JPH0240475Y2 - - Google Patents
Info
- Publication number
- JPH0240475Y2 JPH0240475Y2 JP13204085U JP13204085U JPH0240475Y2 JP H0240475 Y2 JPH0240475 Y2 JP H0240475Y2 JP 13204085 U JP13204085 U JP 13204085U JP 13204085 U JP13204085 U JP 13204085U JP H0240475 Y2 JPH0240475 Y2 JP H0240475Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- core tube
- furnace
- gas
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000010453 quartz Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13204085U JPH0240475Y2 (US07166745-20070123-C00016.png) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13204085U JPH0240475Y2 (US07166745-20070123-C00016.png) | 1985-08-29 | 1985-08-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6240497U JPS6240497U (US07166745-20070123-C00016.png) | 1987-03-11 |
JPH0240475Y2 true JPH0240475Y2 (US07166745-20070123-C00016.png) | 1990-10-29 |
Family
ID=31031057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13204085U Expired JPH0240475Y2 (US07166745-20070123-C00016.png) | 1985-08-29 | 1985-08-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0240475Y2 (US07166745-20070123-C00016.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6309877B2 (ja) * | 2014-10-29 | 2018-04-11 | 大陽日酸株式会社 | 排ガス処理装置 |
-
1985
- 1985-08-29 JP JP13204085U patent/JPH0240475Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6240497U (US07166745-20070123-C00016.png) | 1987-03-11 |
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