JPH0233261U - - Google Patents

Info

Publication number
JPH0233261U
JPH0233261U JP10998588U JP10998588U JPH0233261U JP H0233261 U JPH0233261 U JP H0233261U JP 10998588 U JP10998588 U JP 10998588U JP 10998588 U JP10998588 U JP 10998588U JP H0233261 U JPH0233261 U JP H0233261U
Authority
JP
Japan
Prior art keywords
sample
slow
wave circuit
microwave
comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10998588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0623570Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998588U priority Critical patent/JPH0623570Y2/ja
Publication of JPH0233261U publication Critical patent/JPH0233261U/ja
Application granted granted Critical
Publication of JPH0623570Y2 publication Critical patent/JPH0623570Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP10998588U 1988-08-24 1988-08-24 プラズマ発生装置 Expired - Lifetime JPH0623570Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998588U JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998588U JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPH0233261U true JPH0233261U (enExample) 1990-03-01
JPH0623570Y2 JPH0623570Y2 (ja) 1994-06-22

Family

ID=31346731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998588U Expired - Lifetime JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0623570Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627871A (ja) * 1992-07-06 1994-02-04 Mitsuru Ito 自動車の運転操作練習台

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627871A (ja) * 1992-07-06 1994-02-04 Mitsuru Ito 自動車の運転操作練習台

Also Published As

Publication number Publication date
JPH0623570Y2 (ja) 1994-06-22

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