JPH0232739B2 - - Google Patents

Info

Publication number
JPH0232739B2
JPH0232739B2 JP57155658A JP15565882A JPH0232739B2 JP H0232739 B2 JPH0232739 B2 JP H0232739B2 JP 57155658 A JP57155658 A JP 57155658A JP 15565882 A JP15565882 A JP 15565882A JP H0232739 B2 JPH0232739 B2 JP H0232739B2
Authority
JP
Japan
Prior art keywords
rotation
tilting
sample
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57155658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5944755A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57155658A priority Critical patent/JPS5944755A/ja
Publication of JPS5944755A publication Critical patent/JPS5944755A/ja
Publication of JPH0232739B2 publication Critical patent/JPH0232739B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57155658A 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置 Granted JPS5944755A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57155658A JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57155658A JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Publications (2)

Publication Number Publication Date
JPS5944755A JPS5944755A (ja) 1984-03-13
JPH0232739B2 true JPH0232739B2 (enExample) 1990-07-23

Family

ID=15610772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57155658A Granted JPS5944755A (ja) 1982-09-06 1982-09-06 走査電子顕微鏡における視野傾斜装置

Country Status (1)

Country Link
JP (1) JPS5944755A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112013002826B4 (de) * 2012-06-08 2021-10-07 Hitachi High-Tech Corporation Mit einem Strahl geladener Teilchen arbeitende Vorrichtung

Also Published As

Publication number Publication date
JPS5944755A (ja) 1984-03-13

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