JPH0232747B2 - - Google Patents
Info
- Publication number
- JPH0232747B2 JPH0232747B2 JP57143994A JP14399482A JPH0232747B2 JP H0232747 B2 JPH0232747 B2 JP H0232747B2 JP 57143994 A JP57143994 A JP 57143994A JP 14399482 A JP14399482 A JP 14399482A JP H0232747 B2 JPH0232747 B2 JP H0232747B2
- Authority
- JP
- Japan
- Prior art keywords
- electron
- cathode
- electron gun
- electron beam
- semiconductor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/2636—Bombardment with radiation with high-energy radiation for heating, e.g. electron beam heating
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143994A JPS5934640A (ja) | 1982-08-21 | 1982-08-21 | 絶縁物質上の半導体膜の粗大結晶粒化乃至単結晶化法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143994A JPS5934640A (ja) | 1982-08-21 | 1982-08-21 | 絶縁物質上の半導体膜の粗大結晶粒化乃至単結晶化法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5934640A JPS5934640A (ja) | 1984-02-25 |
| JPH0232747B2 true JPH0232747B2 (enrdf_load_stackoverflow) | 1990-07-23 |
Family
ID=15351834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57143994A Granted JPS5934640A (ja) | 1982-08-21 | 1982-08-21 | 絶縁物質上の半導体膜の粗大結晶粒化乃至単結晶化法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5934640A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5245864A (en) * | 1975-10-08 | 1977-04-11 | Mitsubishi Electric Corp | Electronic beam generating hot cathode |
-
1982
- 1982-08-21 JP JP57143994A patent/JPS5934640A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5934640A (ja) | 1984-02-25 |
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