JP2015073338A - 光学モジュール - Google Patents
光学モジュール Download PDFInfo
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- JP2015073338A JP2015073338A JP2013206686A JP2013206686A JP2015073338A JP 2015073338 A JP2015073338 A JP 2015073338A JP 2013206686 A JP2013206686 A JP 2013206686A JP 2013206686 A JP2013206686 A JP 2013206686A JP 2015073338 A JP2015073338 A JP 2015073338A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 98
- 239000004065 semiconductor Substances 0.000 claims abstract description 109
- 239000000758 substrate Substances 0.000 claims abstract description 91
- 238000001514 detection method Methods 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 30
- 229920005591 polysilicon Polymers 0.000 description 30
- 230000005540 biological transmission Effects 0.000 description 23
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 244000126211 Hericium coralloides Species 0.000 description 7
- 238000007667 floating Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000000708 deep reactive-ion etching Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0163—Spring holders
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
Description
[第1実施形態]
x1=f/K1・・・(1)
x2=f/K2・・・(2)
x=x1+x2=f(1/K1+2/K2)・・・(3)
λ=2W/m・・・(4)
Δλ=λ/(m+1)・・・(5)
[第2実施形態]
Claims (9)
- 半導体基板と、
前記半導体基板に固定された固定部、及び、前記固定部との間に発生する静電力によって、前記固定部に対して移動させられる可動部を有する静電アクチュエータと、
前記可動部に接続され、第1ばね定数を有する第1ばね部と、
前記第1ばね部と前記半導体基板との間に接続され、前記第1ばね定数よりも大きい第2ばね定数を有する第2ばね部と、
前記第1ばね部と前記第2ばね部との接続部に接続された光学部品と、を備える、光学モジュール。 - 前記固定部と前記可動部との間の静電容量を検出し、その検出結果に基づいて前記固定部と前記可動部との間に駆動電圧を印加する制御部を更に備える、請求項1記載の光学モジュール。
- 前記光学部品は、ファブリペロ干渉フィルタの可動ミラーである、請求項1又は2記載の光学モジュール。
- 前記可動部、前記第1ばね部、前記第2ばね部及び前記光学部品は、前記半導体基板に一体的に形成されている、請求項1〜3のいずれか一項記載の光学モジュール。
- 前記第1ばね部は、並列に設けられた複数の第1ばねを含み、
前記第2ばね部は、並列に設けられた複数の第2ばねを含む、請求項1〜4のいずれか一項記載の光学モジュール。 - 前記光学部品は、前記半導体基板に対して平行に駆動させられる、請求項1〜5のいずれか一項記載の光学モジュール。
- 前記第1ばね部は、前記可動部が固定された一端、及び前記接続部となる他端を有し、
前記第2ばね部は、前記接続部となる一端、及び前記半導体基板に固定された他端を有する、請求項6記載の光学モジュール。 - 前記光学部品は、前記半導体基板に対して垂直に駆動させられる、請求項1〜5のいずれか一項記載の光学モジュール。
- 前記第1ばね部は、前記半導体基板に固定された一端、及び前記接続部となる他端を有し、
前記第2ばね部は、前記接続部となる一端、及び前記半導体基板に固定された他端を有し、
前記可動部は、前記第1ばね部の中間部に接続されている、請求項8記載の光学モジュール。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013206686A JP6196867B2 (ja) | 2013-10-01 | 2013-10-01 | 光学モジュール |
EP14851073.8A EP3054580B1 (en) | 2013-10-01 | 2014-09-08 | Optical module |
PCT/JP2014/073712 WO2015049958A1 (ja) | 2013-10-01 | 2014-09-08 | 光学モジュール |
KR1020167011010A KR102129652B1 (ko) | 2013-10-01 | 2014-09-08 | 광학 모듈 |
CN201480054282.1A CN105594114B (zh) | 2013-10-01 | 2014-09-08 | 光学模块 |
US15/025,691 US10221061B2 (en) | 2013-10-01 | 2014-09-08 | Optical module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013206686A JP6196867B2 (ja) | 2013-10-01 | 2013-10-01 | 光学モジュール |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015073338A true JP2015073338A (ja) | 2015-04-16 |
JP2015073338A5 JP2015073338A5 (ja) | 2016-09-29 |
JP6196867B2 JP6196867B2 (ja) | 2017-09-13 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013206686A Active JP6196867B2 (ja) | 2013-10-01 | 2013-10-01 | 光学モジュール |
Country Status (6)
Country | Link |
---|---|
US (1) | US10221061B2 (ja) |
EP (1) | EP3054580B1 (ja) |
JP (1) | JP6196867B2 (ja) |
KR (1) | KR102129652B1 (ja) |
CN (1) | CN105594114B (ja) |
WO (1) | WO2015049958A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6861213B2 (ja) * | 2016-08-24 | 2021-04-21 | 浜松ホトニクス株式会社 | ファブリペロー干渉フィルタ |
JP6814076B2 (ja) * | 2017-03-14 | 2021-01-13 | 浜松ホトニクス株式会社 | 光モジュール |
US11635613B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical device |
TWI782053B (zh) * | 2017-07-06 | 2022-11-01 | 日商濱松赫德尼古斯股份有限公司 | 光學裝置 |
JP6503151B1 (ja) | 2017-07-06 | 2019-04-17 | 浜松ホトニクス株式会社 | 光学デバイス |
TWI785068B (zh) | 2017-07-06 | 2022-12-01 | 日商濱松赫德尼古斯股份有限公司 | 光學裝置 |
JP7112876B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | 光学デバイス |
EP3712673B1 (en) | 2017-11-15 | 2023-11-08 | Hamamatsu Photonics K.K. | Optical device production method |
Citations (5)
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JPH0240481Y2 (ja) * | 1983-09-13 | 1990-10-29 | ||
JP2008044068A (ja) * | 2006-08-16 | 2008-02-28 | Seiko Epson Corp | アクチュエータ、光学デバイス、光スキャナ、および画像形成装置 |
JP2008256837A (ja) * | 2007-04-03 | 2008-10-23 | Yamaichi Electronics Co Ltd | ファブリペロー型波長可変フィルタおよびその製造方法 |
JP2013009447A (ja) * | 2011-06-22 | 2013-01-10 | Olympus Corp | 静電アクチュエータおよびその制御方法 |
JP2013522600A (ja) * | 2010-03-09 | 2013-06-13 | シーウェア システムズ | 光学干渉計におけるミラー位置を決定する技法 |
Family Cites Families (11)
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JP2589780B2 (ja) | 1988-07-29 | 1997-03-12 | 松下冷機株式会社 | 断熱体の製造方法 |
US6674562B1 (en) * | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
CN2663953Y (zh) * | 2003-10-08 | 2004-12-15 | 长春第一光学有限公司 | 法布里-珀罗标准具 |
US20080158568A1 (en) * | 2006-04-10 | 2008-07-03 | General Electric Company | Interferometer and method for fabricating same |
US20100220331A1 (en) * | 2006-06-06 | 2010-09-02 | Anis Zribi | Micro-electromechanical system fabry-perot filter cavity |
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US8174698B2 (en) | 2007-08-10 | 2012-05-08 | Corporation de l'Ecole Polytechnique de Montréal | MEMS tunable silicon fabry-perot cavity and applications thereof |
JP5302020B2 (ja) | 2009-01-26 | 2013-10-02 | 浜松ホトニクス株式会社 | 光モジュール |
JP5204066B2 (ja) * | 2009-09-16 | 2013-06-05 | 株式会社東芝 | Memsデバイス |
JP2011222067A (ja) | 2010-04-06 | 2011-11-04 | Hitachi Ltd | 磁気ヘッドスライダ検査装置 |
WO2015081130A1 (en) * | 2013-11-26 | 2015-06-04 | Inphenix, Inc. | Wavelength tunable mems-fabry perot filter |
-
2013
- 2013-10-01 JP JP2013206686A patent/JP6196867B2/ja active Active
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2014
- 2014-09-08 CN CN201480054282.1A patent/CN105594114B/zh active Active
- 2014-09-08 EP EP14851073.8A patent/EP3054580B1/en active Active
- 2014-09-08 KR KR1020167011010A patent/KR102129652B1/ko active IP Right Grant
- 2014-09-08 WO PCT/JP2014/073712 patent/WO2015049958A1/ja active Application Filing
- 2014-09-08 US US15/025,691 patent/US10221061B2/en active Active
Patent Citations (5)
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JPH0240481Y2 (ja) * | 1983-09-13 | 1990-10-29 | ||
JP2008044068A (ja) * | 2006-08-16 | 2008-02-28 | Seiko Epson Corp | アクチュエータ、光学デバイス、光スキャナ、および画像形成装置 |
JP2008256837A (ja) * | 2007-04-03 | 2008-10-23 | Yamaichi Electronics Co Ltd | ファブリペロー型波長可変フィルタおよびその製造方法 |
JP2013522600A (ja) * | 2010-03-09 | 2013-06-13 | シーウェア システムズ | 光学干渉計におけるミラー位置を決定する技法 |
JP2013009447A (ja) * | 2011-06-22 | 2013-01-10 | Olympus Corp | 静電アクチュエータおよびその制御方法 |
Also Published As
Publication number | Publication date |
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KR20160067130A (ko) | 2016-06-13 |
CN105594114B (zh) | 2018-09-07 |
JP6196867B2 (ja) | 2017-09-13 |
EP3054580B1 (en) | 2022-01-19 |
CN105594114A (zh) | 2016-05-18 |
KR102129652B1 (ko) | 2020-07-02 |
EP3054580A1 (en) | 2016-08-10 |
WO2015049958A1 (ja) | 2015-04-09 |
US20160244320A1 (en) | 2016-08-25 |
EP3054580A4 (en) | 2017-07-26 |
US10221061B2 (en) | 2019-03-05 |
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