JPH0238729U - - Google Patents
Info
- Publication number
- JPH0238729U JPH0238729U JP11811288U JP11811288U JPH0238729U JP H0238729 U JPH0238729 U JP H0238729U JP 11811288 U JP11811288 U JP 11811288U JP 11811288 U JP11811288 U JP 11811288U JP H0238729 U JPH0238729 U JP H0238729U
- Authority
- JP
- Japan
- Prior art keywords
- film
- cvd apparatus
- semiconductor wafer
- pressure cvd
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11811288U JPH0238729U (OSRAM) | 1988-09-07 | 1988-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11811288U JPH0238729U (OSRAM) | 1988-09-07 | 1988-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238729U true JPH0238729U (OSRAM) | 1990-03-15 |
Family
ID=31362181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11811288U Pending JPH0238729U (OSRAM) | 1988-09-07 | 1988-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238729U (OSRAM) |
-
1988
- 1988-09-07 JP JP11811288U patent/JPH0238729U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0238729U (OSRAM) | ||
| JPH0177883U (OSRAM) | ||
| JPS63177035U (OSRAM) | ||
| JPS57211734A (en) | Manufacture of semiconductor device | |
| JPH0547361Y2 (OSRAM) | ||
| JP2660405B2 (ja) | マスクアライメント方法 | |
| JPS58135940U (ja) | 連続気相成長装置 | |
| JPS6083245U (ja) | カセツト式薄片搬出入用薄片検知装置 | |
| JP2548071B2 (ja) | ワイヤーボンディング用テーブル及びワイヤーボンディング方法 | |
| JPS6339942U (OSRAM) | ||
| JPH0299964U (OSRAM) | ||
| JPS60927U (ja) | 半導体ウエハ貼付装置 | |
| JPS63170464U (OSRAM) | ||
| JPH0256433U (OSRAM) | ||
| JPH0236043U (OSRAM) | ||
| JPH03109351U (OSRAM) | ||
| JPS60194336U (ja) | 半導体製造装置 | |
| JPS6245825U (OSRAM) | ||
| JPH01104797U (OSRAM) | ||
| JPS62115613U (OSRAM) | ||
| JPH0415845U (OSRAM) | ||
| JPS62182541U (OSRAM) | ||
| JPS59165462U (ja) | 真空成膜装置 | |
| JPS6373363U (OSRAM) | ||
| JPS63136325U (OSRAM) |