JPH0240440U - - Google Patents
Info
- Publication number
- JPH0240440U JPH0240440U JP11814988U JP11814988U JPH0240440U JP H0240440 U JPH0240440 U JP H0240440U JP 11814988 U JP11814988 U JP 11814988U JP 11814988 U JP11814988 U JP 11814988U JP H0240440 U JPH0240440 U JP H0240440U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mass flow
- flow rate
- supply device
- gas line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11814988U JPH0240440U (ro) | 1988-09-08 | 1988-09-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11814988U JPH0240440U (ro) | 1988-09-08 | 1988-09-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0240440U true JPH0240440U (ro) | 1990-03-19 |
Family
ID=31362253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11814988U Pending JPH0240440U (ro) | 1988-09-08 | 1988-09-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0240440U (ro) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111314A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | ガス流量制御方法 |
JPS6340739A (ja) * | 1986-08-06 | 1988-02-22 | Sumitomo Electric Ind Ltd | 質量流量制御器の校正方法及びその装置 |
JPS63129033A (ja) * | 1986-11-19 | 1988-06-01 | Sumitomo Electric Ind Ltd | ガラス原料供給方法 |
JPS63176328A (ja) * | 1987-01-14 | 1988-07-20 | Sumitomo Electric Ind Ltd | 原料供給方法および装置 |
-
1988
- 1988-09-08 JP JP11814988U patent/JPH0240440U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111314A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | ガス流量制御方法 |
JPS6340739A (ja) * | 1986-08-06 | 1988-02-22 | Sumitomo Electric Ind Ltd | 質量流量制御器の校正方法及びその装置 |
JPS63129033A (ja) * | 1986-11-19 | 1988-06-01 | Sumitomo Electric Ind Ltd | ガラス原料供給方法 |
JPS63176328A (ja) * | 1987-01-14 | 1988-07-20 | Sumitomo Electric Ind Ltd | 原料供給方法および装置 |