JPH0238924Y2 - - Google Patents
Info
- Publication number
- JPH0238924Y2 JPH0238924Y2 JP10308484U JP10308484U JPH0238924Y2 JP H0238924 Y2 JPH0238924 Y2 JP H0238924Y2 JP 10308484 U JP10308484 U JP 10308484U JP 10308484 U JP10308484 U JP 10308484U JP H0238924 Y2 JPH0238924 Y2 JP H0238924Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode terminal
- boat
- vacuum evaporation
- protector
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 3
- 230000001012 protector Effects 0.000 claims 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000012255 powdered metal Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308484U JPS6120558U (ja) | 1984-07-10 | 1984-07-10 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308484U JPS6120558U (ja) | 1984-07-10 | 1984-07-10 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6120558U JPS6120558U (ja) | 1986-02-06 |
| JPH0238924Y2 true JPH0238924Y2 (da) | 1990-10-19 |
Family
ID=30662479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10308484U Granted JPS6120558U (ja) | 1984-07-10 | 1984-07-10 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6120558U (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0754285Y2 (ja) * | 1989-10-11 | 1995-12-18 | パイオニア株式会社 | 蒸着装置 |
-
1984
- 1984-07-10 JP JP10308484U patent/JPS6120558U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120558U (ja) | 1986-02-06 |
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