JPH0240481Y2 - - Google Patents

Info

Publication number
JPH0240481Y2
JPH0240481Y2 JP14094983U JP14094983U JPH0240481Y2 JP H0240481 Y2 JPH0240481 Y2 JP H0240481Y2 JP 14094983 U JP14094983 U JP 14094983U JP 14094983 U JP14094983 U JP 14094983U JP H0240481 Y2 JPH0240481 Y2 JP H0240481Y2
Authority
JP
Japan
Prior art keywords
drive shaft
amount
movement
position detection
springs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14094983U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6049411U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14094983U priority Critical patent/JPS6049411U/ja
Publication of JPS6049411U publication Critical patent/JPS6049411U/ja
Application granted granted Critical
Publication of JPH0240481Y2 publication Critical patent/JPH0240481Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP14094983U 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置 Granted JPS6049411U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14094983U JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14094983U JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Publications (2)

Publication Number Publication Date
JPS6049411U JPS6049411U (ja) 1985-04-06
JPH0240481Y2 true JPH0240481Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-29

Family

ID=30315390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14094983U Granted JPS6049411U (ja) 1983-09-13 1983-09-13 空気圧式操作器の位置検出装置

Country Status (1)

Country Link
JP (1) JPS6049411U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015049958A1 (ja) * 2013-10-01 2015-04-09 浜松ホトニクス株式会社 光学モジュール

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015049958A1 (ja) * 2013-10-01 2015-04-09 浜松ホトニクス株式会社 光学モジュール
JP2015073338A (ja) * 2013-10-01 2015-04-16 浜松ホトニクス株式会社 光学モジュール
CN105594114A (zh) * 2013-10-01 2016-05-18 浜松光子学株式会社 光学模块
CN105594114B (zh) * 2013-10-01 2018-09-07 浜松光子学株式会社 光学模块

Also Published As

Publication number Publication date
JPS6049411U (ja) 1985-04-06

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