JPH0233962B2 - - Google Patents

Info

Publication number
JPH0233962B2
JPH0233962B2 JP57101736A JP10173682A JPH0233962B2 JP H0233962 B2 JPH0233962 B2 JP H0233962B2 JP 57101736 A JP57101736 A JP 57101736A JP 10173682 A JP10173682 A JP 10173682A JP H0233962 B2 JPH0233962 B2 JP H0233962B2
Authority
JP
Japan
Prior art keywords
plane mirror
frequency
mirror
plane
moving member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57101736A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58218605A (ja
Inventor
Teiichi Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP57101736A priority Critical patent/JPS58218605A/ja
Publication of JPS58218605A publication Critical patent/JPS58218605A/ja
Publication of JPH0233962B2 publication Critical patent/JPH0233962B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP57101736A 1982-06-14 1982-06-14 レ−ザ光による移動距離測定装置 Granted JPS58218605A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57101736A JPS58218605A (ja) 1982-06-14 1982-06-14 レ−ザ光による移動距離測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57101736A JPS58218605A (ja) 1982-06-14 1982-06-14 レ−ザ光による移動距離測定装置

Publications (2)

Publication Number Publication Date
JPS58218605A JPS58218605A (ja) 1983-12-19
JPH0233962B2 true JPH0233962B2 (forum.php) 1990-07-31

Family

ID=14308534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57101736A Granted JPS58218605A (ja) 1982-06-14 1982-06-14 レ−ザ光による移動距離測定装置

Country Status (1)

Country Link
JP (1) JPS58218605A (forum.php)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0248277A3 (en) * 1986-06-03 1990-03-28 Optra, Inc. Two-frequency laser rotation sensor system
JPH0210201A (ja) * 1988-06-29 1990-01-16 Nippon Seiko Kk 二波長干渉計による測長方法及び装置
JP2004016324A (ja) * 2002-06-13 2004-01-22 Hitachi Medical Corp Ｘ線ｃｔ装置
JP4244636B2 (ja) * 2003-01-06 2009-03-25 セイコーエプソン株式会社 液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
EP1716456B1 (en) * 2004-02-11 2011-03-16 Koninklijke Philips Electronics N.V. A system and method for positioning a product

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5281843U (forum.php) * 1975-12-17 1977-06-18

Also Published As

Publication number Publication date
JPS58218605A (ja) 1983-12-19

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