JPH0231309A - Manufacture of magnetic head - Google Patents
Manufacture of magnetic headInfo
- Publication number
- JPH0231309A JPH0231309A JP18240888A JP18240888A JPH0231309A JP H0231309 A JPH0231309 A JP H0231309A JP 18240888 A JP18240888 A JP 18240888A JP 18240888 A JP18240888 A JP 18240888A JP H0231309 A JPH0231309 A JP H0231309A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- glass
- gap
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 23
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910000859 α-Fe Inorganic materials 0.000 claims description 7
- 239000010408 film Substances 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910000702 sendust Inorganic materials 0.000 abstract description 9
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 230000004927 fusion Effects 0.000 abstract description 3
- 238000004804 winding Methods 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録再生装置に用いられる磁気ヘッドに関
するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in a magnetic recording/reproducing device.
磁気記録装置の高容量化に伴い記録媒体とじては保磁力
の高い物が使われる様になってきておりこの高保磁力媒
体にも十分記録するために、磁気ヘッドのギャップ部に
飽和磁束密度の高い金属磁性薄膜を有する磁気ヘッド(
以下MIGヘッドと呼ぶ)が開発、実用化されるに至っ
てきている。With the increase in the capacity of magnetic recording devices, recording media with high coercive force are being used, and in order to sufficiently record on these high coercive force media, it is necessary to increase the saturation magnetic flux density in the gap part of the magnetic head. A magnetic head with a highly magnetic thin film (
(hereinafter referred to as MIG head) has been developed and put into practical use.
このMIGヘッドの磁気ギャップの長さは1μm以下の
寸法であり、ガラスの流し込みによるギャップ形成が不
可能である事から、金属磁性薄膜上又は、ギャップ対向
面の両面に、非磁性材である5insやA l t O
nをスパッタ形成して、ギャップ長を規定し、ガラスボ
ンディングによって一体として、MIGヘッドを製造し
ている。The length of the magnetic gap of this MIG head is 1 μm or less, and since it is impossible to form a gap by pouring glass, a non-magnetic material of 5 ins. and Al t O
The MIG head is manufactured by sputtering n, defining the gap length, and integrating it by glass bonding.
しかし、前述の従来技術では、MIGヘッドのギャップ
形成のためのガラスボンディングの作業温度が600℃
前後であるため、5iftとフェライト界面又は5i0
2面同士での相互拡散が小さくガラスボンディング後の
ギャップ内部は、ギャップ面の研磨加工後に電子顕微鏡
で観察すると5i02が欠落した様に界面に微小な隙間
が生じている。However, in the above-mentioned conventional technology, the working temperature of glass bonding for forming the gap of the MIG head is 600°C.
Since it is before and after, 5ift and ferrite interface or 5i0
Mutual diffusion between the two surfaces is small, and when the inside of the gap after glass bonding is observed with an electron microscope after polishing the gap surface, a minute gap appears at the interface, as if 5i02 is missing.
この様に、ギャップ部に十分な接合強度がないために、
後加工における加工負荷により、その隙間に対向する部
分のフェライトにマイクロクラックが発生してしまうと
いう問題点を有する。そこで本発明はこの様な問題点を
解決するもので、その目的とする所は、高性能なM工G
ヘッドの磁気ギャップを強固に接合し、マイクロクラッ
クの発生を防ぎ高歩留りで磁気ヘッドを製造するところ
にある。In this way, because there is not enough bonding strength in the gap,
There is a problem in that microcracks occur in the ferrite in the portion facing the gap due to the processing load in post-processing. Therefore, the present invention is intended to solve these problems, and its purpose is to develop a high-performance mechanical engineering G.
The purpose is to firmly bond the magnetic gap of the head, prevent the occurrence of microcracks, and manufacture magnetic heads at a high yield.
本発明の磁気ヘッドの製造方法は、フェライトよりなる
磁気コア半体対の接合面に真空薄膜形成技術により強磁
性金属薄膜を形成し該磁気コア半体対を突き合わせて磁
気ギャップを形成してなる磁気ヘッドにおいて、前記強
磁性金属薄膜上にガラスを薄膜形成し、該ガラスによっ
て磁気ギャップの長さを規定する事を特徴とする。The method for manufacturing a magnetic head of the present invention includes forming a ferromagnetic metal thin film on the joining surface of a pair of magnetic core halves made of ferrite by vacuum thin film forming technology, and then abutting the pair of magnetic core halves to form a magnetic gap. The magnetic head is characterized in that a thin film of glass is formed on the ferromagnetic metal thin film, and the length of the magnetic gap is defined by the glass.
第1図は本発明の実施例におけるMIGヘッドの斜視図
である0強磁性金属薄膜1を真空薄膜形成技術により形
成した第1のコア2とコイル巻線窓3を有する第2のコ
ア4を融着ガラス5を用いて接合し、磁気ギャップ6を
形成しつつ一体としている。実際は、この磁気ヘッドが
複数個取れるバー状態で加工を行い、最後に切断し、第
1図の様な磁気ヘッドを得ている。FIG. 1 is a perspective view of an MIG head according to an embodiment of the present invention, which includes a first core 2 made of a ferromagnetic metal thin film 1 formed by vacuum thin film forming technology, and a second core 4 having a coil winding window 3. They are bonded using fusion glass 5 to form a magnetic gap 6 and are integrated. In reality, a bar is processed into which a plurality of magnetic heads can be obtained, and finally it is cut to obtain a magnetic head as shown in FIG.
当社においては強磁性金属としてセンダストを用いてお
り、このセンダスト薄膜の磁気特性を劣下させないため
にガラス接合においては、600℃前後としている。そ
こで、このガラス接合時にギャップ長がしっかりと規定
されてしかも強度的にも十分である事が要求されるわけ
であるが、そのために、センダスト膜をスパッタ形成し
た後にSiO2,A1201.B20gを主成分とした
ガラスで、その転移点がガラスボンディング温度(60
0℃前後)程度であるガラス薄膜7をスパッタによって
必要とされる厚みだけセンダスト腰上に形成する。又は
センダスト膜と第2のコアのギャップ形成面上に必要と
する厚みの半分ずつを形成する。そして、600℃前後
の温度でガラス接合し一体とする。また、ガラス薄膜の
熱膨張率は添加物成分によってフェライトとセンダスト
膜の中間になる様にする事が望ましい。また、ガラス薄
膜の主成分は前途したが、添加元素としてpb酸成分含
まず、センダスト膜の劣下を防止するとともに、微量の
アルカリ金属成分を含んでいる事が望ましい、この様に
すると、従来に比べ相互拡散による結合が進みギヤツブ
部界面の微小隙間もなくなり、また、加熱、冷却時の残
留応力による歪も小さくなり、加工におけるフェライト
のマイクロクラックの発生もない接合強度の高い磁気ヘ
ッドが得られる。At our company, Sendust is used as the ferromagnetic metal, and in order not to degrade the magnetic properties of the Sendust thin film, the glass bonding temperature is around 600°C. Therefore, when bonding the glass, it is required that the gap length is firmly defined and that the strength is sufficient. For this purpose, after sputtering the sendust film, SiO2, A1201. It is a glass whose main component is 20g of B, and its transition point is at the glass bonding temperature (60g).
A thin glass film 7 having a temperature of about 0° C. is formed on the sendust plate by sputtering to a required thickness. Alternatively, half of the required thickness is formed on the gap forming surface of the sendust film and the second core. Then, they are glass-bonded and integrated at a temperature of around 600°C. Further, it is desirable that the coefficient of thermal expansion of the glass thin film is set to be between that of ferrite and sendust films depending on the additive components. In addition, although the main component of the glass thin film is still in the future, it is desirable that it not contain a PB acid component as an additive element, prevent deterioration of the sendust film, and contain a trace amount of alkali metal component. Compared to the previous model, bonding through mutual diffusion has progressed, eliminating micro-gaps at the gear interface, and distortion due to residual stress during heating and cooling is also reduced, resulting in a magnetic head with high bonding strength and no micro-cracks in the ferrite during processing. It will be done.
以上述べたように本発明によれば、磁気ギャップを形成
しつつ2体のフェライトを一体とする際に、その磁気ギ
ャップ面に、ガラスをスパッタによって薄膜形成してお
く事により、ギャップ部の接合強度が大きくなり、製造
時のマイクロクラックの発生を防止出来、高歩留りで高
性能磁気ヘッドが得られるという効果を有する。As described above, according to the present invention, when two ferrite bodies are integrated while forming a magnetic gap, by forming a thin film of glass by sputtering on the magnetic gap surface, the gap portion is bonded. It has the effect of increasing strength, preventing the occurrence of microcracks during manufacturing, and obtaining a high-performance magnetic head with a high yield.
第1図は本発明の磁気ヘッドの製造方法による磁気ヘッ
ドの斜視図。
1・・・強磁性金属薄膜
2・・・第1のコア
3・・・コイル巻線窓
4・・・第2のコア
5・・・融着ガラス
6・・・磁気ギャップ
7・・・ガラス薄膜
以 上
出願人 セイコーエプソン株式会社FIG. 1 is a perspective view of a magnetic head produced by the magnetic head manufacturing method of the present invention. 1... Ferromagnetic metal thin film 2... First core 3... Coil winding window 4... Second core 5... Fusion glass 6... Magnetic gap 7... Glass Thin film and above Applicant: Seiko Epson Corporation
Claims (1)
形成技術により強磁性金属薄膜を形成し該磁気コア半体
対を突き合わせて磁気ギャップを形成してなる磁気ヘッ
ドにおいて、前記強磁性金属薄膜上にガラスを薄膜形成
し、該ガラス膜によって磁気ギャップの長さを規定する
事を特徴とする磁気ヘッドの製造方法。In a magnetic head in which a ferromagnetic metal thin film is formed on the joint surface of a pair of magnetic core halves made of ferrite by vacuum thin film formation technology, and a magnetic gap is formed by abutting the magnetic core halves, a magnetic gap is formed on the ferromagnetic metal thin film. 1. A method of manufacturing a magnetic head, comprising forming a thin film of glass on the substrate, and defining the length of a magnetic gap by the glass film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18240888A JPH0231309A (en) | 1988-07-21 | 1988-07-21 | Manufacture of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18240888A JPH0231309A (en) | 1988-07-21 | 1988-07-21 | Manufacture of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0231309A true JPH0231309A (en) | 1990-02-01 |
Family
ID=16117777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18240888A Pending JPH0231309A (en) | 1988-07-21 | 1988-07-21 | Manufacture of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0231309A (en) |
-
1988
- 1988-07-21 JP JP18240888A patent/JPH0231309A/en active Pending
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