JPH0235420B2 - - Google Patents

Info

Publication number
JPH0235420B2
JPH0235420B2 JP61006410A JP641086A JPH0235420B2 JP H0235420 B2 JPH0235420 B2 JP H0235420B2 JP 61006410 A JP61006410 A JP 61006410A JP 641086 A JP641086 A JP 641086A JP H0235420 B2 JPH0235420 B2 JP H0235420B2
Authority
JP
Japan
Prior art keywords
lens
charged particle
magnetic field
lenses
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61006410A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61165941A (ja
Inventor
Hifumi Tamura
Susumu Ishitani
Akira Shimase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61006410A priority Critical patent/JPS61165941A/ja
Publication of JPS61165941A publication Critical patent/JPS61165941A/ja
Publication of JPH0235420B2 publication Critical patent/JPH0235420B2/ja
Granted legal-status Critical Current

Links

JP61006410A 1986-01-17 1986-01-17 荷電粒子照射装置 Granted JPS61165941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61006410A JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61006410A JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Publications (2)

Publication Number Publication Date
JPS61165941A JPS61165941A (ja) 1986-07-26
JPH0235420B2 true JPH0235420B2 (enExample) 1990-08-10

Family

ID=11637597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61006410A Granted JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Country Status (1)

Country Link
JP (1) JPS61165941A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636346B2 (ja) * 1988-03-09 1994-05-11 セイコー電子工業株式会社 荷電粒子線装置及びこれによる試料観察方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947424B2 (ja) * 1976-02-27 1984-11-19 株式会社島津製作所 複合分析装置

Also Published As

Publication number Publication date
JPS61165941A (ja) 1986-07-26

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