JPH0233877B2 - - Google Patents

Info

Publication number
JPH0233877B2
JPH0233877B2 JP58214846A JP21484683A JPH0233877B2 JP H0233877 B2 JPH0233877 B2 JP H0233877B2 JP 58214846 A JP58214846 A JP 58214846A JP 21484683 A JP21484683 A JP 21484683A JP H0233877 B2 JPH0233877 B2 JP H0233877B2
Authority
JP
Japan
Prior art keywords
cryogen
cryo
gas
cryopump
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58214846A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60108573A (ja
Inventor
Takeyori Shibata
Kyoshi Shibanuma
Yoichi Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58214846A priority Critical patent/JPS60108573A/ja
Publication of JPS60108573A publication Critical patent/JPS60108573A/ja
Publication of JPH0233877B2 publication Critical patent/JPH0233877B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP58214846A 1983-11-15 1983-11-15 クライオポンプの寒剤供給方式 Granted JPS60108573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58214846A JPS60108573A (ja) 1983-11-15 1983-11-15 クライオポンプの寒剤供給方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58214846A JPS60108573A (ja) 1983-11-15 1983-11-15 クライオポンプの寒剤供給方式

Publications (2)

Publication Number Publication Date
JPS60108573A JPS60108573A (ja) 1985-06-14
JPH0233877B2 true JPH0233877B2 (fr) 1990-07-31

Family

ID=16662510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58214846A Granted JPS60108573A (ja) 1983-11-15 1983-11-15 クライオポンプの寒剤供給方式

Country Status (1)

Country Link
JP (1) JPS60108573A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5431546A (en) * 1993-08-23 1995-07-11 Liquid Carbonic Corporation Apparatus for intermittent transfer of fluid having vapor trap seal and vapor escape means
FR2731647B1 (fr) * 1995-03-15 1997-04-30 Corning Inc Procede de fabrication d'un moule constitue d'un reseau d'alveoles pour la fabrication de reseaux de microlentilles optiques

Also Published As

Publication number Publication date
JPS60108573A (ja) 1985-06-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees