JPH0233940U - - Google Patents

Info

Publication number
JPH0233940U
JPH0233940U JP11214688U JP11214688U JPH0233940U JP H0233940 U JPH0233940 U JP H0233940U JP 11214688 U JP11214688 U JP 11214688U JP 11214688 U JP11214688 U JP 11214688U JP H0233940 U JPH0233940 U JP H0233940U
Authority
JP
Japan
Prior art keywords
slit
thin
walled hollow
slits
hollow cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11214688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0615144Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988112146U priority Critical patent/JPH0615144Y2/ja
Priority to US07/387,616 priority patent/US4958101A/en
Priority to GB8917523A priority patent/GB2224317B/en
Publication of JPH0233940U publication Critical patent/JPH0233940U/ja
Application granted granted Critical
Publication of JPH0615144Y2 publication Critical patent/JPH0615144Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Springs (AREA)
JP1988112146U 1988-08-29 1988-08-29 円筒ばね Expired - Lifetime JPH0615144Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1988112146U JPH0615144Y2 (ja) 1988-08-29 1988-08-29 円筒ばね
US07/387,616 US4958101A (en) 1988-08-29 1989-07-28 Piezoelectric actuator
GB8917523A GB2224317B (en) 1988-08-29 1989-08-01 A piezoelectric actuvator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988112146U JPH0615144Y2 (ja) 1988-08-29 1988-08-29 円筒ばね

Publications (2)

Publication Number Publication Date
JPH0233940U true JPH0233940U (US20030220297A1-20031127-C00009.png) 1990-03-05
JPH0615144Y2 JPH0615144Y2 (ja) 1994-04-20

Family

ID=31350820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988112146U Expired - Lifetime JPH0615144Y2 (ja) 1988-08-29 1988-08-29 円筒ばね

Country Status (1)

Country Link
JP (1) JPH0615144Y2 (US20030220297A1-20031127-C00009.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006342851A (ja) * 2005-06-07 2006-12-21 Chuo Spring Co Ltd 筒状ばね
JP2007329506A (ja) * 2003-03-31 2007-12-20 Asml Netherlands Bv 支持構造体、リソグラフィ投影装置、およびデバイス製造方法
JP2010520966A (ja) * 2007-03-14 2010-06-17 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 燃料インジェクタに用いられるばねスリーブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50116857A (US20030220297A1-20031127-C00009.png) * 1974-01-16 1975-09-12
JPS6249021A (ja) * 1985-08-26 1987-03-03 レックスノルド・インコーポレーテッド ねじり応力分散形フレキシブル継手

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50116857A (US20030220297A1-20031127-C00009.png) * 1974-01-16 1975-09-12
JPS6249021A (ja) * 1985-08-26 1987-03-03 レックスノルド・インコーポレーテッド ねじり応力分散形フレキシブル継手

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329506A (ja) * 2003-03-31 2007-12-20 Asml Netherlands Bv 支持構造体、リソグラフィ投影装置、およびデバイス製造方法
JP4625059B2 (ja) * 2003-03-31 2011-02-02 エーエスエムエル ネザーランズ ビー.ブイ. 支持構造体、リソグラフィ投影装置、ロボットおよびデバイス製造方法
JP2006342851A (ja) * 2005-06-07 2006-12-21 Chuo Spring Co Ltd 筒状ばね
JP4525920B2 (ja) * 2005-06-07 2010-08-18 中央発條株式会社 筒状ばね
JP2010520966A (ja) * 2007-03-14 2010-06-17 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 燃料インジェクタに用いられるばねスリーブ

Also Published As

Publication number Publication date
JPH0615144Y2 (ja) 1994-04-20

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