルMoS
トランジスタとNチャネルMO3I−ランジスタを含む
単位セル1をアレイ状に配置してセル行列2を形成して
いる。また、複数のセル行列2は配線領域3を介して配
列している。そして、チップ外周領域4には、入出力パ
ッド5や入出力バッファ回路等を配設している。In the figure, a P-channel MoS is defined inside a rectangle.
A cell matrix 2 is formed by arranging unit cells 1 including transistors and N-channel MO3I transistors in an array. Further, the plurality of cell matrices 2 are arranged with wiring regions 3 interposed therebetween. In the chip outer peripheral region 4, input/output pads 5, input/output buffer circuits, etc. are arranged.
前記単位セル1を第2図に拡大して示す。単位セルl内
には、ゲート多結晶シリコンllaとP型拡散層11b
で構成されるPチャネルMOSトランジスタ11と、ゲ
ート多結晶シリコン12aとN型拡散層12bで構成さ
れるNチャネルMOSトランジスタ12を形成している
。また、単位セルlの両外側の配線領域3には、夫々3
字状をした島状半導体領域6を形成している。この島状
半導体領域6は半導体基板と逆導電型の不純物を拡散し
ており、その両端は単位セル1内にまで延長されている
。The unit cell 1 is shown enlarged in FIG. Inside the unit cell l, there is a gate polycrystalline silicon lla and a P-type diffusion layer 11b.
A P-channel MOS transistor 11 made up of the above structure and an N-channel MOS transistor 12 made up of a gate polycrystalline silicon 12a and an N-type diffusion layer 12b are formed. In addition, in the wiring area 3 on both sides of the unit cell l, there are 3
A letter-shaped island-shaped semiconductor region 6 is formed. This island-shaped semiconductor region 6 has impurities of a conductivity type opposite to that of the semiconductor substrate diffused therein, and both ends thereof extend into the unit cell 1.
この構成によれば、島状半導体領域6は、拡散抵抗素子
として、或いは拡散容量素子として利用できる。また、
この島状半導体領域6の両端は単位セル1内に°まで延
長されているため、この部分に拡散層コンタクトを付加
することにより、単位セル1に抵抗又は容量を接続した
構成とすることができる。According to this configuration, the island-shaped semiconductor region 6 can be used as a diffusion resistance element or a diffusion capacitance element. Also,
Since both ends of this island-shaped semiconductor region 6 extend up to 300 degrees inside the unit cell 1, by adding a diffusion layer contact to this part, it is possible to create a configuration in which a resistor or a capacitor is connected to the unit cell 1. .
例えば、第3図(a)のように、単位セル1内に内部配
線7a、7b、7cを形成し、かつ島状半導体領域6の
両端にコンタクト8を形成することにより、第3図(b
)に示す等価回路のように、単位セル1に抵抗を保有さ
せることが可能となり、この単位セル1をアナログ回路
ブロックとして構成することが可能となる。For example, as shown in FIG. 3(a), by forming internal wirings 7a, 7b, and 7c in the unit cell 1, and forming contacts 8 at both ends of the island-shaped semiconductor region 6, as shown in FIG.
), it becomes possible to make the unit cell 1 have a resistance, and it becomes possible to configure this unit cell 1 as an analog circuit block.
なお、島状半導体領域6の層抵抗ρ3=50Ω/ロ、単
位面積当たりの容量値を7 Xl0−’PF/μ2とし
、島状半導体領域の幅W=10μm、長さL=200μ
mとすれば、抵抗素子として用いたときの抵抗値Rは、
次式のように表される。Note that the layer resistance ρ3 of the island-shaped semiconductor region 6 is 50 Ω/2, the capacitance value per unit area is 7
m, the resistance value R when used as a resistance element is
It is expressed as the following formula.
R=ρ、・L/W
、°、 R=50x 200/10= I KΩとなる
。R=ρ, ·L/W, °, R=50x 200/10=I KΩ.
同様に、容量値Cは、島状半導体領域6の面積A、と単
位面積当たりの容量CAを用いて、次式7式%
ここで、第4図に示すように、単位セル1の図示下側に
形成した島状半導体領域6Aを大きな面積に形成しても
よく、第2図、第3図の構成に比較して小さい抵抗値、
或いは大きな容量値を得ることが可能となる。この島状
半導体領域は、配線領域3の幅寸法の172程度まで大
きくすることが可能である。Similarly, the capacitance value C is calculated using the following formula 7 using the area A of the island-shaped semiconductor region 6 and the capacitance CA per unit area. Here, as shown in FIG. The island-shaped semiconductor region 6A formed on the side may be formed in a large area, and the resistance value is smaller than that in the configurations shown in FIGS. 2 and 3.
Alternatively, it becomes possible to obtain a large capacitance value. This island-shaped semiconductor region can be made as large as about 172 times the width of the wiring region 3.
以上説明したように本発明は、単位セルに隣接する配線
領域位置に、基板と逆導電型の島状半導体領域をその一
部を単位セル内に延在させた状態に形成しているので、
島状半導体領域を単位セルにコンタクト接続することに
より抵抗素子又は容量素子として利用でき、単位セルを
ディジタルブロックはもとより、アナログプロ・ンクと
して構成することが可能となる。これにより、近年要求
されているディジタル回路、アナログ回路を含む半導体
集積回路の1チツプ化を実現できる。また、この構成で
は従来のCMOSゲートアレイに適用すれば、従来プロ
セスを変更することなく容易に製造することも可能とな
る。As explained above, in the present invention, an island-shaped semiconductor region of a conductivity type opposite to that of the substrate is formed in a wiring region adjacent to a unit cell, with a portion of the island-shaped semiconductor region extending into the unit cell.
By contact-connecting the island-shaped semiconductor region to a unit cell, it can be used as a resistive element or a capacitive element, and the unit cell can be configured not only as a digital block but also as an analog block. This makes it possible to realize the integration of semiconductor integrated circuits including digital circuits and analog circuits into a single chip, which has been required in recent years. Furthermore, if this configuration is applied to a conventional CMOS gate array, it can be easily manufactured without changing the conventional process.
第1図は本発明の一実施例の全体平面図、第2図は単位
セルの拡大平面図、第3図は島状半導体領域を接続した
状態を示し、同図(a)は配線状態の拡大平面図、同図
(b)は等価回路図、第4図は単位セルの変形例の拡大
平面図、第5図は従来のセミカスタム半導体集積回路の
全体平面図である。
1・・・単位セル、2・・・セル行列、3・・・配線領
域、4・・・チップ外周領域、5・・・人出力パッド、
6・・・島状半導体領域、7a、7b、7c・・・内部
配線、8・・・コンタクト、11・・・PチャネルMO
3)ランジスタ、12・・・NチャネルMO3)ランジ
スタ。
第2図
第1図
第3図
第4
図FIG. 1 is an overall plan view of an embodiment of the present invention, FIG. 2 is an enlarged plan view of a unit cell, FIG. 3 shows a state in which island-shaped semiconductor regions are connected, and FIG. FIG. 4 is an enlarged plan view of a modified example of a unit cell, and FIG. 5 is an overall plan view of a conventional semi-custom semiconductor integrated circuit. DESCRIPTION OF SYMBOLS 1... Unit cell, 2... Cell matrix, 3... Wiring area, 4... Chip outer area, 5... Human output pad,
6... Island-shaped semiconductor region, 7a, 7b, 7c... Internal wiring, 8... Contact, 11... P channel MO
3) Transistor, 12...N channel MO3) Transistor. Figure 2 Figure 1 Figure 3 Figure 4
Claims (1)
置してセル行列を構成し、かつ複数のセル行列を配線領
域を介して配列してなるセミカスタム半導体集積回路に
おいて、前記単位セルに隣接する配線領域位置には、基
板と逆導電型の島状半導体領域を構成し、この島状半導
体領域の一部を単位セル内に延在させたことを特徴とす
るセミカスタム半導体集積回路。1. In a semi-custom semiconductor integrated circuit formed by arranging unit cells including MOS transistors in an array to form a cell matrix and arranging a plurality of cell matrices via a wiring region, wiring adjacent to the unit cell. A semi-custom semiconductor integrated circuit characterized in that an island-shaped semiconductor region of a conductivity type opposite to that of a substrate is formed at a region position, and a part of this island-shaped semiconductor region extends within a unit cell.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19162988A JPH0240953A (en) | 1988-07-30 | 1988-07-30 | Semicustomized semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19162988A JPH0240953A (en) | 1988-07-30 | 1988-07-30 | Semicustomized semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0240953A true JPH0240953A (en) | 1990-02-09 |
Family
ID=16277827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19162988A Pending JPH0240953A (en) | 1988-07-30 | 1988-07-30 | Semicustomized semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0240953A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6265068B1 (en) | 1997-11-26 | 2001-07-24 | 3M Innovative Properties Company | Diamond-like carbon coatings on inorganic phosphors |
-
1988
- 1988-07-30 JP JP19162988A patent/JPH0240953A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6265068B1 (en) | 1997-11-26 | 2001-07-24 | 3M Innovative Properties Company | Diamond-like carbon coatings on inorganic phosphors |
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