JPH0235809Y2 - - Google Patents

Info

Publication number
JPH0235809Y2
JPH0235809Y2 JP1984006948U JP694884U JPH0235809Y2 JP H0235809 Y2 JPH0235809 Y2 JP H0235809Y2 JP 1984006948 U JP1984006948 U JP 1984006948U JP 694884 U JP694884 U JP 694884U JP H0235809 Y2 JPH0235809 Y2 JP H0235809Y2
Authority
JP
Japan
Prior art keywords
concentration
etching solution
hydrogen peroxide
etching
hydrochloric acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984006948U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60122368U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP694884U priority Critical patent/JPS60122368U/ja
Publication of JPS60122368U publication Critical patent/JPS60122368U/ja
Application granted granted Critical
Publication of JPH0235809Y2 publication Critical patent/JPH0235809Y2/ja
Granted legal-status Critical Current

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Landscapes

  • ing And Chemical Polishing (AREA)
JP694884U 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置 Granted JPS60122368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP694884U JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP694884U JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Publications (2)

Publication Number Publication Date
JPS60122368U JPS60122368U (ja) 1985-08-17
JPH0235809Y2 true JPH0235809Y2 (enrdf_load_stackoverflow) 1990-09-28

Family

ID=30484854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP694884U Granted JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Country Status (1)

Country Link
JP (1) JPS60122368U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152180A (en) * 1979-05-14 1980-11-27 Dainippon Screen Mfg Co Ltd Method for regeneration of copper chloride etching solution

Also Published As

Publication number Publication date
JPS60122368U (ja) 1985-08-17

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