JPS6299329U - - Google Patents
Info
- Publication number
- JPS6299329U JPS6299329U JP18928285U JP18928285U JPS6299329U JP S6299329 U JPS6299329 U JP S6299329U JP 18928285 U JP18928285 U JP 18928285U JP 18928285 U JP18928285 U JP 18928285U JP S6299329 U JPS6299329 U JP S6299329U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- tank
- liquid
- gas phase
- vaporized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 25
- 239000012071 phase Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18928285U JPS6299329U (ro) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18928285U JPS6299329U (ro) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6299329U true JPS6299329U (ro) | 1987-06-24 |
Family
ID=31141432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18928285U Pending JPS6299329U (ro) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6299329U (ro) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040000689A (ko) * | 2002-06-25 | 2004-01-07 | 삼성전자주식회사 | 화학기상 증착공정의 원료물질 공급장치 |
| KR100990792B1 (ko) * | 2003-05-02 | 2010-10-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 다공질 유리 모재 원료 가스의 공급 장치 |
-
1985
- 1985-12-09 JP JP18928285U patent/JPS6299329U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040000689A (ko) * | 2002-06-25 | 2004-01-07 | 삼성전자주식회사 | 화학기상 증착공정의 원료물질 공급장치 |
| KR100990792B1 (ko) * | 2003-05-02 | 2010-10-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 다공질 유리 모재 원료 가스의 공급 장치 |