JPH0230173B2 - - Google Patents

Info

Publication number
JPH0230173B2
JPH0230173B2 JP11665286A JP11665286A JPH0230173B2 JP H0230173 B2 JPH0230173 B2 JP H0230173B2 JP 11665286 A JP11665286 A JP 11665286A JP 11665286 A JP11665286 A JP 11665286A JP H0230173 B2 JPH0230173 B2 JP H0230173B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11665286A
Other versions
JPS62273724A (en
Inventor
Hidemi Ishiuchi
Original Assignee
Tokyo Shibaura Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co filed Critical Tokyo Shibaura Electric Co
Priority to JP11665286A priority Critical patent/JPH0230173B2/ja
Publication of JPS62273724A publication Critical patent/JPS62273724A/en
Publication of JPH0230173B2 publication Critical patent/JPH0230173B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

JP11665286A 1986-05-21 1986-05-21 Expired - Fee Related JPH0230173B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11665286A JPH0230173B2 (en) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11665286A JPH0230173B2 (en) 1986-05-21 1986-05-21

Publications (2)

Publication Number Publication Date
JPS62273724A JPS62273724A (en) 1987-11-27
JPH0230173B2 true JPH0230173B2 (en) 1990-07-04

Family

ID=14692533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11665286A Expired - Fee Related JPH0230173B2 (en) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPH0230173B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2666859B2 (en) * 1988-11-25 1997-10-22 日本電気株式会社 A semiconductor device having an eye combined for vernier pattern
JP2790416B2 (en) * 1993-08-26 1998-08-27 沖電気工業株式会社 Alignment mark arrangement method
CN106981435A (en) * 2016-01-15 2017-07-25 无锡华润上华半导体有限公司 Photoetching detection graphics structure

Also Published As

Publication number Publication date
JPS62273724A (en) 1987-11-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees