JPH0238805B2 - - Google Patents
Info
- Publication number
- JPH0238805B2 JPH0238805B2 JP56114448A JP11444881A JPH0238805B2 JP H0238805 B2 JPH0238805 B2 JP H0238805B2 JP 56114448 A JP56114448 A JP 56114448A JP 11444881 A JP11444881 A JP 11444881A JP H0238805 B2 JPH0238805 B2 JP H0238805B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- stage
- temperature
- sample
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003068 static effect Effects 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 238000001816 cooling Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
Description
【発明の詳細な説明】
本発明は空気軸受を使用した移動ステージ装置
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moving stage apparatus using air bearings.
一般にこの種の装置においてステージの上に乗
せられた試料上に電子ビーム等が照射される。電
子ビームの電磁的な走査と、ステージの機械的な
位置の操作によるが、これらの精度が直接パター
ンの精度に影響を及ぼすことは良く知られてい
る。さらに試料の熱膨脹を避けるという点からも
試料の温度を常に一定に保つことがパターンの精
度を保つうえに必要となる。試料の温度は試料及
びその移動ステージ装置を取り囲む周囲温度から
の熱伝達により影響をうける。この試料の恒温化
のために従来からクリーン・ルーム内において空
調を行ない、設置室の温度をコントロールし、
又、ステージを具備したハウジング壁中に恒温水
を通していたがしかし、設置空温度は一般に±２
℃程度の変動があることや、又供給する空気はコ
ンプレツサーからの発熱や、一般に空気源ユニツ
トは空調していない部屋に設置していることか
ら、空気軸受の空気温度の変動などによつてパタ
ーンの精度に影響があつた。 Generally, in this type of apparatus, an electron beam or the like is irradiated onto a sample placed on a stage. It is well known that the precision of electromagnetic scanning of the electron beam and the mechanical positioning of the stage directly affect the precision of the pattern. Furthermore, in order to maintain the accuracy of the pattern, it is necessary to keep the temperature of the sample constant in order to avoid thermal expansion of the sample. The temperature of the sample is affected by heat transfer from the ambient temperature surrounding the sample and its translation stage assembly. In order to keep this sample at a constant temperature, air conditioning is traditionally performed in a clean room to control the temperature of the installation room.
In addition, constant temperature water was passed through the wall of the housing equipped with the stage, but the installed air temperature was generally ±2.
The pattern may vary due to fluctuations in the air temperature of the air bearing, as there are fluctuations in temperature of approximately The accuracy was affected.
本発明は特に試料の恒温化のためには、試料を
載置するステージ載置面を恒温化することが必要
不可欠であるとの観点に基いてなされ、空気軸受
に供給する空気を恒温化し、もつてステージの恒
温化を効果的に行えるようにしたものである。 The present invention was made based on the viewpoint that in order to keep the temperature of the sample constant, it is essential to keep the stage mounting surface on which the sample is placed constant. This makes it possible to effectively maintain the temperature of the stage.
以下本発明の一実施例を第１図、第２図を用い
ながら説明する。第１図は空気軸受に使用する空
気の流れる経路を示した図である。ロータリーコ
ンプレツサ１、逆止弁２、アフタークーラー３、
フイルター４、エアータンク５、安全弁６、圧力
計７、エアドライヤー８、手動バルブ９、フロー
トスイツチ１０、ドレーンタンク１１で構成され
た空気源ユニツトから除湿及びクリーンになつた
空気を空圧制御盤１２から断熱された熱交換器１
３でサーキユレーター１４により一定の温度にコ
ントロールされた恒温水との熱交換によつて空気
の温度を一定にし断熱されたチユーブ１５で移動
ステージ装置１６に供給するものである。このよ
うに周知の移動ステージ装置は、基台に非接触に
支持されるステージの基台との対向面全面に基台
から空気が噴出されるか、あるいはステージの基
台との対向面全面から空気を噴出する構造である
ため、ステージの基台との対向面は供給空気の温
度の影響を直接受ける。一方ステージの試料載置
面は、ステージの基台対向面からの熱伝達により
供給空気の温度の影響を間接的に受ける。しか
し、本発明のように供給空気の恒温化を図ること
によりステージの試料載置面ひいては試料の恒温
化が達成できるのである。 An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. FIG. 1 is a diagram showing the air flow path used in the air bearing. Rotary compressor 1, check valve 2, aftercooler 3,
Dehumidified and clean air is sent to the pneumatic control panel 12 from an air source unit consisting of a filter 4, an air tank 5, a safety valve 6, a pressure gauge 7, an air dryer 8, a manual valve 9, a float switch 10, and a drain tank 11. Heat exchanger 1 insulated from
3, the temperature of the air is kept constant through heat exchange with constant temperature water controlled at a constant temperature by a circulator 14, and supplied to the moving stage device 16 through an insulated tube 15. In this well-known moving stage device, air is blown out from the base over the entire surface of the stage that is supported without contact with the base, or air is blown out from the entire surface of the stage that faces the base. Since it has a structure that blows out air, the surface of the stage facing the base is directly affected by the temperature of the supplied air. On the other hand, the sample mounting surface of the stage is indirectly affected by the temperature of the supplied air due to heat transfer from the surface of the stage facing the base. However, by keeping the temperature of the supplied air constant as in the present invention, it is possible to keep the temperature of the sample mounting surface of the stage and the sample constant.
第２図は、実施した熱交換器の詳細図である。
断熱材２１で被われた水冷ジヤケツト２２とシエ
ル２３とからなる二重構造で熱交換器上部の空気
入口２４から入つた空気は、内部のシエル２３内
で水冷ジヤケツト２２内を流れる恒温水と熱交換
し一定温度となる。シエル２３内部は伝熱面積を
多く取る為エバーフイン２５を設け又、邪魔板２
６により空気流路を作つている。熱交換器の上部
には、恒温水出口２７と空気入口２４があり、下
部には恒温水入口２８と空気出口２９がある。従
つて空気は上から下へ流れ、恒温水は下から上に
流れる向流型邪魔板付シエルアンドチユーブ式熱
交換器である。 FIG. 2 is a detailed diagram of the implemented heat exchanger.
The heat exchanger has a double structure consisting of a water cooling jacket 22 covered with a heat insulating material 21 and a shell 23. Air entering from the air inlet 24 at the top of the heat exchanger is heated with constant temperature water flowing inside the water cooling jacket 22 in the internal shell 23. Replace it to maintain a constant temperature. Inside the shell 23, an everfin 25 is provided to increase the heat transfer area, and a baffle plate 2
6 creates an air flow path. The upper part of the heat exchanger has a constant temperature water outlet 27 and an air inlet 24, and the lower part has a constant temperature water inlet 28 and an air outlet 29. Therefore, air flows from top to bottom, and constant temperature water flows from bottom to top in a shell-and-tube heat exchanger with countercurrent baffles.
このように供給する空気の配管途中に熱交換器
を設けて恒温化すると、精密機械装置例えば電子
ビーム露光装置における温度変動がほとんどなく
なり、安定した描画を行えるようになる。 When a heat exchanger is provided in the middle of the supply air piping to keep the temperature constant, temperature fluctuations in a precision mechanical device, such as an electron beam exposure device, are almost eliminated, and stable drawing can be performed.
第１図は本発明の一実施例で、空気軸受に使用
する空気の流れる経路を示した図、第２図は第１
図の熱交換器の部分を具体的に示した一部切欠斜
視図である。
１…ロータリーコンプレツサ、２…逆止弁、３
…アフタークーラ、４…フイルタ、５…エアータ
ンク、６…安全弁、７…圧力計、８…エアドライ
ヤー、９…手動バルブ、１０…フロートスイツ
チ、１１…ドレーンタンク、１２…空圧制御盤、
１３…熱交換器、１４…サーキユレータ、１５…
チユーブ、１６…移動ステージ装置、２１…断熱
材、２２…水冷ジヤケツト、２３…シエル、２４
…空気入口、２５…エバーフイン、２６…邪魔
板、２７…恒温水出口、２８…恒温水入口、２９
…空気出口。
Fig. 1 shows one embodiment of the present invention, and shows the air flow path used in the air bearing.
FIG. 2 is a partially cutaway perspective view specifically showing a portion of the heat exchanger shown in the figure. 1...Rotary compressor, 2...Check valve, 3
…Aftercooler, 4…Filter, 5…Air tank, 6…Safety valve, 7…Pressure gauge, 8…Air dryer, 9…Manual valve, 10…Float switch, 11…Drain tank, 12…Pneumatic control panel,
13... Heat exchanger, 14... Circulator, 15...
tube, 16... moving stage device, 21... heat insulating material, 22... water cooling jacket, 23... shell, 24
... Air inlet, 25 ... Everfin, 26 ... Baffle plate, 27 ... Constant temperature water outlet, 28 ... Constant temperature water inlet, 29
...air outlet.
Claims (1)
するために前記ステージあるいは基台の一方の面
から他方の対向面に空気を供給する静圧空気軸受
と、 この静圧空気軸受に空気を供給するための空気
供給手段と、 この空気供給手段から供給される空気を案内す
る第１の配管手段と、 この第１の配管手段に接続され、前記空気供給
手段から供給される空気を所定温度の液体と熱交
換させてほぼ一定温度とするための熱交換器と、 この熱交換器に接続されて、前記一定温度の空
気を前記静圧空気軸受まで案内する第２の配管手
段と、 から成ることを特徴とする空気軸受を用いた移動
ステージ装置。[Claims] 1. A stage on which a sample is placed, and a supply of air from one surface of the stage or the base to the other opposing surface in order to support the stage in a non-contact manner with respect to the base. a static pressure air bearing; an air supply means for supplying air to the static pressure air bearing; a first piping means for guiding air supplied from the air supply means; and a connection to the first piping means. a heat exchanger for exchanging the air supplied from the air supply means with a liquid at a predetermined temperature to maintain a substantially constant temperature; A moving stage device using an air bearing, comprising: second piping means for guiding to the compressed air bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444881A JPS5817218A (en) | 1981-07-23 | 1981-07-23 | Precision machine using air bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444881A JPS5817218A (en) | 1981-07-23 | 1981-07-23 | Precision machine using air bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5817218A JPS5817218A (en) | 1983-02-01 |
| JPH0238805B2 true JPH0238805B2 (en) | 1990-09-03 |
Family
ID=14637981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11444881A Granted JPS5817218A (en) | 1981-07-23 | 1981-07-23 | Precision machine using air bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5817218A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07312504A (en) * | 1994-05-18 | 1995-11-28 | Fuji Elelctrochem Co Ltd | Laminated dielectric filter and its manufacture |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7966743B2 (en) * | 2007-07-31 | 2011-06-28 | Eastman Kodak Company | Micro-structured drying for inkjet printers |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55112748A (en) * | 1979-02-13 | 1980-08-30 | Toyoda Mach Works Ltd | Work device with temperature control function |
| JPS588825A (en) * | 1981-07-10 | 1983-01-19 | Hitachi Ltd | Static pressure bearing |
-
1981
- 1981-07-23 JP JP11444881A patent/JPS5817218A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55112748A (en) * | 1979-02-13 | 1980-08-30 | Toyoda Mach Works Ltd | Work device with temperature control function |
| JPS588825A (en) * | 1981-07-10 | 1983-01-19 | Hitachi Ltd | Static pressure bearing |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07312504A (en) * | 1994-05-18 | 1995-11-28 | Fuji Elelctrochem Co Ltd | Laminated dielectric filter and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5817218A (en) | 1983-02-01 |
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