JPH0234825Y2 - - Google Patents

Info

Publication number
JPH0234825Y2
JPH0234825Y2 JP1981048085U JP4808581U JPH0234825Y2 JP H0234825 Y2 JPH0234825 Y2 JP H0234825Y2 JP 1981048085 U JP1981048085 U JP 1981048085U JP 4808581 U JP4808581 U JP 4808581U JP H0234825 Y2 JPH0234825 Y2 JP H0234825Y2
Authority
JP
Japan
Prior art keywords
waste gas
cylinder
outer cylinder
inner cylinder
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981048085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57161236U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981048085U priority Critical patent/JPH0234825Y2/ja
Publication of JPS57161236U publication Critical patent/JPS57161236U/ja
Application granted granted Critical
Publication of JPH0234825Y2 publication Critical patent/JPH0234825Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Drying Of Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1981048085U 1981-04-03 1981-04-03 Expired JPH0234825Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981048085U JPH0234825Y2 (cg-RX-API-DMAC10.html) 1981-04-03 1981-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981048085U JPH0234825Y2 (cg-RX-API-DMAC10.html) 1981-04-03 1981-04-03

Publications (2)

Publication Number Publication Date
JPS57161236U JPS57161236U (cg-RX-API-DMAC10.html) 1982-10-09
JPH0234825Y2 true JPH0234825Y2 (cg-RX-API-DMAC10.html) 1990-09-19

Family

ID=29844835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981048085U Expired JPH0234825Y2 (cg-RX-API-DMAC10.html) 1981-04-03 1981-04-03

Country Status (1)

Country Link
JP (1) JPH0234825Y2 (cg-RX-API-DMAC10.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563153U (cg-RX-API-DMAC10.html) * 1978-10-23 1980-04-30

Also Published As

Publication number Publication date
JPS57161236U (cg-RX-API-DMAC10.html) 1982-10-09

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