JPH0234413B2 - - Google Patents

Info

Publication number
JPH0234413B2
JPH0234413B2 JP58160090A JP16009083A JPH0234413B2 JP H0234413 B2 JPH0234413 B2 JP H0234413B2 JP 58160090 A JP58160090 A JP 58160090A JP 16009083 A JP16009083 A JP 16009083A JP H0234413 B2 JPH0234413 B2 JP H0234413B2
Authority
JP
Japan
Prior art keywords
ion beam
circuit
voltage
feedback
delay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58160090A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050842A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58160090A priority Critical patent/JPS6050842A/ja
Publication of JPS6050842A publication Critical patent/JPS6050842A/ja
Publication of JPH0234413B2 publication Critical patent/JPH0234413B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP58160090A 1983-08-31 1983-08-31 Ｅｈｄ型フィールドイオンビーム発生装置 Granted JPS6050842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58160090A JPS6050842A (ja) 1983-08-31 1983-08-31 Ｅｈｄ型フィールドイオンビーム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58160090A JPS6050842A (ja) 1983-08-31 1983-08-31 Ｅｈｄ型フィールドイオンビーム発生装置

Publications (2)

Publication Number Publication Date
JPS6050842A JPS6050842A (ja) 1985-03-20
JPH0234413B2 true JPH0234413B2 (enrdf_load_stackoverflow) 1990-08-03

Family

ID=15707639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58160090A Granted JPS6050842A (ja) 1983-08-31 1983-08-31 Ｅｈｄ型フィールドイオンビーム発生装置

Country Status (1)

Country Link
JP (1) JPS6050842A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6410546A (en) * 1987-07-01 1989-01-13 Denki Kagaku Kogyo Kk Beam drawing-out method of field emission type ion source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579455A (en) * 1980-06-18 1982-01-18 Manboshi Eisei Zairiyou Kk Method and apparatus for mixing medical fluid to be added into ringer's vessel

Also Published As

Publication number Publication date
JPS6050842A (ja) 1985-03-20

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