JPH0236035U - - Google Patents

Info

Publication number
JPH0236035U
JPH0236035U JP11482988U JP11482988U JPH0236035U JP H0236035 U JPH0236035 U JP H0236035U JP 11482988 U JP11482988 U JP 11482988U JP 11482988 U JP11482988 U JP 11482988U JP H0236035 U JPH0236035 U JP H0236035U
Authority
JP
Japan
Prior art keywords
vacuum
vessels
vacuum vessels
guide plate
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11482988U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11482988U priority Critical patent/JPH0236035U/ja
Publication of JPH0236035U publication Critical patent/JPH0236035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示した平面図、第２
図は従来例を示した平面図である。 １，２……真空容器、３……ゲートバルブ、４
……ガイド板、５，５′……シール弁、６，６′
……リンク、７……駆動軸、８……Ｏリング、９
，９′……開口部、１０，１０′……ストツパー
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 互いに対向する位置に開口部を有する複数個の
    真空容器を有するとともに、外部より駆動される
    駆動軸の端部に固設したガイド板と該ガイド板の
    真空容器側両端部にリンクを介して取り付けられ
    、かつＯリングを固着したシール面を有する少な
    くとも１対のシール弁を備えた開口部シール機構
    と上記シール面で上記開口部をシールする位置で
    上記シール弁を停止させるスツトツパーとを少な
    くとも備えたゲートバルブを上記真空容器間に介
    在させ、上記真空容器内で所定の真空処理をする
    際、上記両開口部を同時にシールして各真空容器
    間を気密に保持する構成にしたことを特徴とする
    真空処理装置。
JP11482988U 1988-08-31 1988-08-31 Pending JPH0236035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11482988U JPH0236035U (ja) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11482988U JPH0236035U (ja) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0236035U true JPH0236035U (ja) 1990-03-08

Family

ID=31355934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11482988U Pending JPH0236035U (ja) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0236035U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010236650A (ja) * 2009-03-31 2010-10-21 Shinmaywa Industries Ltd 真空ゲート弁及びこれを備えた真空処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441075A (en) * 1977-09-07 1979-03-31 Nippon Telegr & Teleph Corp <Ntt> Conveying device between atmospheric pressure and vacuum
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441075A (en) * 1977-09-07 1979-03-31 Nippon Telegr & Teleph Corp <Ntt> Conveying device between atmospheric pressure and vacuum
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010236650A (ja) * 2009-03-31 2010-10-21 Shinmaywa Industries Ltd 真空ゲート弁及びこれを備えた真空処理装置

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