JPH01149208A - Manufacture for magnetic head - Google Patents

Abstract

PURPOSE:To obtain a magnetic head to have a satisfactory electromagnetic converting characteristic without degrading the magnetic characteristic of a metallic magnetic thin film by forming the metallic magnetic thin film of high saturation magnetic flux density and a non-magnetic film, which specifies a gap length, to a recessed part to be provided near a gap in advance. CONSTITUTION:The gap part surrounding of a first core 1, which is composed of a ferrite, is obtained as a recessed part 2 and in the recessed part 2, an Fe-Al-Si film 3 is formed as the metallic magnetic thin film of the high saturation magnetic flux density by a sputter with an arbitrary thickness. After that, on the Fe-Al-Si film 3, an SiO2 film 4 is stuck by the sputter only for the thickness corresponding to the length of the prescribed gap length as the non- magnetic film. Then, the gap length is specified. Thus, under a high temperature, for the first core 1 and a second core 5 to have a coiling window, even when glass fusion is executed, residual reaction is small and the metallic magnetic thin film, in which magnetic characteristic degradation due to distortion is eliminated, is formed. Then, the magnetic head of the satisfactory electromagnetic converting characteristic is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic head for a magnetic recording/reproducing device.

[Conventional technology]

A conventional magnetic head having a metal magnetic thin film with a high saturation magnetic flux density (hereinafter referred to as Bs) is made of Fe-Aβ as a metal magnetic thin film with a high Bs on a flat first core 1, for example, as shown in FIG. -3i film 3 and SiO* as a nonmagnetic film
4 is formed into a film by sputtering or the like, and then a magnetic head is obtained by integrally forming a second core 5 having a winding window and a fused glass 6.

[Problem that the invention seeks to solve]

However, in the prior art described above, the first core 1 and the second core 5 are integrated with the fusion glass 6, so the process is carried out at a high temperature of about 500'C or more, although it depends on the type of the fusion glass. . Therefore, in the current process, the Fe-Aρ-3i film is pressurized and fixed due to the difference in thermal expansion coefficient of the jig, magnetic block, Fe-Al2-3t film, etc. Residual stress remains, which degrades the magnetic properties of the Fe-Al2-8i film, resulting in deterioration of the electromagnetic conversion properties of the magnetic head.Also, the magnetic gap length also varies depending on the thickness of the 5tO1 film, which is a non-magnetic film. Since the film thickness changes depending on the force applied during fusion bonding, there is a problem in that the gap length varies, making it difficult to obtain a highly accurate gap length. The present invention is intended to solve these problems, and its purpose is to obtain a magnetic head with excellent electromagnetic conversion characteristics without deteriorating the magnetic characteristics of a metal magnetic thin film with high saturation magnetic flux density. Another object of the present invention is to provide a method for manufacturing a magnetic head that can obtain a gap length with high accuracy and has a high yield.

[Means for solving problems]

The manufacturing method of a magnetic head of the present invention is such that in a magnetic head having a gold-am Wl film having a high saturation magnetic flux density, only the periphery corresponding to the magnetic gap of the surface on which the metal magnetic thin film is formed is made into a recess in advance, and the recess is formed into a recess. The method is characterized in that after a metal magnetic thin film and a nonmagnetic film for defining the magnetic gap length are formed by sputtering or the like, two magnetic blocks are bonded together using fused glass.

〔Example〕

An embodiment of the magnetic head according to the present invention is shown in the perspective view of FIG. The manufacturing process of the magnetic head is shown in Figure 2(a).
It is shown in the perspective view of ~(f). As shown in Figure m1, a recess 2 is formed around the gear part of the core 1 of tJl made of ferrite, and Fe-Aρ-3ia3 is deposited in the recess 2 as a metal magnetic thin film with a high Bs of 1.5 to 3 by sputtering.
A film is formed to an arbitrary thickness within the range of 5 μm, and then the Fe-
A SiO* film 4 as a non-magnetic film is deposited on the Al2-3i layer 3 by sputtering to a thickness corresponding to a predetermined gap length, thereby defining the gap length. By doing this, the first core 1 and the winding window are grown! 2
Even if glass fusion is performed on the core 5 at high temperature, a metal magnetic WI film with small residual stress and no deterioration of magnetic properties due to strain is formed, and a magnetic head with excellent electromagnetic conversion properties can be obtained. The step of the concave part is Fe-Al2-81lI
The amount is the sum of the thickness of I and the thickness of S i O* film. The manufacturing method of such a magnetic head is shown in Wi2 (a) to (f).
Explain using. As an example, a case where a metal magnetic film is formed on only one side will be described, but the same applies to a case where films are formed on both sides. A recess 2 is etched around the gear part of the first core 1 made of ferrite shown in FIG. 2(a), so that the thickness of the Fe-Aβ-8i film is 2.5 μm.
Further, when the thickness of siO*lK is 0.5 μm, the recess is formed with an amount of 3 μm. Thereafter, dirt was removed by precision cleaning, and Fe-Al2-8ill13 was deposited with a thickness of 2.5 μm by sputtering as shown in FIG. 2(b).
A sio* film 4 is formed with a thickness of 0.5 μm. and,
A second core 5 made of ferrite shown in FIG. 2(C)
The above-described first core 1 is heated to a temperature of 500° C. or higher and is integrally bonded with a fused glass 6 in an inert gas (for example, Ar s N) to obtain a core block 7 shown in FIG. 2 (d). The core block 7 obtained in this way is shown in Figure 2 (
As shown in e), the upper part of the head is polished with Fe-
, Afl-8t film 3 and SiO', film 4 until a gap defined by the film 4 appears. The specific gap depth depends on the required electromagnetic conversion characteristics, but if this head is used for an HDD, if it is 10 μm or less, it will have very excellent characteristics. . After this, as shown in Figure 2 (''), grooves are made by dicing to a predetermined track width of 8, and by cutting completely at the position indicated by the broken line in the figure, the magnetic You will get the head.

In this way, during the glass welding shown in FIG. 2(d), the ferrite portions of the first core 1 and the second core 5 receive the load during the welding, so that the gap length also becomes S i O *
It is precisely defined by the thickness of the membrane. Also, Fe-Al2-
Since the 3i film can also have very small magnetic distortion due to residual stress, a magnetic head with excellent electromagnetic conversion characteristics can be obtained. Furthermore, since there are no non-magnetic inclusions such as sio*ra on the joining surface 9 of the first core and the second core on the side opposite to the magnetic gap, the magnetic head has excellent magnetic efficiency.

〔Effect of the invention〕

As described above, according to the present invention, a metal magnetic thin film with a high Bs and a non-magnetic film that defines the gap length are deposited by sputtering or the like in a recess provided in advance around the gap, thereby achieving glass fusion bonding under high temperature. In this way, a magnetic head that does not deteriorate the magnetic properties of the metal magnetic thin film and develops extremely excellent electromagnetic conversion properties can be obtained. In addition, the accuracy of the gap length is not affected by the load during fusion ((), and a highly accurate gap length can be obtained with a high yield.Furthermore, the ferrites are directly bonded to each other on the rear bonding surface of the magnetic head. As a result, an excellent head with high magnetic efficiency can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of the magnetic head of the present invention. FIGS. 2(a) to 2(r) are perspective views showing the manufacturing process of the magnetic head shown in FIG. 1. FIG. 3 is a perspective view showing a conventional magnetic head. l...First core 2...Recessed portion 3 ・F e -Aρ-3ifi 4...SiO*v! . 5...$2 core 6...fused glass 7...core block 8...track width 9...more than the rear joint surface Applicant Seiko Epson Co., Ltd. Agent Patent attorney Tsutomu Mogami et al. 1 person 3 Fe, -A
I-5t East 1 Figure 2 (b) Tomi 2nd Group (c) Kan 21st Criminal (Be)

Claims (1)

[Claims] Two magnetic blocks each having at least one surface on which a metal magnetic thin film with high saturation magnetic flux density is deposited are made to face each other with the surfaces on which the metal magnetic thin film is deposited, and are joined together by fused glass while forming a magnetic gap. In the method of manufacturing a magnetic head, a recess is formed in advance only in the periphery corresponding to the magnetic gap of the surface on which the metal magnetic thin film is formed, and a nonmagnetic film for defining the metal magnetic thin film and the magnetic gap length is formed only in this recess. 1. A method of manufacturing a magnetic head, which comprises forming a film by sputtering or the like, and then bonding two magnetic blocks using fused glass.