JPH0231309A - Manufacture of magnetic head - Google Patents

Manufacture of magnetic head

Info

Publication number
JPH0231309A
JPH0231309A JP18240888A JP18240888A JPH0231309A JP H0231309 A JPH0231309 A JP H0231309A JP 18240888 A JP18240888 A JP 18240888A JP 18240888 A JP18240888 A JP 18240888A JP H0231309 A JPH0231309 A JP H0231309A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
glass
gap
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18240888A
Other languages
Japanese (ja)
Inventor
Takahiro Sato
高弘 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP18240888A priority Critical patent/JPH0231309A/en
Publication of JPH0231309A publication Critical patent/JPH0231309A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To strongly bond the magnetic gap of an MIG head, to prevent the generation of micro-crack and to manufacture the magnetic head with high yield by thin film-forming a glass on a ferro-magnetic metallic thin film and specifying the length of the magnetic gap with the glass. CONSTITUTION:'Sendust(R) is used as the ferro-magnetic metal of the magnetic head (MIG head) to have a metallic magnetic thin film. For a first core 2, a glass thin film 7 is formed on this 'Sendust(R) thin film with sputtering only by necessary thickness. Then, this first core 2 and a second core 4 to have a coil winding window 3 are bonded with using a fusion glass 5 and united with being formed so that the length of a magnetic gap 6 can be constant. Really, working is executed in a bar condition, in which the plural magnetic heads of this type can be obtained and they are finally cut off. Then, each magnetic head is obtained. Thus, the bonding intensity of a gap part goes to be large and the micro-crack can be prevented from being generated at the time of the manufacture. Then, the high performance magnetic head can be obtained with the high yield.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気記録再生装置に用いられる磁気ヘッドに関
するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in a magnetic recording/reproducing device.

〔従来の技術〕[Conventional technology]

磁気記録装置の高容量化に伴い記録媒体とじては保磁力
の高い物が使われる様になってきておりこの高保磁力媒
体にも十分記録するために、磁気ヘッドのギャップ部に
飽和磁束密度の高い金属磁性薄膜を有する磁気ヘッド(
以下MIGヘッドと呼ぶ)が開発、実用化されるに至っ
てきている。
With the increase in the capacity of magnetic recording devices, recording media with high coercive force are being used, and in order to sufficiently record on these high coercive force media, it is necessary to increase the saturation magnetic flux density in the gap part of the magnetic head. A magnetic head with a highly magnetic thin film (
(hereinafter referred to as MIG head) has been developed and put into practical use.

このMIGヘッドの磁気ギャップの長さは1μm以下の
寸法であり、ガラスの流し込みによるギャップ形成が不
可能である事から、金属磁性薄膜上又は、ギャップ対向
面の両面に、非磁性材である5insやA l t O
nをスパッタ形成して、ギャップ長を規定し、ガラスボ
ンディングによって一体として、MIGヘッドを製造し
ている。
The length of the magnetic gap of this MIG head is 1 μm or less, and since it is impossible to form a gap by pouring glass, a non-magnetic material of 5 ins. and Al t O
The MIG head is manufactured by sputtering n, defining the gap length, and integrating it by glass bonding.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、前述の従来技術では、MIGヘッドのギャップ
形成のためのガラスボンディングの作業温度が600℃
前後であるため、5iftとフェライト界面又は5i0
2面同士での相互拡散が小さくガラスボンディング後の
ギャップ内部は、ギャップ面の研磨加工後に電子顕微鏡
で観察すると5i02が欠落した様に界面に微小な隙間
が生じている。
However, in the above-mentioned conventional technology, the working temperature of glass bonding for forming the gap of the MIG head is 600°C.
Since it is before and after, 5ift and ferrite interface or 5i0
Mutual diffusion between the two surfaces is small, and when the inside of the gap after glass bonding is observed with an electron microscope after polishing the gap surface, a minute gap appears at the interface, as if 5i02 is missing.

この様に、ギャップ部に十分な接合強度がないために、
後加工における加工負荷により、その隙間に対向する部
分のフェライトにマイクロクラックが発生してしまうと
いう問題点を有する。そこで本発明はこの様な問題点を
解決するもので、その目的とする所は、高性能なM工G
ヘッドの磁気ギャップを強固に接合し、マイクロクラッ
クの発生を防ぎ高歩留りで磁気ヘッドを製造するところ
にある。
In this way, because there is not enough bonding strength in the gap,
There is a problem in that microcracks occur in the ferrite in the portion facing the gap due to the processing load in post-processing. Therefore, the present invention is intended to solve these problems, and its purpose is to develop a high-performance mechanical engineering G.
The purpose is to firmly bond the magnetic gap of the head, prevent the occurrence of microcracks, and manufacture magnetic heads at a high yield.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の磁気ヘッドの製造方法は、フェライトよりなる
磁気コア半体対の接合面に真空薄膜形成技術により強磁
性金属薄膜を形成し該磁気コア半体対を突き合わせて磁
気ギャップを形成してなる磁気ヘッドにおいて、前記強
磁性金属薄膜上にガラスを薄膜形成し、該ガラスによっ
て磁気ギャップの長さを規定する事を特徴とする。
The method for manufacturing a magnetic head of the present invention includes forming a ferromagnetic metal thin film on the joining surface of a pair of magnetic core halves made of ferrite by vacuum thin film forming technology, and then abutting the pair of magnetic core halves to form a magnetic gap. The magnetic head is characterized in that a thin film of glass is formed on the ferromagnetic metal thin film, and the length of the magnetic gap is defined by the glass.

〔実施例〕〔Example〕

第1図は本発明の実施例におけるMIGヘッドの斜視図
である0強磁性金属薄膜1を真空薄膜形成技術により形
成した第1のコア2とコイル巻線窓3を有する第2のコ
ア4を融着ガラス5を用いて接合し、磁気ギャップ6を
形成しつつ一体としている。実際は、この磁気ヘッドが
複数個取れるバー状態で加工を行い、最後に切断し、第
1図の様な磁気ヘッドを得ている。
FIG. 1 is a perspective view of an MIG head according to an embodiment of the present invention, which includes a first core 2 made of a ferromagnetic metal thin film 1 formed by vacuum thin film forming technology, and a second core 4 having a coil winding window 3. They are bonded using fusion glass 5 to form a magnetic gap 6 and are integrated. In reality, a bar is processed into which a plurality of magnetic heads can be obtained, and finally it is cut to obtain a magnetic head as shown in FIG.

当社においては強磁性金属としてセンダストを用いてお
り、このセンダスト薄膜の磁気特性を劣下させないため
にガラス接合においては、600℃前後としている。そ
こで、このガラス接合時にギャップ長がしっかりと規定
されてしかも強度的にも十分である事が要求されるわけ
であるが、そのために、センダスト膜をスパッタ形成し
た後にSiO2,A1201.B20gを主成分とした
ガラスで、その転移点がガラスボンディング温度(60
0℃前後)程度であるガラス薄膜7をスパッタによって
必要とされる厚みだけセンダスト腰上に形成する。又は
センダスト膜と第2のコアのギャップ形成面上に必要と
する厚みの半分ずつを形成する。そして、600℃前後
の温度でガラス接合し一体とする。また、ガラス薄膜の
熱膨張率は添加物成分によってフェライトとセンダスト
膜の中間になる様にする事が望ましい。また、ガラス薄
膜の主成分は前途したが、添加元素としてpb酸成分含
まず、センダスト膜の劣下を防止するとともに、微量の
アルカリ金属成分を含んでいる事が望ましい、この様に
すると、従来に比べ相互拡散による結合が進みギヤツブ
部界面の微小隙間もなくなり、また、加熱、冷却時の残
留応力による歪も小さくなり、加工におけるフェライト
のマイクロクラックの発生もない接合強度の高い磁気ヘ
ッドが得られる。
At our company, Sendust is used as the ferromagnetic metal, and in order not to degrade the magnetic properties of the Sendust thin film, the glass bonding temperature is around 600°C. Therefore, when bonding the glass, it is required that the gap length is firmly defined and that the strength is sufficient. For this purpose, after sputtering the sendust film, SiO2, A1201. It is a glass whose main component is 20g of B, and its transition point is at the glass bonding temperature (60g).
A thin glass film 7 having a temperature of about 0° C. is formed on the sendust plate by sputtering to a required thickness. Alternatively, half of the required thickness is formed on the gap forming surface of the sendust film and the second core. Then, they are glass-bonded and integrated at a temperature of around 600°C. Further, it is desirable that the coefficient of thermal expansion of the glass thin film is set to be between that of ferrite and sendust films depending on the additive components. In addition, although the main component of the glass thin film is still in the future, it is desirable that it not contain a PB acid component as an additive element, prevent deterioration of the sendust film, and contain a trace amount of alkali metal component. Compared to the previous model, bonding through mutual diffusion has progressed, eliminating micro-gaps at the gear interface, and distortion due to residual stress during heating and cooling is also reduced, resulting in a magnetic head with high bonding strength and no micro-cracks in the ferrite during processing. It will be done.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、磁気ギャップを形成
しつつ2体のフェライトを一体とする際に、その磁気ギ
ャップ面に、ガラスをスパッタによって薄膜形成してお
く事により、ギャップ部の接合強度が大きくなり、製造
時のマイクロクラックの発生を防止出来、高歩留りで高
性能磁気ヘッドが得られるという効果を有する。
As described above, according to the present invention, when two ferrite bodies are integrated while forming a magnetic gap, by forming a thin film of glass by sputtering on the magnetic gap surface, the gap portion is bonded. It has the effect of increasing strength, preventing the occurrence of microcracks during manufacturing, and obtaining a high-performance magnetic head with a high yield.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁気ヘッドの製造方法による磁気ヘッ
ドの斜視図。 1・・・強磁性金属薄膜 2・・・第1のコア 3・・・コイル巻線窓 4・・・第2のコア 5・・・融着ガラス 6・・・磁気ギャップ 7・・・ガラス薄膜 以  上 出願人 セイコーエプソン株式会社
FIG. 1 is a perspective view of a magnetic head produced by the magnetic head manufacturing method of the present invention. 1... Ferromagnetic metal thin film 2... First core 3... Coil winding window 4... Second core 5... Fusion glass 6... Magnetic gap 7... Glass Thin film and above Applicant: Seiko Epson Corporation

Claims (1)

【特許請求の範囲】[Claims] フェライトよりなる磁気コア半体対の接合面に真空薄膜
形成技術により強磁性金属薄膜を形成し該磁気コア半体
対を突き合わせて磁気ギャップを形成してなる磁気ヘッ
ドにおいて、前記強磁性金属薄膜上にガラスを薄膜形成
し、該ガラス膜によって磁気ギャップの長さを規定する
事を特徴とする磁気ヘッドの製造方法。
In a magnetic head in which a ferromagnetic metal thin film is formed on the joint surface of a pair of magnetic core halves made of ferrite by vacuum thin film formation technology, and a magnetic gap is formed by abutting the magnetic core halves, a magnetic gap is formed on the ferromagnetic metal thin film. 1. A method of manufacturing a magnetic head, comprising forming a thin film of glass on the substrate, and defining the length of a magnetic gap by the glass film.
JP18240888A 1988-07-21 1988-07-21 Manufacture of magnetic head Pending JPH0231309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18240888A JPH0231309A (en) 1988-07-21 1988-07-21 Manufacture of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18240888A JPH0231309A (en) 1988-07-21 1988-07-21 Manufacture of magnetic head

Publications (1)

Publication Number Publication Date
JPH0231309A true JPH0231309A (en) 1990-02-01

Family

ID=16117777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18240888A Pending JPH0231309A (en) 1988-07-21 1988-07-21 Manufacture of magnetic head

Country Status (1)

Country Link
JP (1) JPH0231309A (en)

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