JPH02303081A - Piezoelectric porcelain composition - Google Patents
Piezoelectric porcelain compositionInfo
- Publication number
- JPH02303081A JPH02303081A JP1124054A JP12405489A JPH02303081A JP H02303081 A JPH02303081 A JP H02303081A JP 1124054 A JP1124054 A JP 1124054A JP 12405489 A JP12405489 A JP 12405489A JP H02303081 A JPH02303081 A JP H02303081A
- Authority
- JP
- Japan
- Prior art keywords
- composition
- piezoelectric
- main component
- present
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 24
- 229910052573 porcelain Inorganic materials 0.000 title claims description 8
- 239000000126 substance Substances 0.000 claims 1
- 238000005245 sintering Methods 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 description 13
- 238000010304 firing Methods 0.000 description 12
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は圧電性磁器組成物、特に、電圧を供給すること
によって生ずる変位を積極的に利用する圧電セラミック
素子、例えば、圧電ブザー、圧電スピーカー、圧電アク
チュエータなどの材料として有用な圧電性磁器組成物に
関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to piezoelectric ceramic compositions, particularly piezoelectric ceramic elements that actively utilize displacement caused by supplying voltage, such as piezoelectric buzzers and piezoelectric speakers. , relates to a piezoelectric ceramic composition useful as a material for piezoelectric actuators and the like.
（従来の技術）
従来、圧電材料としてはチタン酸ジルコン酸鉛磁器か知
られているか、用途に適した圧電特性を得るため、チタ
ン酸ジルコン酸鉛に第三成分としてＰｂ（Ｎｉ＋ｚ＊Ｎ
ｂｔｚ３）Ｏｚ、Ｐｂ（ＣＯ１／３Ｎｂｔｚｓ）０：＋
、ｊｏ ルイｌｌｔ Ｐ ｂ（Ｍｇ＋ ／３ Ｎ ｂｓ
ｚ３）Ｏ、Ｉを固溶させたものや、ＮｉＯＮｌｏｌある
いはＳｉｎ、なとの酸化物を添加させたものが、例えば
、特公昭４５−３７８０５７号公報、特公昭４５−３２
４６５号公報、特公昭４６−４３０６２号公報などにて
提案されている。そのなかでも、Ｐｂ（Ｎｉ＋ｚ＋Ｎｂ
＊ｚ３）０３を固溶させた三成分系磁器は、他の三成分
系のものに比べて、圧電特性の良否を示す電気機械結合
係数か大きく、また比誘電率が大きくて機械的品質係数
が小さいという特徴を有することから、圧電ブザー、圧
電スピーカー、圧電アクチユエータなどの材料として利
用されている。(Prior art) Lead zirconate titanate porcelain has conventionally been known as a piezoelectric material, and in order to obtain piezoelectric properties suitable for the application, Pb (Ni+z*N) is added to lead zirconate titanate as a third component.
btz3) Oz, Pb (CO1/3Nbtzs) 0:+
, jo Louis llt P b(Mg+ /3 N bs
z3) Those in which O and I are dissolved in solid solution, and those in which oxides such as NiONlol or Sin are added are disclosed in, for example, Japanese Patent Publication No. 45-378057 and Japanese Patent Publication No. 45-32.
This method has been proposed in Japanese Patent Publication No. 465, Japanese Patent Publication No. 46-43062, etc. Among them, Pb(Ni+z+Nb
*Z3) Three-component porcelain containing 03 as a solid solution has a higher electromechanical coupling coefficient, which indicates the quality of piezoelectric properties, than other three-component ceramics, and a high dielectric constant, resulting in a low mechanical quality factor. Because of its small size, it is used as a material for piezoelectric buzzers, piezoelectric speakers, piezoelectric actuators, etc.
（発明が解決しようとする課題）
しかしながら、この三成分系磁器組成物では、十分に大
きな値の電気機械結合係数（Ｋｐ）を持つものを得よう
とすると、焼成温度を１２００〜１２８０°Ｃと非常に
高い温度にする必要があった。(Problems to be Solved by the Invention) However, in order to obtain a ternary porcelain composition with a sufficiently large electromechanical coupling coefficient (Kp), the firing temperature must be set at 1200 to 1280°C. It had to be at a very high temperature.
このため、内部電極を一体焼成した積層型の圧電セラミ
ック素子を製造する場合には、高温まで熔融および酸化
しないＰｄ、ＰＬ等の高価な貴金属類を使用しなければ
ならず、圧電セラミック素子における内部電極のコスト
が非常に高くつくという問題があった。また、焼成時に
ｐｂの蒸発が避けられないため、セラミ・νり素子の特
性にバラツキを生じ易（、しかも焼成温度が高いことに
起因して、電力消費量が多くなる他、内部電極を持たな
い圧電セラミ、ｙり素子の場合でも焼成用のサヤが短期
間で損傷するという問題があった。Therefore, when manufacturing a laminated piezoelectric ceramic element in which internal electrodes are integrally fired, it is necessary to use expensive precious metals such as Pd and PL, which do not melt and oxidize at high temperatures. There was a problem that the cost of the electrodes was very high. In addition, evaporation of PB is unavoidable during firing, which tends to cause variations in the characteristics of ceramic/nuclear elements. Even in the case of piezoelectric ceramics and Y-type elements, there is a problem that the firing sheath is damaged in a short period of time.
従って、本発明は、良好な圧電特性を有し、低温で焼結
が可能な圧電性磁器組成物を得ることを主目的とする。Therefore, the main object of the present invention is to obtain a piezoelectric ceramic composition that has good piezoelectric properties and can be sintered at low temperatures.
（課題を解決するための手段）
本発明は、前記課題を解決するための手段として、Ｐ
ｂ（Ｎ ｉ＋、ｓＮ ｂｔ／、）０３ Ｐ ｂＴ ｉ
ｏ ３−Ｐ ｂＺ ｒｏ 、を基本組成とし、これにＰ
ｂ（Ｃｕ＋ｚｔＷ ＋ ｔ ＊） Ｏ’ａを所定型添加
し、固溶させるようにしたものである。(Means for Solving the Problem) The present invention provides, as a means for solving the problem, P.
b(N i+, sN bt/,)03 P bT i
o 3-P bZ ro is the basic composition, and P
b(Cu+ztW + t*) O'a is added in a predetermined form to form a solid solution.
即ち、本発明の要旨は、一般式： ｘＰｂ（ＮＬｚ。That is, the gist of the present invention is the general formula: xPb(NLz.
Ｎｂ＋／ＪＯ３ｙＰｂＺｒｏ３ ｚＰｂＴｉｏｓ （
但し、Ｘ。Nb+/JO3yPbZro3 zPbTios (
However, X.
ｙおよび２は各成分のモル分率で、３＋ｙ＋ｚ＝１．０
０を満足し、第１図において下記の組成の点Ａ。y and 2 are the mole fractions of each component, 3+y+z=1.0
0, and the point A in FIG. 1 has the following composition.
Ｂ、 Ｃ，Ｄ、 Ｅ、 Ｆを頂点とする多角形ＡＢＣＤ
ＥＦで囲まれた範囲内の組成比を有する。）で表される
主成分に、Ｐ ｂ（Ｃｕ＋ｚ＊Ｗ１／１）０３を０．２
〜１０゜０重量％添加させてなることを特徴とする圧電
性磁器組成物にある。Polygon ABCD with vertices B, C, D, E, F
It has a composition ratio within the range surrounded by EF. ), Pb(Cu+z*W1/1)03 is added by 0.2
A piezoelectric porcelain composition characterized in that it is added in an amount of up to 10.0% by weight.
Ｋ ｙＺ
Ａ Ｏ，６００，０５０，３５
Ｂ Ｏ，１５０，０５０，８０
ＣＯ，０５０，１５０，８０
Ｄ Ｏ，０５０，８００，１５
Ｅ Ｏ，１５０，８００，０５
Ｆ Ｏ，６００，３５０，０５
（作用）
Ｐｂ（Ｃｕ＋ｔ＊ＷｒｉＪＯｓは、主成分である一般式
：％式％
Ｏ５で示される主成分に、所定量固溶させると、圧電特
定を向上させると共に、焼成温度を約１００℃低下させ
る機能を果たす。K yZ A O,600,050,35 B O,150,050,80 CO,050,150,80 D O,050,800,15 E O,150,800,05 F O,600,350,05 ( Effect) When Pb (Cu+t*WriJOs) is dissolved in a predetermined amount in the main component represented by the general formula: % formula % O5, it has the function of improving piezoelectric properties and lowering the firing temperature by about 100°C. fulfill.
本発明に係る圧電性磁器組成物の組成範囲を前記範囲に
限定した理由は次の通りである。The reason why the composition range of the piezoelectric ceramic composition according to the present invention is limited to the above range is as follows.
基本組成に於けるＰｂ（Ｎｉｔ、ｓＮｂ□、）０３のモ
ル分率Ｘが、第１図に示す領域の外側、即ち、０．０５
未満または０．６０を越えると、電気機械結合係数およ
び比誘電率が低下するので前記範囲とした。If the molar fraction X of Pb(Nit, sNb□,)03 in the basic composition is outside the region shown in FIG.
If it is less than or exceeds 0.60, the electromechanical coupling coefficient and dielectric constant will decrease, so it was set in the above range.
また、ＰｂＺｒＯｓのモル分率ｙが第１図の領域外、特
に、０，８０を越える領域では、圧電性が著しく劣化す
るので０．０５〜０．８０とした。Furthermore, when the mole fraction y of PbZrOs is outside the range shown in FIG. 1, particularly in a range exceeding 0.80, the piezoelectricity deteriorates significantly, so it was set at 0.05 to 0.80.
さらに、ＰｂＴｉ０．のモル分率２が、第１図の領域外
、特に、０．８０を越える領域では、完全な焼成をする
ことが困難になり、分極処理を完全に遂行することがで
きず実用的な圧電性磁器を得ることができないので０．
０５〜０，８０の範囲とした。Furthermore, PbTi0. If the molar fraction 2 of 0 because I can't get sex porcelain.
The range was 0.05 to 0.80.
他方、Ｐｂ（Ｃｕ＋ｚｔＷｔｚ＊）０３の添加量もしく
は含有量を０．２〜ＩＯ，０重ｆ１％としたのは、その
範囲外では完全な焼結体を得ることが非常に困難であり
、しかも、基本成分の圧電性を政務する効果が殆ど得ら
れないか、得られても実用に耐えうる程度にならないか
らである。On the other hand, the reason why the addition amount or content of Pb(Cu+ztWtz*)03 is set to 0.2 to IO, 0 wt f1% is because it is extremely difficult to obtain a perfect sintered body outside of this range. This is because little or no effect on the piezoelectricity of the basic component can be obtained, or even if it is obtained, it is not to the extent that it can withstand practical use.
以下、本発明の実施例について説明する。Examples of the present invention will be described below.
（実施例）
原料として、ｐｂｏ（またはＰｂ、Ｏ，）、Ｚ ｒ Ｏ
＠ ５Ｔｉｅ、、Ｎｉｐ％Ｎｂ＊Ｏｓ％ＣｕＯおよびＷ
、０．を用い、これらを第１表に示す各試料の組成にな
るように秤量、調合し、ボールミルにて約２０時間層式
混合した。この混合原料を脱水、乾燥させた後、約８０
０〜９００℃で２時間仮焼し、粉砕した。得られた仮焼
粉末に適量のバインダーを加えて粉砕、混合し、造粒し
た後、直径１２ｍ５．厚さ１、Ｏａ＋ｍの円板に成形し
、１０８０〜１２４０℃で焼成した。(Example) As raw materials, pbo (or Pb, O,), Z r O
@5Tie,, Nip%Nb*Os%CuO and W
,0. These were weighed and mixed so as to have the composition of each sample shown in Table 1, and layered in a ball mill for about 20 hours. After dehydrating and drying this mixed raw material, approximately 80%
It was calcined at 0 to 900°C for 2 hours and pulverized. After adding an appropriate amount of binder to the obtained calcined powder, pulverizing it, mixing it, and granulating it, it was made into a powder with a diameter of 12 m5. It was molded into a disk with a thickness of 1 Oa+m and fired at 1080 to 1240°C.
得られた磁器円板の両面に銀電極を焼付け、絶縁オイル
中で２〜３ＫＶ／ａｍの直流電圧を３０分間印加して分
極処理して試料とした。Silver electrodes were baked on both sides of the obtained porcelain disk, and a DC voltage of 2 to 3 KV/am was applied for 30 minutes in insulating oil to perform polarization treatment to prepare a sample.
得られた試料について、比誘電率（ε「）および径方向
の電気機械結合係数（Ｋｐ）を測定した。なお、圧電特
性はＩＲＥ標準回路を用いて周波数１ＫＨｚ、印加電圧
Ｉ Ｖ ｒ＠ｓｓ温度２５℃の条件下で測定した。The relative dielectric constant (ε'') and radial electromechanical coupling coefficient (Kp) were measured for the obtained sample.The piezoelectric properties were measured using an IRE standard circuit at a frequency of 1 KHz, an applied voltage I V r@ss temperature Measurement was performed under the condition of 25°C.
それらの結果を第１表に示す。表中、本を付した試料は
本発明の範囲外の組成のものである。また、第１表中の
それぞれ同一組成を有する本発明の範囲内の試料（４，
１１，１８，２４，３０）と本発明の範囲外の試料（１
，８，１５，２１，２７）についての電気機械結合係数
と焼成温度との関係、および比誘電率と焼成温度との関
係をそれぞれ第２図および第３図に示す。The results are shown in Table 1. In the table, samples labeled with a book have compositions outside the scope of the present invention. In addition, samples within the scope of the present invention (4, 4,
11, 18, 24, 30) and samples outside the scope of the present invention (1
, 8, 15, 21, 27), the relationship between the electromechanical coupling coefficient and the firing temperature, and the relationship between the dielectric constant and the firing temperature are shown in FIGS. 2 and 3, respectively.
第１表に示される結果から、本発明に係る圧電性＆ｎ、
ｎ紙器物は、本発明の範囲外のものに比べて低温側での
Ｋｐ、εｒの値が著しく大きいことが判る。また、第２
図および第３図に示されるように、低温で焼結が進んで
いることが判る。さらに、同一の基本組成を有し、Ｐｂ
（Ｃｕｔｚ＊Ｗ＋／＊）Ｏｓの含有量のみを異ならせて
同一の焼成温度で焼結させて得られた試料、例えば、試
料番号１５〜２０についての結果から、Ｐ ｂ（ｅｕ＋
ｚｔＷ＋ｚ＊）Ｏｓを添加させるとＫｐおよびεｒが向
上し、その向上の度合は含有ｍの増加と共に大きくなっ
て、１〜３重１％の領域で極大に達し、それを越えると
低下することが判る。From the results shown in Table 1, piezoelectricity according to the present invention,
It can be seen that the values of Kp and εr on the low temperature side are significantly larger for n paper utensils than for those outside the scope of the present invention. Also, the second
As shown in the figure and FIG. 3, it can be seen that sintering progresses at low temperatures. Moreover, it has the same basic composition and Pb
(Cutz*W+/*) From the results for samples obtained by changing only the Os content and sintering at the same sintering temperature, for example, sample numbers 15 to 20, P b(eu+
Addition of ztW+z*)Os improves Kp and εr, and the degree of improvement increases as the content m increases, reaching a maximum in the 1 to 3 weight 1% region, and beyond that point, there is a decline in Kp and εr. I understand.
（発明の効果）
以上の説明から明らかなように、本発明によれば、電気
機械結合係数および比誘電率が太き（、−圧電ｄ定数が
大きな圧電性磁器組成物が得られ、しかも従来のものよ
り約１００℃低い温度で焼結させることができるため、
高価な貴金属に代えてＡｇ−Ｐｄ合金など比較的安価な
電極材料を用いて積層圧電セラミック素子を製造できる
ようになり、大幅なコストダウンを図ることができる。(Effects of the Invention) As is clear from the above description, according to the present invention, a piezoelectric ceramic composition with a large electromechanical coupling coefficient and a large dielectric constant (, - piezoelectric d constant) can be obtained, and Because it can be sintered at a temperature approximately 100°C lower than that of
It is now possible to manufacture a laminated piezoelectric ceramic element using a relatively inexpensive electrode material such as an Ag-Pd alloy instead of an expensive noble metal, resulting in a significant cost reduction.
また、低い焼成温度を採用することにより、焼成時間の
短縮、電力使用量の低減、焼成用サヤの延命化を図るこ
とができる他、焼成時の鉛の蒸発による組成の変化を抑
制でき、従って、セラミック素子の特性のバラツキを少
なくすることができるという優れた効果が得られる。In addition, by using a low firing temperature, it is possible to shorten firing time, reduce power consumption, and extend the life of the firing pod, as well as suppress changes in composition due to lead evaporation during firing. , an excellent effect can be obtained in that variations in characteristics of ceramic elements can be reduced.
第１図は本発明に係る圧電性磁器組成物の基本組成の範
囲を示す図、第２図は本発明の範囲内の試料と本発明の
範囲外の試料についての電気機械結合係数と焼成温度と
の関係を示すグラフ、第３図はそれらの比誘電率と焼成
温度との関係を示すグラフである。
特 許 出 願 人 株式会社村田製作所代 理 人
弁理士 青白 葆 はか１名第１ 図Figure 1 is a diagram showing the basic composition range of the piezoelectric ceramic composition according to the present invention, and Figure 2 is a diagram showing the electromechanical coupling coefficient and firing temperature for samples within the scope of the present invention and samples outside the scope of the present invention. FIG. 3 is a graph showing the relationship between the relative permittivity and firing temperature. Patent applicant Murata Manufacturing Co., Ltd. Agent
1 patent attorney, Aohaku Ao Haka Figure 1
Claims (1)
＿３）Ｏ＿３−ｙＰｂＺｒＯ＿３−ｚＰｂＴｉＯ＿３（
但し、ｘ，ｙおよびｚは各成分のモル分率で、ｘ＋ｙ＋
ｚ＝１．００を満足し、第１図において下記の組成の点
Ａ，Ｂ，Ｃ，Ｄ，Ｅ，Ｆを頂点とする多角形ＡＢＣＤＥ
Ｆで囲まれた範囲内の組成比を有する。）で表される主
成分に、Ｐｂ（Ｃｕ＿１／＿２Ｗ＿１＿／＿２）Ｏ＿３
を０．２〜１０．０重量％添加させてなることを特徴と
する圧電性磁器組成物。 ▲数式、化学式、表等があります▼(1) General formula: xPb(Ni_1_/_3Nb_1_/
_3) O_3-yPbZrO_3-zPbTiO_3(
However, x, y and z are the mole fractions of each component, x+y+
A polygon ABCDE that satisfies z=1.00 and whose vertices are points A, B, C, D, E, and F of the following composition in FIG.
It has a composition ratio within the range surrounded by F. ), Pb(Cu_1/_2W_1_/_2)O_3
1. A piezoelectric porcelain composition characterized by adding 0.2 to 10.0% by weight of. ▲Contains mathematical formulas, chemical formulas, tables, etc.▼
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124054A JPH02303081A (en) | 1989-05-17 | 1989-05-17 | Piezoelectric porcelain composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124054A JPH02303081A (en) | 1989-05-17 | 1989-05-17 | Piezoelectric porcelain composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02303081A true JPH02303081A (en) | 1990-12-17 |
Family
ID=14875831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1124054A Pending JPH02303081A (en) | 1989-05-17 | 1989-05-17 | Piezoelectric porcelain composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02303081A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1062540C (en) * | 1996-01-26 | 2001-02-28 | 株式会社村田制作所 | Dielectric ceramics composition |
| CN1064940C (en) * | 1995-12-20 | 2001-04-25 | 株式会社村田制作所 | Piezoelectric ceramics composition |
| KR100462871B1 (en) * | 2001-12-27 | 2004-12-17 | 주식회사 에스세라 | Piezoelectric Ceramic Composition Having Excellent Heat Resistance and Stability in Frequency Change and Piezoelectric Device Using the Same |
| KR100462872B1 (en) * | 2001-12-27 | 2004-12-17 | 주식회사 에스세라 | Piezoelectric Ceramic Composition Reducing Leakage Current and Piezoelectric Device Using The Same |
| KR100498886B1 (en) * | 2002-11-27 | 2005-07-04 | 한국전기연구원 | Piezoelectric ceramic composite for application to multilayer actuator and manufacturing method thereof |
| JP2009286662A (en) * | 2008-05-29 | 2009-12-10 | Tdk Corp | Piezoelectric ceramic, piezoelectric element and lamination type piezoelectric element |
| JP2016034889A (en) * | 2014-07-31 | 2016-03-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | Piezoelectric ceramic composition, piezoelectric element and piezoelectric vibration module including the same |
-
1989
- 1989-05-17 JP JP1124054A patent/JPH02303081A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1064940C (en) * | 1995-12-20 | 2001-04-25 | 株式会社村田制作所 | Piezoelectric ceramics composition |
| CN1062540C (en) * | 1996-01-26 | 2001-02-28 | 株式会社村田制作所 | Dielectric ceramics composition |
| KR100462871B1 (en) * | 2001-12-27 | 2004-12-17 | 주식회사 에스세라 | Piezoelectric Ceramic Composition Having Excellent Heat Resistance and Stability in Frequency Change and Piezoelectric Device Using the Same |
| KR100462872B1 (en) * | 2001-12-27 | 2004-12-17 | 주식회사 에스세라 | Piezoelectric Ceramic Composition Reducing Leakage Current and Piezoelectric Device Using The Same |
| KR100498886B1 (en) * | 2002-11-27 | 2005-07-04 | 한국전기연구원 | Piezoelectric ceramic composite for application to multilayer actuator and manufacturing method thereof |
| JP2009286662A (en) * | 2008-05-29 | 2009-12-10 | Tdk Corp | Piezoelectric ceramic, piezoelectric element and lamination type piezoelectric element |
| JP2016034889A (en) * | 2014-07-31 | 2016-03-17 | サムソン エレクトロ−メカニックス カンパニーリミテッド． | Piezoelectric ceramic composition, piezoelectric element and piezoelectric vibration module including the same |
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