JPH0237279Y2 - - Google Patents

Info

Publication number
JPH0237279Y2
JPH0237279Y2 JP1982067771U JP6777182U JPH0237279Y2 JP H0237279 Y2 JPH0237279 Y2 JP H0237279Y2 JP 1982067771 U JP1982067771 U JP 1982067771U JP 6777182 U JP6777182 U JP 6777182U JP H0237279 Y2 JPH0237279 Y2 JP H0237279Y2
Authority
JP
Japan
Prior art keywords
piezoelectric laminate
piezoelectric
end surface
laminate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982067771U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58172391U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982067771U priority Critical patent/JPS58172391U/ja
Publication of JPS58172391U publication Critical patent/JPS58172391U/ja
Application granted granted Critical
Publication of JPH0237279Y2 publication Critical patent/JPH0237279Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP1982067771U 1982-05-10 1982-05-10 微動変位制御装置 Granted JPS58172391U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982067771U JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982067771U JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Publications (2)

Publication Number Publication Date
JPS58172391U JPS58172391U (ja) 1983-11-17
JPH0237279Y2 true JPH0237279Y2 (enExample) 1990-10-09

Family

ID=30077581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982067771U Granted JPS58172391U (ja) 1982-05-10 1982-05-10 微動変位制御装置

Country Status (1)

Country Link
JP (1) JPS58172391U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431831Y2 (enExample) * 1985-07-09 1992-07-30

Also Published As

Publication number Publication date
JPS58172391U (ja) 1983-11-17

Similar Documents

Publication Publication Date Title
Winzer et al. Designing cofired multilayer electrostrictive actuators for reliability
US5276657A (en) Metal-electroactive ceramic composite actuators
US6240781B1 (en) Vibration gyro sensor
US5365140A (en) Piezoelectric actuator having strain gage
US6359370B1 (en) Piezoelectric multiple degree of freedom actuator
JP2540344B2 (ja) 心臓ペ―スメ―カ用活動力センサ
Xu et al. Ceramic-metal composite actuator
JPH0237279Y2 (enExample)
JP3370178B2 (ja) 積層型圧電素子およびその製造方法
WO1992006509A1 (en) Composite multilayer ceramic structure
US10158063B2 (en) Monolithic PZT actuator, stage, and method for making
JPH04346278A (ja) 磁歪電歪相互変換素子を用いた変換装置
WO1994002965A1 (en) Ceramic deflection device
JPS6372172A (ja) 薄板状電歪積層体
JP2645832B2 (ja) たて効果型モノモルフ素子及びその駆動方法
JPH0455355B2 (enExample)
JPS5858780A (ja) 電歪素子
JPS63260085A (ja) 圧電アクチュエータ
JPH0453009Y2 (enExample)
JP2921310B2 (ja) 積層型圧電アクチュエータ
JPH0453008Y2 (enExample)
JPH029561Y2 (enExample)
US20050145606A1 (en) Low cost actuator with 2 dimensional motion
JP2001211667A (ja) 圧電アクチュエータ
JPS61152086A (ja) 積層型圧電駆動装置の使用方法