JPH0236117Y2 - - Google Patents
Info
- Publication number
- JPH0236117Y2 JPH0236117Y2 JP11254081U JP11254081U JPH0236117Y2 JP H0236117 Y2 JPH0236117 Y2 JP H0236117Y2 JP 11254081 U JP11254081 U JP 11254081U JP 11254081 U JP11254081 U JP 11254081U JP H0236117 Y2 JPH0236117 Y2 JP H0236117Y2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- acoustic impedance
- ultrasonic transducer
- array probe
- quartz plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 230000006866 deterioration Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【考案の詳細な説明】
この考案は、複数個の超音波振動子を配列して
構成する超音波アレイ探触子に関するものであ
る。[Detailed Description of the Invention] This invention relates to an ultrasonic array probe configured by arranging a plurality of ultrasonic transducers.
従来のこの種の超音波アレイ探触子は、例え
ば、第１図に示すように、いわゆるバツキング材
と呼ばれる部材２の上に、直方体形状の複数個の
超音波振動子１を直線上に沿つて配列して構成し
ていた。図中、３，３′は超音波振動子１の電極
である。 A conventional ultrasonic array probe of this type, for example, as shown in FIG. It was constructed by arranging them. In the figure, 3 and 3' are electrodes of the ultrasonic transducer 1.
バツキング材２は、超音波振動子１から被検材
内へ放射される超音波パルスのパルス幅を短く
し、超音波アレイ探触子の距離分解能を向上させ
るために設けられているものであり、高い距離分
解能を得るには、バツキング材２の材料には、密
度と音速との積で与えられる音響インピーダンス
の値が、振動子の音響インピーダンスに近い値を
有することが要求される。さらに、バツキング材
２の材料には、超音波振動子１からバツキング材
２内へ放射された超音波パルスが、バツキング材
２の裏面４で反射され再び超音波振動子１に雑音
として受信されないようにするため、超音波の減
衰率が大きいことが要求される。これらの要求を
ほぼ満足する材料としては、従来、一般に、エポ
キシ樹脂などの高分子有機材料に金属粉末を混合
して製作した材料が用いられている。 The backing material 2 is provided to shorten the pulse width of the ultrasonic pulse emitted from the ultrasonic transducer 1 into the test material and improve the distance resolution of the ultrasonic array probe. In order to obtain high distance resolution, the material of the backing material 2 is required to have an acoustic impedance value given by the product of density and sound speed close to the acoustic impedance of the vibrator. Furthermore, the material of the bucking material 2 is designed to prevent the ultrasonic pulses emitted from the ultrasonic transducer 1 into the bucking material 2 from being reflected by the back surface 4 of the bucking material 2 and being received by the ultrasonic transducer 1 as noise again. Therefore, a high attenuation rate of ultrasonic waves is required. As a material that substantially satisfies these requirements, a material produced by mixing metal powder with a polymeric organic material such as an epoxy resin has conventionally been used.
ところで、この種の超音波アレイ探触子は、各
超音波振動子１の励振信号および受信信号の位相
をそれぞれ独立に電子的に制御し、各超音波振動
子１により送受信される超音波ビームの波面を合
成し、合成超音波ビームの指向方向を電子的に走
査する場合などに用いられるものであり、このと
き超音波振動子１相互間に電気的相互結合があれ
ば、合成超音波ビームのサイドローブレベルが大
きくなるなどの性能劣化を招くことが知られてい
る。 By the way, this type of ultrasonic array probe electronically controls the phases of the excitation signal and reception signal of each ultrasonic transducer 1 independently, and the ultrasonic beam transmitted and received by each ultrasonic transducer 1. It is used in cases where the wavefronts of It is known that this can lead to performance deterioration, such as an increase in the sidelobe level.
さて、従来のこの種の超音波アレイ探触子を用
いて、例えば金属などのように導電性を有する被
検材を検査する場合には、容易にわかるように、
各超音波振動子１の被検材側の各電極３を共通接
地し、各超音波振動子１からのリード線は、各超
音波振動子１のバツキング材２側の各電極３′か
ら取出す必要があるが、従来のこの種の超音波ア
レイ探触子においては、隣接する超音波振動子１
間の間隔を狭くすると、超音波振動子１の電極
３′が、金属粉末を混入して製作したバツキング
材２に直接接触していたため、隣接する超音波振
動子１の電極３′間の電気的抵抗値が小さくなり、
このため隣接する超音波振動子１間に電気的相互
結合が生じ、上述したような性能劣化を招く欠点
があつた。 As can be easily seen, when testing a conductive material such as metal using a conventional ultrasonic array probe of this type,
The electrodes 3 on the test material side of each ultrasonic vibrator 1 are commonly grounded, and the lead wires from each ultrasonic vibrator 1 are taken out from each electrode 3' on the backing material 2 side of each ultrasonic vibrator 1. However, in conventional ultrasonic array probes of this type, adjacent ultrasonic transducers 1
When the distance between the electrodes 3' of the ultrasonic transducers 1 was narrowed, the electrodes 3' of the ultrasonic transducers 1 were in direct contact with the backing material 2 made by mixing metal powder, so the electricity between the electrodes 3' of the adjacent ultrasonic transducers 1 was reduced. The resistance value becomes smaller,
As a result, electrical mutual coupling occurs between adjacent ultrasonic transducers 1, resulting in the drawback of deterioration of performance as described above.
この考案は、厚さが４分の１波長の石英板５の
一方の面上に複数個の超音波振動子１を直線上に
沿つて配列し、石英板５の他方の面上に超音波の
減衰率の大きい部材６を設け、上記部材６の音響
インピーダンスを、石英板５の音響インピーダン
スの２乗と超音波振動子１の音響インピーダンス
の比となるようにして超音波アレイ探触子を構成
することにより、上述したような欠点を解決しよ
うとするものであり、以下第２図に示す一実施例
を用いて詳細に説明する。 This idea involves arranging a plurality of ultrasonic transducers 1 along a straight line on one side of a quartz plate 5 with a thickness of 1/4 wavelength, and transmitting ultrasonic waves onto the other side of the quartz plate 5. A member 6 having a large attenuation rate is provided, and the acoustic impedance of the member 6 is set to be the ratio of the square of the acoustic impedance of the quartz plate 5 to the acoustic impedance of the ultrasonic transducer 1 to form an ultrasonic array probe. This configuration is intended to solve the above-mentioned drawbacks, and will be described in detail below using an embodiment shown in FIG.
第２図において、１は厚さが４分の１波長の石
英板５の一方の面上に、従来と同様に直線上に沿
つて配列した超音波振動子であり、３，３′は超
音波振動子１の電極である。 In FIG. 2, 1 is an ultrasonic transducer arranged along a straight line on one side of a quartz plate 5 with a thickness of 1/4 wavelength, as in the conventional case, and 3 and 3' are ultrasonic transducers. These are the electrodes of the acoustic wave vibrator 1.
６はタングステン粉末とエポキシ樹脂との混合材
からなる部材である。混合比を変化させて、音響
インピーダンスの変化の測定や、流動性について
実験したところ、音響インピーダンスが約７×
106Kg／m2／secとなる混合比の場合が、流動性も
良好に保たれ注入整形ができる利点もあり、か
つ、超音波減衰率も十分大きくとれることがわか
つた。超音波振動子１の音響インピーダンスは、
圧電セラミツクを用いる場合、約30×106Kg／
m2／secである。そこで、超音波振動子１と部材
６間には音響インピーダンスが約13×106Kg／
m2／secの石英板５を選んで組合せた。6 is a member made of a mixed material of tungsten powder and epoxy resin. When we measured changes in acoustic impedance and experimented with fluidity by changing the mixing ratio, we found that the acoustic impedance was approximately 7×
It was found that a mixing ratio of 10 6 Kg/m 2 /sec has the advantage of maintaining good fluidity and allowing injection shaping, and also provides a sufficiently high ultrasonic attenuation rate. The acoustic impedance of the ultrasonic transducer 1 is
When using piezoelectric ceramic, approximately 30×10 6 Kg/
m 2 /sec. Therefore, the acoustic impedance between the ultrasonic transducer 1 and the member 6 is approximately 13×10 6 Kg/
A quartz plate 5 of m 2 /sec was selected and combined.
すなわち、部材６の音響インピーダンスは、近
似的に石英板５の音響インピーダンスの２乗と超
音波振動子１の音響インピーダンスとの比となつ
ている。 That is, the acoustic impedance of the member 6 is approximately the ratio of the square of the acoustic impedance of the quartz plate 5 to the acoustic impedance of the ultrasonic transducer 1.
さて、第２図に示すこの考案に係る超音波アレ
イ探触子では、石英板５が、厚さが４分の１波長
で、かつ、音響インピーダンスの値が超音波振動
子１の音響インピーダンスの値と上記超音波の減
衰率の大きい部材６の音響インピーダンスの値と
の積の平方根で与えられるので、超音波振動子１
から上記超音波の減衰率の大きい部材６を見込ん
だ音響インピーダンスの値は、超音波振動子１の
音響インピーダンスの値と等しく、このため、従
来と同等の距離分解能を得ることができる。 Now, in the ultrasonic array probe according to this invention shown in FIG. Since it is given by the square root of the product of the value and the value of the acoustic impedance of the member 6 with a large attenuation rate of the ultrasonic waves, the ultrasonic transducer 1
The value of the acoustic impedance considering the member 6 having a large attenuation rate of ultrasonic waves is equal to the value of the acoustic impedance of the ultrasonic transducer 1, and therefore it is possible to obtain a distance resolution equivalent to that of the conventional method.
また、超音波振動子１から石英板５を通過して
上記部材６に放射された超音波パルスは、部材６
の材料として、超音波の減衰率が従来と同等に大
きいものを用いているため、部材６の裏面４で反
射され再び超音波振動子１に、少なくとも従来よ
り大きなレベルで雑音として受信されることはな
い。 Further, the ultrasonic pulses emitted from the ultrasonic transducer 1 to the member 6 through the quartz plate 5 are transmitted to the member 6.
Since a material with a high ultrasonic attenuation rate equivalent to that of conventional materials is used for the There isn't.
しかし、この考案に係る超音波アレイ探触子を
用いて、従来と同様に、各超音波振動子１の被検
材側の各電極３を共通接地し、他方の各電極３′
からリード線を取り出して、金属などの導電性を
有する被検材を検査する場合には、従来とは異な
り、隣接する超音波振動子１間の間隔を狭くして
も、電極３′が接触している面が電気的絶縁体で
ある石英板５であるため、隣接する超音波振動子
１間に電気的相互結合が生じることはない。した
がつて前記したような性能劣化を招かないという
利点がある。 However, using the ultrasonic array probe according to this invention, each electrode 3 on the specimen side of each ultrasonic transducer 1 is commonly grounded, and each electrode 3' of the other ultrasonic transducer 1 is
When inspecting a conductive material such as a metal by taking out a lead wire from the Since the quartz plate 5 is an electrical insulator, electrical mutual coupling does not occur between adjacent ultrasonic transducers 1. Therefore, there is an advantage that the above-mentioned performance deterioration does not occur.
なお、この考案はこれに限らず、被検材と超音
波振動子１との間に、厚さが４分の１波長の１層
あるいは多層の音響インピーダンス変成層を設け
た超音波アレイ探触子の場合についても同様に使
用してもよい。 Note that this invention is not limited to this, but is also applicable to ultrasonic array probes in which one or multiple layers of acoustic impedance modification layers with a thickness of 1/4 wavelength are provided between the test material and the ultrasonic transducer 1. It may be used in the same way for children.
以上のように、この考案に係る超音波アレイ探
触子では、厚さが４分の１波長の石英板５の一方
の面上に、複数個の超音波振動子１を直線上に沿
つて配列し、石英板５の他方の面上に超音波の減
衰率の大きい部材６を設け、部材６の音響インピ
ーダンスを、石英板５の音響インピーダンスの２
乗と超音波振動子１の音響インピーダンスの比と
なるように構成したことにより、隣接する超音波
振動子１間の間隔を狭くしても、隣接する超音波
振動子１間の電気的相互結合を生じず、このた
め、前記したような性能劣化を招かないという利
点がある。 As described above, in the ultrasonic array probe according to this invention, a plurality of ultrasonic transducers 1 are arranged in a straight line on one side of the quartz plate 5 having a thickness of 1/4 wavelength. A member 6 with a large attenuation rate of ultrasonic waves is provided on the other surface of the quartz plate 5, and the acoustic impedance of the member 6 is set to 2 of the acoustic impedance of the quartz plate 5.
By configuring the ratio of the acoustic impedance of the ultrasonic transducers 1 to Therefore, there is an advantage that the above-mentioned performance deterioration does not occur.
第１図は従来の超音波アレイ探触子の構成図、
第２図はこの考案に係る超音波アレイ探触子の構
成図である。図中、１は超音波振動子、２は従来
のバツキング材、３，３′は超音波振動子１の電
極、５は石英板、６はタングステン粉末とエポキ
シ樹脂との混合材からなる部材である。なお、図
中同一あるいは相当部分には同一符号を付して示
してある。
Figure 1 is a configuration diagram of a conventional ultrasonic array probe.
FIG. 2 is a configuration diagram of the ultrasonic array probe according to this invention. In the figure, 1 is an ultrasonic vibrator, 2 is a conventional backing material, 3 and 3' are electrodes of the ultrasonic vibrator 1, 5 is a quartz plate, and 6 is a member made of a mixed material of tungsten powder and epoxy resin. be. It should be noted that the same or corresponding parts in the figures are indicated by the same reference numerals.
Claims (1)
上に、複数個の超音波振動子を直線上に沿つて配
列し、上記電気的絶縁板の他方の面上には金属粉
末とエポキシ樹脂との混合材からなる部材を設
け、上記混合材からなる部材の音響インピーダン
スを、上記電気的絶縁板の音響インピーダンスの
２乗と上記超音波振動子の音響インピーダンスと
の比となるようにしたことを特徴とする超音波ア
レイ探触子。 A plurality of ultrasonic transducers are arranged in a straight line on one side of an electrically insulating plate with a thickness of 1/4 wavelength, and metal powder is arranged on the other side of the electrically insulating plate. and an epoxy resin, and the acoustic impedance of the member made of the mixed material is a ratio of the square of the acoustic impedance of the electrically insulating plate and the acoustic impedance of the ultrasonic transducer. An ultrasonic array probe characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11254081U JPS5817550U (en) | 1981-07-29 | 1981-07-29 | Ultrasonic array probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11254081U JPS5817550U (en) | 1981-07-29 | 1981-07-29 | Ultrasonic array probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5817550U JPS5817550U (en) | 1983-02-03 |
| JPH0236117Y2 true JPH0236117Y2 (en) | 1990-10-02 |
Family
ID=29906865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11254081U Granted JPS5817550U (en) | 1981-07-29 | 1981-07-29 | Ultrasonic array probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5817550U (en) |
-
1981
- 1981-07-29 JP JP11254081U patent/JPS5817550U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5817550U (en) | 1983-02-03 |
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