JPH0231055U - - Google Patents
Info
- Publication number
- JPH0231055U JPH0231055U JP10989388U JP10989388U JPH0231055U JP H0231055 U JPH0231055 U JP H0231055U JP 10989388 U JP10989388 U JP 10989388U JP 10989388 U JP10989388 U JP 10989388U JP H0231055 U JPH0231055 U JP H0231055U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- anode
- electrode system
- drive mechanism
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 230000009977 dual effect Effects 0.000 description 2
- 238000004157 plasmatron Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109893U JPH0635363Y2 (ja) | 1988-08-22 | 1988-08-22 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109893U JPH0635363Y2 (ja) | 1988-08-22 | 1988-08-22 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0231055U true JPH0231055U (zh) | 1990-02-27 |
| JPH0635363Y2 JPH0635363Y2 (ja) | 1994-09-14 |
Family
ID=31346557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988109893U Expired - Lifetime JPH0635363Y2 (ja) | 1988-08-22 | 1988-08-22 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635363Y2 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (ja) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | イオンビーム装置 |
| JP2003503819A (ja) * | 1999-06-23 | 2003-01-28 | アプライド マテリアルズ インコーポレイテッド | イオンビーム発生装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882447A (ja) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | イオン源における引出電極の位置および姿勢調整装置 |
-
1988
- 1988-08-22 JP JP1988109893U patent/JPH0635363Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882447A (ja) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | イオン源における引出電極の位置および姿勢調整装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (ja) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | イオンビーム装置 |
| JP2003503819A (ja) * | 1999-06-23 | 2003-01-28 | アプライド マテリアルズ インコーポレイテッド | イオンビーム発生装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635363Y2 (ja) | 1994-09-14 |