JPH0236208Y2 - - Google Patents

Info

Publication number
JPH0236208Y2
JPH0236208Y2 JP1984187640U JP18764084U JPH0236208Y2 JP H0236208 Y2 JPH0236208 Y2 JP H0236208Y2 JP 1984187640 U JP1984187640 U JP 1984187640U JP 18764084 U JP18764084 U JP 18764084U JP H0236208 Y2 JPH0236208 Y2 JP H0236208Y2
Authority
JP
Japan
Prior art keywords
objective lens
sample
electron beam
detector
secondary electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984187640U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61101956U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984187640U priority Critical patent/JPH0236208Y2/ja
Publication of JPS61101956U publication Critical patent/JPS61101956U/ja
Application granted granted Critical
Publication of JPH0236208Y2 publication Critical patent/JPH0236208Y2/ja
Expired legal-status Critical Current

Links

JP1984187640U 1984-12-11 1984-12-11 Expired JPH0236208Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984187640U JPH0236208Y2 (OSRAM) 1984-12-11 1984-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984187640U JPH0236208Y2 (OSRAM) 1984-12-11 1984-12-11

Publications (2)

Publication Number Publication Date
JPS61101956U JPS61101956U (OSRAM) 1986-06-28
JPH0236208Y2 true JPH0236208Y2 (OSRAM) 1990-10-02

Family

ID=30745102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984187640U Expired JPH0236208Y2 (OSRAM) 1984-12-11 1984-12-11

Country Status (1)

Country Link
JP (1) JPH0236208Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1479621A (en) * 1974-08-07 1977-07-13 Rank Organisation Ltd Measuring apparatus

Also Published As

Publication number Publication date
JPS61101956U (OSRAM) 1986-06-28

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