JPH0238924Y2 - - Google Patents
Info
- Publication number
- JPH0238924Y2 JPH0238924Y2 JP10308484U JP10308484U JPH0238924Y2 JP H0238924 Y2 JPH0238924 Y2 JP H0238924Y2 JP 10308484 U JP10308484 U JP 10308484U JP 10308484 U JP10308484 U JP 10308484U JP H0238924 Y2 JPH0238924 Y2 JP H0238924Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode terminal
- boat
- vacuum evaporation
- protector
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 3
- 230000001012 protector Effects 0.000 claims 4
- 230000005611 electricity Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000012255 powdered metal Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
【考案の詳細な説明】
〔考案の利用分野〕
本考案は、真空蒸着装置において蒸発原料を載
置するボート状ヒータ（以下ボートと称す）の取
付け構造に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a mounting structure for a boat-shaped heater (hereinafter referred to as a boat) on which evaporation raw materials are placed in a vacuum evaporation apparatus.
真空蒸着装置においては、高温の耐熱金属にな
じまない金属、粉末の金属、非金属を蒸発原料と
する場合にボートを用いることが多い。そして、
このヒータとなるボートを抵抗加熱によつて高温
に加熱するため、ボートの両端の接続部を電極に
ビスで密着させることが一般に行なわれている。
第４図は斯る従来のボートの取付け構造を示して
おり、１はタングステン、モリブデン等から成る
ボートで、図示では割愛してあるが、凹み１ａの
両側に平板状の接続部１ｂを形成してある。そし
て、上記接続部１ｂは電極２上に載置されて、耐
熱金属よりなるビス３の先端によつて電極２に押
付けられて、密着されるようになつている。４は
電極２上に適宜の手段によつて固定された取付金
具（ビス支え）である。
In a vacuum evaporation apparatus, a boat is often used when the evaporation raw material is a metal that is not compatible with high-temperature heat-resistant metals, a powdered metal, or a nonmetal. and,
In order to heat the boat, which serves as a heater, to a high temperature by resistance heating, it is common practice to closely attach the connecting portions at both ends of the boat to the electrodes with screws.
Fig. 4 shows the mounting structure of such a conventional boat, in which 1 is a boat made of tungsten, molybdenum, etc., and although not shown in the figure, flat connecting parts 1b are formed on both sides of the recess 1a. There is. The connecting portion 1b is placed on the electrode 2 and is pressed against the electrode 2 by the tip of a screw 3 made of a heat-resistant metal so that it is in close contact with the electrode 2. Reference numeral 4 denotes a mounting fitting (screw support) fixed on the electrode 2 by appropriate means.
ところが上記構成においては、比較的軟いヒー
タ金属よりなるボート１の接続部１ｂがビス３の
先端に直接当接しているため、ビス３の先端で接
続部１ｂが変形を起こし、締付け不安定、接触抵
抗の変動が発生してボート１全体の均一な加熱
（即ち蒸発）が出来なくなるという欠点があつた。 However, in the above configuration, since the connecting portion 1b of the boat 1 made of relatively soft heater metal is in direct contact with the tip of the screw 3, the connecting portion 1b is deformed at the tip of the screw 3, resulting in unstable tightening. There was a drawback that variation in contact resistance occurred, making it impossible to uniformly heat (ie evaporate) the entire boat 1.
従つて本考案の目的とするところは、上記従来
技術のもつ欠点を解消し、ボートの接続部が変形
を起きす虞れがなく、接続部と電極とを常に安定
した状態で接触させることができるボートの取付
け構造を提供するにある。
Therefore, the purpose of the present invention is to eliminate the drawbacks of the above-mentioned prior art, to eliminate the risk of deformation of the connection part of the boat, and to maintain stable contact between the connection part and the electrode at all times. It is possible to provide a boat mounting structure.
本考案の上記目的は、ボートの接続部を保護板
を介してビスによつて電極上に押付けることによ
つて達成される。
The above object of the present invention is achieved by pressing the connecting part of the boat onto the electrode with screws through the protective plate.
第１図〜第３図は本考案の１実施例に係り、第
１図は前記第４図と対応する要部断正面図、第２
図は第１図の−線断面図、第３図は第２図の
−矢視図であり、第４図と同一の構成には同
一の符号を付してある。
1 to 3 relate to one embodiment of the present invention, and FIG. 1 is a sectional front view of main parts corresponding to FIG. 4, and FIG.
The figure is a sectional view taken along the - line in FIG. 1, and FIG. 3 is a view taken along the - arrow in FIG. 2, and the same components as in FIG. 4 are given the same reference numerals.
図において、４は取付金具で、ビス支え５と支
柱６とを備え、SUS304等の硬い耐熱金属よりな
り、両者５，６は一体となつて結合され、電極２
上に適宜の手段で固定される。７は平板状の保護
板で、取付金具４と同材質のものが用いられてい
る。この保護板７の両端部には切欠部７ａ，７ａ
が設けられ、また前記支柱６には切欠き部７ａと
対応する形状の突出部６ａが設けられており、両
者６ａ，７ａは第３図示のように係合して保護板
７が第１，２図で水平方向に移動（ズレ）不能で
あるようになつている。 In the figure, reference numeral 4 denotes a mounting bracket, which is equipped with a screw support 5 and a column 6, and is made of a hard heat-resistant metal such as SUS304.
It is fixed on the top by appropriate means. Reference numeral 7 denotes a flat protection plate made of the same material as the mounting bracket 4. Notches 7a, 7a are provided at both ends of this protection plate 7.
Further, the support 6 is provided with a protrusion 6a having a shape corresponding to the notch 7a, and both 6a and 7a are engaged as shown in the third figure, so that the protective plate 7 is connected to the first, In Figure 2, it cannot be moved (shifted) in the horizontal direction.
そして、前記ボート１の接続部１ｂは、電極２
の上面と保護板７の下面との間に挾持され、ビス
支え５に螺合したビス３を締付けることによつ
て、接続部１ｂと電極２とは強固に密着して、当
接面全体が均一な電気的接触をとるようになつて
いる。なお、ビス３が複数個ある場合、トルクド
ライバー等の締結手段を用いることが望ましい。 The connection portion 1b of the boat 1 is connected to the electrode 2.
By tightening the screw 3, which is held between the upper surface and the lower surface of the protection plate 7 and screwed into the screw support 5, the connection part 1b and the electrode 2 are firmly attached, and the entire contact surface is It is designed to make uniform electrical contact. In addition, when there are multiple screws 3, it is desirable to use fastening means such as a torque driver.
本考案は上記のようになつているので、ビス３
の先端によつて接続部１ｂが損傷する虞れがな
く、また、ビス３の押圧力が保護板７を介して拡
散して接続部１ｂに作用するので、接触信頼性は
極めて高い。また、保護板７はズリ落ちぬように
なつているので、ボート１の取替え作業も容易で
ある。 Since the present invention is as described above, the screw 3
There is no risk that the connecting portion 1b will be damaged by the tip of the screw 3, and since the pressing force of the screw 3 is diffused through the protective plate 7 and acts on the connecting portion 1b, contact reliability is extremely high. Furthermore, since the protective plate 7 is designed to prevent it from slipping, the boat 1 can be easily replaced.
なお、実施例においては、保護板７側に切欠き
部７ａを、取付金具４側に突出部６ａを設けた
が、この関係は逆でも良く、またその形状も任意
である。又、本考案でいうボートとは、ボート状
凹み上に多孔板、メツシユ等で蓋をしたものや、
シリンダ状のもの等公知のボート状ヒータを指
し、これ等総べてに適用可能なことはいうまでも
ない。 In the embodiment, the notch 7a is provided on the protection plate 7 side and the protrusion 6a is provided on the mounting bracket 4 side, but this relationship may be reversed, and the shape thereof may be arbitrary. In addition, the boat referred to in this invention is a boat-shaped depression covered with a perforated plate, mesh, etc.
It refers to known boat-shaped heaters such as cylinder-shaped heaters, and it goes without saying that it is applicable to all of them.
以上のように本考案によれば、ボートの接続部
がビスによつて損傷される虞れがなく、接続部と
電極との接触状態が常に安定しており、安定した
膜厚の製品が得られる等の実用性大なる効果を奏
する。
As described above, according to the present invention, there is no risk of the connection part of the boat being damaged by screws, the contact state between the connection part and the electrode is always stable, and a product with a stable film thickness can be obtained. It has great practical effects such as
第１図〜第３図は本考案の１実施例に係り、第
１図はボート取付け部の要部断正面図、第２図は
第１図の−線断面図、第３図は第２図の−
線矢視図、第４図は従来例を示す要部断面図で
ある。
１……ボート、１ｂ……接続部、３……ビス、
４……取付金具、５……ビス支え、６……支柱、
６ａ……突出部、７……保護板、７ａ……切欠き
部。
1 to 3 relate to one embodiment of the present invention, in which FIG. 1 is a sectional front view of the main part of the boat attachment part, FIG. 2 is a sectional view taken along the line -- in FIG. Figure -
A line arrow view and FIG. 4 are main part sectional views showing a conventional example. 1... Boat, 1b... Connection part, 3... Screw,
4... Mounting bracket, 5... Screw support, 6... Support column,
6a... Protrusion, 7... Protective plate, 7a... Notch.
Claims (1)
電極端子が該電極端子の表面に面接触して該電
極端子に対し電気を伝えると共に該電極端子表
面を保護する保護体によつて圧接されているこ
とを特徴とする真空蒸着装置。 (2) 前記保護体は、前記電極上の取付金具と係合
して水平方向に移動不能に保持されていること
を特徴とする実用新案登録請求の範囲第(1)項記
載の真空蒸着装置。 (3) 前記電極端子と圧接保護体は板状平面で圧接
されていることを特徴とする実用新案登録請求
の範囲第(1)項記載の真空蒸着装置。 (4) 前記ボート状ヒータの電極端子と保護体はビ
スによる締付で押圧されていることを特徴とす
る実用新案登録請求の範囲第(1)項記載の真空蒸
着装置。 (5) 前記ビスは前記ボート状ヒータの電極端子に
直接触れないようにして電極端子と保護体とを
押圧させるように取付けたことを特徴とする実
用新案登録請求の範囲第(4)項記載の真空蒸着装
置。[Claims for Utility Model Registration] (1) An electrode terminal of a boat-shaped heater for placing vapor deposition raw materials is in surface contact with the surface of the electrode terminal to transmit electricity to the electrode terminal and to spread the surface of the electrode terminal. A vacuum evaporation device characterized in that the device is pressure-welded by a protective body. (2) The vacuum evaporation apparatus according to claim 1, wherein the protector is held immovably in the horizontal direction by engaging with a mounting bracket on the electrode. . (3) The vacuum evaporation apparatus according to claim 1, wherein the electrode terminal and the press-contact protector are press-contacted on a plate-like plane. (4) The vacuum evaporation apparatus according to claim 1, wherein the electrode terminal and the protector of the boat-shaped heater are pressed together by screws. (5) The utility model registration claim 4 is characterized in that the screw is attached so as to press the electrode terminal and the protector without directly touching the electrode terminal of the boat-shaped heater. vacuum evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308484U JPS6120558U (en) | 1984-07-10 | 1984-07-10 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308484U JPS6120558U (en) | 1984-07-10 | 1984-07-10 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6120558U JPS6120558U (en) | 1986-02-06 |
| JPH0238924Y2 true JPH0238924Y2 (en) | 1990-10-19 |
Family
ID=30662479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10308484U Granted JPS6120558U (en) | 1984-07-10 | 1984-07-10 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6120558U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0754285Y2 (en) * | 1989-10-11 | 1995-12-18 | パイオニア株式会社 | Vapor deposition equipment |
-
1984
- 1984-07-10 JP JP10308484U patent/JPS6120558U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120558U (en) | 1986-02-06 |
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