JPH0234063U - - Google Patents

Info

Publication number
JPH0234063U
JPH0234063U JP11198188U JP11198188U JPH0234063U JP H0234063 U JPH0234063 U JP H0234063U JP 11198188 U JP11198188 U JP 11198188U JP 11198188 U JP11198188 U JP 11198188U JP H0234063 U JPH0234063 U JP H0234063U
Authority
JP
Japan
Prior art keywords
ion pump
electron gun
circuit
high voltage
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11198188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11198188U priority Critical patent/JPH0234063U/ja
Publication of JPH0234063U publication Critical patent/JPH0234063U/ja
Pending legal-status Critical Current

Links

JP11198188U 1988-08-26 1988-08-26 Pending JPH0234063U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11198188U JPH0234063U (cg-RX-API-DMAC7.html) 1988-08-26 1988-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11198188U JPH0234063U (cg-RX-API-DMAC7.html) 1988-08-26 1988-08-26

Publications (1)

Publication Number Publication Date
JPH0234063U true JPH0234063U (cg-RX-API-DMAC7.html) 1990-03-05

Family

ID=31350515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11198188U Pending JPH0234063U (cg-RX-API-DMAC7.html) 1988-08-26 1988-08-26

Country Status (1)

Country Link
JP (1) JPH0234063U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025150183A1 (ja) * 2024-01-12 2025-07-17 株式会社日立ハイテク 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025150183A1 (ja) * 2024-01-12 2025-07-17 株式会社日立ハイテク 荷電粒子線装置

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