JPS60122368U - 塩化第二銅エツチング溶液の濃度管理装置 - Google Patents

塩化第二銅エツチング溶液の濃度管理装置

Info

Publication number
JPS60122368U
JPS60122368U JP694884U JP694884U JPS60122368U JP S60122368 U JPS60122368 U JP S60122368U JP 694884 U JP694884 U JP 694884U JP 694884 U JP694884 U JP 694884U JP S60122368 U JPS60122368 U JP S60122368U
Authority
JP
Japan
Prior art keywords
etching solution
cupric chloride
chloride etching
indicator
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP694884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235809Y2 (enrdf_load_stackoverflow
Inventor
義和 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP694884U priority Critical patent/JPS60122368U/ja
Publication of JPS60122368U publication Critical patent/JPS60122368U/ja
Application granted granted Critical
Publication of JPH0235809Y2 publication Critical patent/JPH0235809Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP694884U 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置 Granted JPS60122368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP694884U JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP694884U JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Publications (2)

Publication Number Publication Date
JPS60122368U true JPS60122368U (ja) 1985-08-17
JPH0235809Y2 JPH0235809Y2 (enrdf_load_stackoverflow) 1990-09-28

Family

ID=30484854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP694884U Granted JPS60122368U (ja) 1984-01-21 1984-01-21 塩化第二銅エツチング溶液の濃度管理装置

Country Status (1)

Country Link
JP (1) JPS60122368U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152180A (en) * 1979-05-14 1980-11-27 Dainippon Screen Mfg Co Ltd Method for regeneration of copper chloride etching solution

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55152180A (en) * 1979-05-14 1980-11-27 Dainippon Screen Mfg Co Ltd Method for regeneration of copper chloride etching solution

Also Published As

Publication number Publication date
JPH0235809Y2 (enrdf_load_stackoverflow) 1990-09-28

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