JPH0233427U - - Google Patents

Info

Publication number
JPH0233427U
JPH0233427U JP11122388U JP11122388U JPH0233427U JP H0233427 U JPH0233427 U JP H0233427U JP 11122388 U JP11122388 U JP 11122388U JP 11122388 U JP11122388 U JP 11122388U JP H0233427 U JPH0233427 U JP H0233427U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
side wall
bottom end
holding jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11122388U
Other languages
English (en)
Japanese (ja)
Other versions
JP2533551Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988111223U priority Critical patent/JP2533551Y2/ja
Publication of JPH0233427U publication Critical patent/JPH0233427U/ja
Application granted granted Critical
Publication of JP2533551Y2 publication Critical patent/JP2533551Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988111223U 1988-08-26 1988-08-26 半導体ウエハ保持治具 Expired - Lifetime JP2533551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988111223U JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988111223U JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Publications (2)

Publication Number Publication Date
JPH0233427U true JPH0233427U (enrdf_load_stackoverflow) 1990-03-02
JP2533551Y2 JP2533551Y2 (ja) 1997-04-23

Family

ID=31349086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988111223U Expired - Lifetime JP2533551Y2 (ja) 1988-08-26 1988-08-26 半導体ウエハ保持治具

Country Status (1)

Country Link
JP (1) JP2533551Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516664A (ja) * 1974-07-05 1976-01-20 Hitachi Ltd Itajobutsushijijigu
JPS51161071U (enrdf_load_stackoverflow) * 1975-06-16 1976-12-22
JPS62201928U (enrdf_load_stackoverflow) * 1986-06-13 1987-12-23

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516664A (ja) * 1974-07-05 1976-01-20 Hitachi Ltd Itajobutsushijijigu
JPS51161071U (enrdf_load_stackoverflow) * 1975-06-16 1976-12-22
JPS62201928U (enrdf_load_stackoverflow) * 1986-06-13 1987-12-23

Also Published As

Publication number Publication date
JP2533551Y2 (ja) 1997-04-23

Similar Documents

Publication Publication Date Title
JPS61172734U (enrdf_load_stackoverflow)
JPH0233427U (enrdf_load_stackoverflow)
JPH02106688U (enrdf_load_stackoverflow)
JPS6278753U (enrdf_load_stackoverflow)
JP2538126Y2 (ja) 外壁材
JPS6381137U (enrdf_load_stackoverflow)
JPS6174977U (enrdf_load_stackoverflow)
JPS63187290U (enrdf_load_stackoverflow)
JPS62149848U (enrdf_load_stackoverflow)
JPS6236987U (enrdf_load_stackoverflow)
JPH0195047U (enrdf_load_stackoverflow)
JPH0268483U (enrdf_load_stackoverflow)
JPS6430825U (enrdf_load_stackoverflow)
JPS6438639U (enrdf_load_stackoverflow)
JPS635640U (enrdf_load_stackoverflow)
JPH0454810U (enrdf_load_stackoverflow)
JPH0422577U (enrdf_load_stackoverflow)
JPS63200018U (enrdf_load_stackoverflow)
JPH0457519U (enrdf_load_stackoverflow)
JPH0462822U (enrdf_load_stackoverflow)
JPS6193146U (enrdf_load_stackoverflow)
JPS6196535U (enrdf_load_stackoverflow)
JPH01179432U (enrdf_load_stackoverflow)
JPS63124437U (enrdf_load_stackoverflow)
JPH0365158U (enrdf_load_stackoverflow)