JPH02301588A - Tin, lead or tin-lead alloy electroplating bath and electroplating method - Google Patents
Tin, lead or tin-lead alloy electroplating bath and electroplating methodInfo
- Publication number
- JPH02301588A JPH02301588A JP12134489A JP12134489A JPH02301588A JP H02301588 A JPH02301588 A JP H02301588A JP 12134489 A JP12134489 A JP 12134489A JP 12134489 A JP12134489 A JP 12134489A JP H02301588 A JPH02301588 A JP H02301588A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- tin
- lead
- plating
- plating bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims description 28
- 229910001174 tin-lead alloy Inorganic materials 0.000 title claims description 22
- 238000009713 electroplating Methods 0.000 title claims description 16
- 229910000978 Pb alloy Inorganic materials 0.000 title claims description 10
- 238000000034 method Methods 0.000 title claims description 5
- 238000007747 plating Methods 0.000 claims abstract description 73
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims abstract description 22
- 150000003839 salts Chemical class 0.000 claims abstract description 13
- 239000008139 complexing agent Substances 0.000 claims abstract description 10
- 150000002500 ions Chemical class 0.000 claims abstract description 10
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 claims abstract description 8
- 235000010323 ascorbic acid Nutrition 0.000 claims abstract description 8
- 239000011668 ascorbic acid Substances 0.000 claims abstract description 8
- 229960005070 ascorbic acid Drugs 0.000 claims abstract description 8
- 239000000600 sorbitol Substances 0.000 claims abstract description 8
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 claims abstract description 7
- AEMOLEFTQBMNLQ-AQKNRBDQSA-N D-glucopyranuronic acid Chemical compound OC1O[C@H](C(O)=O)[C@@H](O)[C@H](O)[C@H]1O AEMOLEFTQBMNLQ-AQKNRBDQSA-N 0.000 claims abstract description 7
- IAJILQKETJEXLJ-UHFFFAOYSA-N Galacturonsaeure Natural products O=CC(O)C(O)C(O)C(O)C(O)=O IAJILQKETJEXLJ-UHFFFAOYSA-N 0.000 claims abstract description 7
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 claims abstract description 7
- LKDRXBCSQODPBY-AMVSKUEXSA-N L-(-)-Sorbose Chemical compound OCC1(O)OC[C@H](O)[C@@H](O)[C@@H]1O LKDRXBCSQODPBY-AMVSKUEXSA-N 0.000 claims abstract description 7
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 claims abstract description 7
- 239000008103 glucose Substances 0.000 claims abstract description 7
- 229940097043 glucuronic acid Drugs 0.000 claims abstract description 7
- CIWBSHSKHKDKBQ-DUZGATOHSA-N D-isoascorbic acid Chemical compound OC[C@@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-DUZGATOHSA-N 0.000 claims abstract description 6
- SBJKKFFYIZUCET-JLAZNSOCSA-N Dehydro-L-ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(=O)C1=O SBJKKFFYIZUCET-JLAZNSOCSA-N 0.000 claims abstract description 6
- 235000010350 erythorbic acid Nutrition 0.000 claims abstract description 6
- 229940026239 isoascorbic acid Drugs 0.000 claims abstract description 6
- GJQWCDSAOUMKSE-STHAYSLISA-N 2,3-diketogulonic acid Chemical compound OC[C@H](O)[C@@H](O)C(=O)C(=O)C(O)=O GJQWCDSAOUMKSE-STHAYSLISA-N 0.000 claims abstract description 5
- SBJKKFFYIZUCET-UHFFFAOYSA-N Dehydroascorbic acid Natural products OCC(O)C1OC(=O)C(=O)C1=O SBJKKFFYIZUCET-UHFFFAOYSA-N 0.000 claims abstract description 5
- RGHNJXZEOKUKBD-QTBDOELSSA-N L-gulonic acid Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)C(O)=O RGHNJXZEOKUKBD-QTBDOELSSA-N 0.000 claims abstract description 5
- 235000020960 dehydroascorbic acid Nutrition 0.000 claims abstract description 5
- 239000011615 dehydroascorbic acid Substances 0.000 claims abstract description 5
- SXZYCXMUPBBULW-SKNVOMKLSA-N L-gulono-1,4-lactone Chemical compound OC[C@H](O)[C@H]1OC(=O)[C@@H](O)[C@H]1O SXZYCXMUPBBULW-SKNVOMKLSA-N 0.000 claims abstract description 4
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 10
- 229910001432 tin ion Inorganic materials 0.000 claims description 9
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 abstract description 11
- VBUYCZFBVCCYFD-JJYYJPOSSA-N 2-dehydro-D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)C(=O)C(O)=O VBUYCZFBVCCYFD-JJYYJPOSSA-N 0.000 abstract description 7
- 229910020816 Sn Pb Inorganic materials 0.000 abstract 2
- 229910020922 Sn-Pb Inorganic materials 0.000 abstract 2
- 229910008783 Sn—Pb Inorganic materials 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 229910052745 lead Inorganic materials 0.000 abstract 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 9
- 239000002253 acid Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- -1 chronolactone Chemical compound 0.000 description 6
- 239000005355 lead glass Substances 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 5
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 3
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 3
- 235000011130 ammonium sulphate Nutrition 0.000 description 3
- 239000003945 anionic surfactant Substances 0.000 description 3
- 235000015278 beef Nutrition 0.000 description 3
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 3
- 239000004327 boric acid Substances 0.000 description 3
- 235000010338 boric acid Nutrition 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- LLABTCPIBSAMGS-UHFFFAOYSA-L lead(2+);methanesulfonate Chemical compound [Pb+2].CS([O-])(=O)=O.CS([O-])(=O)=O LLABTCPIBSAMGS-UHFFFAOYSA-L 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002736 nonionic surfactant Substances 0.000 description 3
- 239000003760 tallow Substances 0.000 description 3
- HSJKGGMUJITCBW-UHFFFAOYSA-N 3-hydroxybutanal Chemical compound CC(O)CC=O HSJKGGMUJITCBW-UHFFFAOYSA-N 0.000 description 2
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 2
- 239000005695 Ammonium acetate Substances 0.000 description 2
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 235000019257 ammonium acetate Nutrition 0.000 description 2
- 229940043376 ammonium acetate Drugs 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 239000003093 cationic surfactant Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 2
- 239000000174 gluconic acid Substances 0.000 description 2
- 235000012208 gluconic acid Nutrition 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- JARKCYVAAOWBJS-UHFFFAOYSA-N hexanal Chemical compound CCCCCC=O JARKCYVAAOWBJS-UHFFFAOYSA-N 0.000 description 2
- 150000004679 hydroxides Chemical class 0.000 description 2
- 229940046892 lead acetate Drugs 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229940098779 methanesulfonic acid Drugs 0.000 description 2
- ZRSNZINYAWTAHE-UHFFFAOYSA-N p-methoxybenzaldehyde Chemical compound COC1=CC=C(C=O)C=C1 ZRSNZINYAWTAHE-UHFFFAOYSA-N 0.000 description 2
- 229940005657 pyrophosphoric acid Drugs 0.000 description 2
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910052938 sodium sulfate Inorganic materials 0.000 description 2
- 235000011152 sodium sulphate Nutrition 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- WJUFSDZVCOTFON-UHFFFAOYSA-N veratraldehyde Chemical compound COC1=CC=C(C=O)C=C1OC WJUFSDZVCOTFON-UHFFFAOYSA-N 0.000 description 2
- 239000002888 zwitterionic surfactant Substances 0.000 description 2
- SQAINHDHICKHLX-UHFFFAOYSA-N 1-naphthaldehyde Chemical compound C1=CC=C2C(C=O)=CC=CC2=C1 SQAINHDHICKHLX-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- CJAZCKUGLFWINJ-UHFFFAOYSA-N 3,4-dihydroxybenzene-1,2-disulfonic acid Chemical compound OC1=CC=C(S(O)(=O)=O)C(S(O)(=O)=O)=C1O CJAZCKUGLFWINJ-UHFFFAOYSA-N 0.000 description 1
- WQPMYSHJKXVTME-UHFFFAOYSA-N 3-hydroxypropane-1-sulfonic acid Chemical compound OCCCS(O)(=O)=O WQPMYSHJKXVTME-UHFFFAOYSA-N 0.000 description 1
- HVBSAKJJOYLTQU-UHFFFAOYSA-N 4-aminobenzenesulfonic acid Chemical class NC1=CC=C(S(O)(=O)=O)C=C1 HVBSAKJJOYLTQU-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- BWHOZHOGCMHOBV-UHFFFAOYSA-N Benzalacetone Natural products CC(=O)C=CC1=CC=CC=C1 BWHOZHOGCMHOBV-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 102000010911 Enzyme Precursors Human genes 0.000 description 1
- 108010062466 Enzyme Precursors Proteins 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004280 Sodium formate Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PCSMJKASWLYICJ-UHFFFAOYSA-N Succinic aldehyde Chemical compound O=CCCC=O PCSMJKASWLYICJ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 150000003934 aromatic aldehydes Chemical class 0.000 description 1
- QKWNIOMGXBERHJ-RXSVEWSESA-N azane;(2r)-2-[(1s)-1,2-dihydroxyethyl]-3,4-dihydroxy-2h-furan-5-one Chemical compound N.OC[C@H](O)[C@H]1OC(=O)C(O)=C1O QKWNIOMGXBERHJ-RXSVEWSESA-N 0.000 description 1
- QHYIGPGWXQQZSA-UHFFFAOYSA-N azane;methanesulfonic acid Chemical compound [NH4+].CS([O-])(=O)=O QHYIGPGWXQQZSA-UHFFFAOYSA-N 0.000 description 1
- JWAZRIHNYRIHIV-UHFFFAOYSA-N beta-hydroxynaphthyl Natural products C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
- ZADPBFCGQRWHPN-UHFFFAOYSA-N boronic acid Chemical compound OBO ZADPBFCGQRWHPN-UHFFFAOYSA-N 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002563 ionic surfactant Substances 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 description 1
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- HWSZZLVAJGOAAY-UHFFFAOYSA-L lead(II) chloride Chemical compound Cl[Pb]Cl HWSZZLVAJGOAAY-UHFFFAOYSA-L 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- AICMYQIGFPHNCY-UHFFFAOYSA-J methanesulfonate;tin(4+) Chemical compound [Sn+4].CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O.CS([O-])(=O)=O AICMYQIGFPHNCY-UHFFFAOYSA-J 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000006179 pH buffering agent Substances 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- 229940044652 phenolsulfonate Drugs 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- WFIZEGIEIOHZCP-UHFFFAOYSA-M potassium formate Chemical compound [K+].[O-]C=O WFIZEGIEIOHZCP-UHFFFAOYSA-M 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- VMNZSPZHEZLXCQ-UHFFFAOYSA-M potassium;4-hydroxybenzenesulfonate Chemical compound [K+].OC1=CC=C(S([O-])(=O)=O)C=C1 VMNZSPZHEZLXCQ-UHFFFAOYSA-M 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005185 salting out Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- HLBBKKJFGFRGMU-UHFFFAOYSA-M sodium formate Chemical compound [Na+].[O-]C=O HLBBKKJFGFRGMU-UHFFFAOYSA-M 0.000 description 1
- 235000019254 sodium formate Nutrition 0.000 description 1
- 229940087596 sodium phenolsulfonate Drugs 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000011008 sodium phosphates Nutrition 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- BLXAGSNYHSQSRC-UHFFFAOYSA-M sodium;2-hydroxybenzenesulfonate Chemical compound [Na+].OC1=CC=CC=C1S([O-])(=O)=O BLXAGSNYHSQSRC-UHFFFAOYSA-M 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- YJGJRYWNNHUESM-UHFFFAOYSA-J triacetyloxystannyl acetate Chemical compound [Sn+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O YJGJRYWNNHUESM-UHFFFAOYSA-J 0.000 description 1
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- YQMWDQQWGKVOSQ-UHFFFAOYSA-N trinitrooxystannyl nitrate Chemical compound [Sn+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O YQMWDQQWGKVOSQ-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- MWOOGOJBHIARFG-UHFFFAOYSA-N vanillin Chemical compound COC1=CC(C=O)=CC=C1O MWOOGOJBHIARFG-UHFFFAOYSA-N 0.000 description 1
- FGQOOHJZONJGDT-UHFFFAOYSA-N vanillin Natural products COC1=CC(O)=CC(C=O)=C1 FGQOOHJZONJGDT-UHFFFAOYSA-N 0.000 description 1
- 235000012141 vanillin Nutrition 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は新規な錫、鉛、及び錫〜鉛谷金電気め゛っき浴
及び酸浴を用いた電気めっき方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a novel tin, lead, and tin-lead valley gold electroplating bath and an electroplating method using an acid bath.
〔従来の技術及び発明が解決しようとする課題]錫、錫
−鉛合金電気めっきは、従来より主としてはんだ付は性
を目的として弱電及び電子工業分野に広く用いられてい
る。[Prior Art and Problems to be Solved by the Invention] Tin and tin-lead alloy electroplating have been widely used in the fields of light electrical and electronic industries, mainly for soldering properties.
従来、かかる錫、錫−鉛合金電気めっきに使用される電
気めっき浴は、主に硫酸浴、有機スルホン酸浴或いはホ
ウフン酸浴であり、pH1以下の強酸性浴であった。Conventionally, the electroplating baths used for such electroplating of tin and tin-lead alloys have been mainly sulfuric acid baths, organic sulfonic acid baths, or boronic acid baths, which are strongly acidic baths with a pH of 1 or less.
これら強酸性浴は、被めっき物が銅やスチール等であれ
ば使用上特に問題は生じない。しかし、最近は被めっき
物として金属とセラミック、ガラス、プラスチック等と
を素材とした複合材料からなる電子部品が多くなってお
り、例えば、鉛ガラスを用いて封着したサーディツプ型
のICパッケージやチップコンデンサーが使用されるよ
うになっている。更には、セラミック上へアルミニウム
蒸着を行ない、エツチングして回路形成を行なった電子
部品も多くなっている。これらの部品に上記強酸性浴か
ら錫、錫−鉛合金めっきを行なうと、部品中のセラミッ
ク、ガラス或いは蒸着アルミニウム等が侵食され、更に
は絶縁体上にめっきが付くというブリッジの問題が生じ
る欠点があった。These strong acid baths do not pose any particular problems in use if the object to be plated is copper, steel, or the like. However, recently, many electronic components are made of composite materials such as metal, ceramic, glass, and plastic as materials to be plated.For example, there are cerdip-type IC packages and chips sealed using lead glass. Capacitors are now being used. Furthermore, there are an increasing number of electronic components in which circuits are formed by depositing aluminum on ceramic and etching it. If tin or tin-lead alloy plating is applied to these parts from the above-mentioned strong acid bath, the ceramic, glass, or vapor-deposited aluminum in the parts will be eroded, and furthermore, the problem of bridging, where the plating will adhere to the insulator, will occur. was there.
かかる問題点は、めっき浴のpHを2〜9にすることに
より解消され得る。しかし、単にめっき浴のpHを2〜
9にすると、錫イオン、鉛イオンが水酸化物となって沈
殿し、めっきが実施不可能になる。Such problems can be solved by adjusting the pH of the plating bath to 2 to 9. However, simply adjusting the pH of the plating bath to 2~
If the value is 9, tin ions and lead ions become hydroxides and precipitate, making plating impossible.
一方、従来より錫、錫−鉛合金電気めっき浴として、ク
エン酸、グルコン酸、ピロリン酸、有機ホスホン酸やこ
れらの塩等を使用した上記pH範囲で使用可能な浴も種
々提案されている(特開昭49−93236号、同53
−5034号、同54−60230号、同54−695
33号、同54−69534号1 同57−63689
号、同61−194194号公報等)が、更にpH2〜
9の領域で良好に錫、鉛、或いは錫−鉛合金めっきを行
なうことができるめっき浴が望まれている。On the other hand, as tin and tin-lead alloy electroplating baths, various baths that can be used within the above pH range and use citric acid, gluconic acid, pyrophosphoric acid, organic phosphonic acid, or their salts have been proposed ( JP-A No. 49-93236, No. 53
-5034, 54-60230, 54-695
No. 33, No. 54-69534 No. 1 No. 57-63689
No. 61-194194, etc.), and furthermore, pH 2 ~
A plating bath that can perform tin, lead, or tin-lead alloy plating well in the range of 9 is desired.
本発明は上記事情に鑑みなされたもので、pH2〜9の
領域で安定であり、電流効率が高く、広い電流密度範囲
で使用可能な錫、鉛及び錫−鉛合金めっき浴及び該めっ
き浴を用いる電気めっき方法を提供することを目的とす
る。The present invention was made in view of the above circumstances, and provides a tin, lead, and tin-lead alloy plating bath that is stable in the pH range of 2 to 9, has high current efficiency, and can be used in a wide current density range, and the plating bath. The purpose of the present invention is to provide an electroplating method that can be used.
〔課題を解決するための手段及び作用〕本発明者は、上
記目的を達成するため鋭意検討を行なった結果、錫イオ
ン及び/又は鉛イオンを含むめっき浴の錯化剤としてア
スコルビン酸、イソアスコルビン酸、又はその合成中間
体或いは酸化産物、即ちデヒドロアスコルビン酸、2−
ケトグルコン酸、ソルビトール、ソルボース、グルコー
ス、グルクロン酸、グロン酸、グロノラクトン。[Means and effects for solving the problem] As a result of intensive studies to achieve the above object, the present inventors have discovered that ascorbic acid and isoascorbic acid can be used as complexing agents for plating baths containing tin ions and/or lead ions. acid, or its synthetic intermediate or oxidation product, i.e. dehydroascorbic acid, 2-
Ketogluconic acid, sorbitol, sorbose, glucose, glucuronic acid, gulonic acid, gulonolactone.
2.3−ジケトグロン酸、乃至はそれらの塩を使用する
ことにより、pH2〜9の領域で安定であり、錫や鉛の
水酸化物が生じることがなく、セラミック、鉛ガラス、
蒸着アルミ等を用いた金属との複合素材からなる電子部
品の侵食等もなくめっきし得、しかもこれら錯化剤を含
む浴は電流効率が高く、広い電流密度範囲で使用できる
上、良好なめっき皮膜を得ることができることを知見し
、本発明をなすに至った。By using 2.3-diketogulonic acid or its salts, it is stable in the pH range of 2 to 9, does not generate tin or lead hydroxides, and is suitable for ceramics, lead glass,
Electronic parts made of composite materials with metals such as vapor-deposited aluminum can be plated without corrosion, and baths containing these complexing agents have high current efficiency, can be used over a wide current density range, and provide good plating. It was discovered that a film can be obtained, and the present invention was completed.
従って、本発明は、錫イオン、鉛イオン又は錫イオンと
鉛イオンとを含有する錫、鉛又は錫−鉛合金めっき浴に
錯化剤としてアスコルビン酸、イソアスコルビン酸、デ
ヒドロアスコルビン酸、2〜ケトグルコン酸、ソルビト
ール、ソルボース。Therefore, the present invention provides ascorbic acid, isoascorbic acid, dehydroascorbic acid, 2-ketogluconate, etc. as a complexing agent in a tin, lead or tin-lead alloy plating bath containing tin ions, lead ions, or tin ions and lead ions. Acid, sorbitol, sorbose.
グルコース、グルクロン酸、クロン酸、クロノラクトン
、2,3−ジケトグロン酸及びこれらの塩から選ばれる
1種又は2種以上を配合することを特徴とする錫、鉛又
は錫−鉛合金電気めっき浴、及び上記めっき浴を用いて
被めっき物を電気めっきすることを特徴とする錫、鉛又
は錫−鉛合金電気めっき方法を提供する。A tin, lead or tin-lead alloy electroplating bath, characterized in that it contains one or more selected from glucose, glucuronic acid, curonic acid, chronolactone, 2,3-diketogulonic acid, and salts thereof; and a method for electroplating tin, lead or tin-lead alloy, which comprises electroplating an object to be plated using the above plating bath.
以下、本発明につき更に詳しく説明する。The present invention will be explained in more detail below.
本発明のめっき浴において、錫イオン或いは鉛イオンを
与える金属塩は特に制限されないが、錫塩としては、硫
酸錫、塩化錫、硝酸錫、メタンスルホン酸錫、アルカノ
ールスルホン酸錫、フェノールスルホン酸銀、ホウフン
化錫、酢酸錫、酸化錫などが挙げられる。この場合、錫
塩は2価の錫塩でも4価の錫塩でもよい。一方、鉛塩と
しては、硝酸鉛、酢酸鉛、ホウフッ化鉛、メタンスルホ
ン酸鉛、塩化鉛、硫酸鉛、酸化鉛等が挙げられる。In the plating bath of the present invention, the metal salt that provides tin ions or lead ions is not particularly limited, but tin salts include tin sulfate, tin chloride, tin nitrate, tin methanesulfonate, tin alkanolsulfonate, and silver phenolsulfonate. , tin borofluoride, tin acetate, tin oxide, etc. In this case, the tin salt may be a divalent tin salt or a tetravalent tin salt. On the other hand, examples of lead salts include lead nitrate, lead acetate, lead borofluoride, lead methanesulfonate, lead chloride, lead sulfate, and lead oxide.
上記錫イオン、鉛イオンのめっき浴中の濃度は適宜選定
されるが、通常0.5〜2oog/l、より好ましくは
1〜100 g/lである。The concentration of the tin ions and lead ions in the plating bath is selected as appropriate, but is usually 0.5 to 2 oog/l, more preferably 1 to 100 g/l.
本発明は、かかる錫イオン及び/又は鉛イオンを含むめ
っき浴に錯化剤としてアスコルビン酸。The present invention uses ascorbic acid as a complexing agent in a plating bath containing such tin ions and/or lead ions.
イソアスコルビン酸、デヒドロアスコルビン酸。Isoascorbic acid, dehydroascorbic acid.
2−ケトグルコン酸、ソルビトール、ソルボース。2-ketogluconic acid, sorbitol, sorbose.
グルコース、グルクロン酸、グロン酸、クロノラクトン
、2.3−ジケトグロン酸及びこれらの塩から選ばれる
1種又は2種以上を配合する。なお、塩としてはアルカ
リ金属塩、アンモニウム塩、錫塩、鉛塩などが挙げられ
る。One or more selected from glucose, glucuronic acid, gulonic acid, chronolactone, 2,3-diketogulonic acid, and salts thereof are blended. Note that examples of the salt include alkali metal salts, ammonium salts, tin salts, lead salts, and the like.
これら錯化剤の添加量も種々選定されるが、通常3〜8
00g/fであり、より好ましくは40〜400g/j
!である。The amount of these complexing agents added is also selected variously, but usually 3 to 8
00g/f, more preferably 40-400g/j
! It is.
なお、本発明のめっき浴には、上記錯化剤に加えて他の
錯化剤、例えばクエン酸、ピロリン酸。In addition to the above-mentioned complexing agent, the plating bath of the present invention may contain other complexing agents, such as citric acid and pyrophosphoric acid.
グルコン酸やそれらの塩等を添加することは差し支えな
い。There is no problem in adding gluconic acid or salts thereof.
本発明のめっき浴には必要により更に導電性塩。The plating bath of the present invention further contains a conductive salt if necessary.
pH緩衝剤、界面活性剤、光沢剤などを添加することが
できる。pH buffering agents, surfactants, brighteners, etc. can be added.
ここで、導電性塩としては、メタンスルホン酸アンモニ
ウム、硫酸アンモニウム、塩化アンモニウム、硫酸ナト
リウム、塩化カリウム、酢酸アンモニウム、アスコルビ
ン酸アンモニウム、アルカノールスルホン酸ナトリウム
、フェノールスルホン酸ナトリウム等が使用でき、導電
性塩の添加によりめっき電圧を低下させることができ、
均一電着性を向上させることができる。その配合量は0
〜aoog//2とすることができ、好ましくは10〜
800 g/l、より好ましくは50〜300g/fで
ある。Here, as the conductive salt, ammonium methanesulfonate, ammonium sulfate, ammonium chloride, sodium sulfate, potassium chloride, ammonium acetate, ammonium ascorbate, sodium alkanolsulfonate, sodium phenolsulfonate, etc. can be used. Plating voltage can be lowered by adding
Uniform electrodeposition can be improved. Its blending amount is 0
~aoog//2, preferably 10~
800 g/l, more preferably 50 to 300 g/f.
また、pl+緩衝剤としては、ホウ酸、塩化アンモニウ
ム、硫酸アンモニウム、酢酸アンモニウム。Further, as the pl+buffer, boric acid, ammonium chloride, ammonium sulfate, and ammonium acetate are used.
リン酸ナトリウム、リン酸カリウム、ホウ酸ナトリウム
、ホウ酸カリウム、ギ酸ナトリウム、ギ酸カリウム、ク
エン酸アンモニウム、クエン酸ナトリウム等が挙げられ
る。その添加量は、0〜100g / 1.、特に10
〜50 g/lとすることが好ましい。Examples include sodium phosphate, potassium phosphate, sodium borate, potassium borate, sodium formate, potassium formate, ammonium citrate, and sodium citrate. The amount added is 0 to 100g/1. , especially 10
It is preferable to set it as 50 g/l.
更に、界面活性剤としてはノニオン系、カチオン系1両
性イオン系、アニオン系の界面活性剤が使用し得る。こ
の場合、これら界面活性剤としては、特に制限されず、
種々選沢されるが、塩析の点から着点の高いもの或いは
着点のないものが好ましい。Further, as the surfactant, nonionic, cationic, zwitterionic, and anionic surfactants can be used. In this case, these surfactants are not particularly limited,
There are various selections, but from the viewpoint of salting out, those with a high deposition point or those with no deposition point are preferred.
より好適には、ノニオン系界面活性剤として、ノニルフ
ェノールにエチレンオキサイドを15モル付加したもの
、アルキルβ−ナフトール(アルキル基の炭素数1〜2
5)にエチレンオキサイドを25モル付加したもの、多
核フェノールエトキシレート(例えば旭電化工業昧製ア
デカトールPC−10,PC−1,3)等が挙げられる
。また、カチオン系界面活性剤としては、ラウリルアミ
ンにエチレンオキサイドを10モル付加したもの、牛脂
アルキルアミンにエチレンオキサイドを15モル付加し
たもの等が好適に用いられる。更に、両性イオン系界面
活性剤としては、イミダプリン系のもの、特に下記式
(但し、R1は炭素数3〜25のアルキル基、R2は炭
素数1〜18のアルキル基を示す)で示されるもの(例
えば第一工業製薬■製アモーゲンNα8)が好適である
。More preferably, the nonionic surfactant is one obtained by adding 15 moles of ethylene oxide to nonylphenol, or an alkyl β-naphthol (an alkyl group having 1 to 2 carbon atoms).
5) with 25 moles of ethylene oxide added thereto, polynuclear phenol ethoxylates (for example, Adecatol PC-10, PC-1, 3 manufactured by Asahi Denka Kogyo Co., Ltd.), and the like. In addition, as the cationic surfactant, those obtained by adding 10 moles of ethylene oxide to laurylamine, and those obtained by adding 15 moles of ethylene oxide to beef tallow alkylamine are preferably used. Furthermore, as the amphoteric ionic surfactant, imidapurine type surfactants, especially those represented by the following formula (wherein R1 is an alkyl group having 3 to 25 carbon atoms and R2 is an alkyl group having 1 to 18 carbon atoms) are used. (For example, Amogen Nα8 manufactured by Daiichi Kogyo Seiyaku ■) is suitable.
上記ノニオン系、カチオン系9両性イオン系界面活性剤
の添加はめっき皮膜を平滑化し、緻密化するという効果
があるが、これら界面活性剤の添加量は0.01〜30
g/lとすることができる。The addition of the above-mentioned nonionic and cationic 9 zwitterionic surfactants has the effect of smoothing and densifying the plating film, but the amount of these surfactants added is 0.01 to 30%.
g/l.
一方、アニオン系界面活性剤は、特にめっきのガスピッ
トをなくし、ノニオン系界面活性剤の着点を上げるとい
う効果があるが、アニオン系界面活性剤としては、ラウ
リル硫酸ナトリウム、アルキルベンゼンスルホン酸ナト
リウム、スルホコハク酸アルキルエステルや下記式
%式%)
で示されるもの、例えばカテコールジスルホン酸ナトリ
ウムが好適に用いられる。なお、アニオン系界面活性剤
の添加量は0.1〜50g/J2とすることができる。On the other hand, anionic surfactants are particularly effective in eliminating gas pits in plating and increasing the landing point of nonionic surfactants. Acid alkyl esters and those represented by the following formula (%), such as sodium catechol disulfonate, are preferably used. Note that the amount of anionic surfactant added can be 0.1 to 50 g/J2.
光沢めっきを必要とする場合は、光沢剤を添加するが、
光沢剤としては、ホルムアルデヒド、アセトアルデヒド
、プロピオンアルデヒド、グリオキサール、スクシンア
ルデヒド、カプロンアルデヒド、アルドール等の脂肪族
アルデヒド、ベンズアルデヒド、す1ノチルアルデヒド
アリールエーテル、p−t−ルアルデヒド、1−ナフト
アルデヒド。If bright plating is required, brighteners are added, but
Examples of brighteners include formaldehyde, acetaldehyde, propionaldehyde, glyoxal, succinaldehyde, capronaldehyde, aliphatic aldehydes such as aldol, benzaldehyde, 1-notyl aldehyde aryl ether, pt-raldehyde, and 1-naphthaldehyde.
サリチルアルデヒド、ベラトルアルデヒド、アニスアル
デヒド、ビペロナール、バニリン等の芳香族アルデヒド
が使用できる。更に、スルファニル酸誘導体、トリアジ
ン誘導体やアクリル酸、メタアクリル酸、クロトン酸、
その他のα−不飽和カルポン酸などを用いることもでき
る。これら光沢剤の添加量は、0.01〜30 g/l
!、特には0.03〜5g/ffiとすることができる
。Aromatic aldehydes such as salicylaldehyde, veratraldehyde, anisaldehyde, biperonal, and vanillin can be used. Furthermore, sulfanilic acid derivatives, triazine derivatives, acrylic acid, methacrylic acid, crotonic acid,
Other α-unsaturated carboxylic acids and the like can also be used. The amount of these brighteners added is 0.01 to 30 g/l
! , especially 0.03 to 5 g/ffi.
本発明のめっき浴のpHは2〜9、より好適には3〜B
、5、更に好適には5〜8とすることが好ましい。この
場合、pHegJ1整するため、アンモニア水、苛性ア
ルカリなどを用いることができる。The pH of the plating bath of the present invention is 2 to 9, more preferably 3 to B.
, 5, more preferably 5 to 8. In this case, aqueous ammonia, caustic alkali, etc. can be used to adjust pHegJ1.
上記めっき浴を用いて電気めっきを行なう場合、その電
源としては、無光沢乃至半光沢めっき皮膜を得る際はめ
っき皮膜の外観(めっき結晶が大きくなる部分が生じ、
その部分が黒くなる)点から完全直流や3相全波、3相
半波整流よりも単相全波、単相半波整流を用いることが
推奨され、またパルス電源等も使用される。一方、光沢
めっき皮膜を得る際は逆に光沢の点から単相全波、単相
半波整流よりも完全直流、3相全波、3相半波整流を用
いることが推奨される。When electroplating is carried out using the above plating bath, the power source is required to obtain a matte to semi-bright plating film.
(that part becomes black), it is recommended to use single-phase full-wave or single-phase half-wave rectification rather than complete direct current, three-phase full-wave, or three-phase half-wave rectification, and pulse power sources are also used. On the other hand, when obtaining a bright plating film, it is recommended to use full direct current, three-phase full-wave, or three-phase half-wave rectification rather than single-phase full-wave or single-phase half-wave rectification from the viewpoint of gloss.
本発明のめっき浴は、通常のラックめっきのほか、バレ
ルめっきにも使用でき、また高速めっき、スルホールめ
っきなどにも適用することができるが、めっき条件はこ
れらめっきの種類等に応じて選択することができ、本発
明のめっき浴によれば広範囲の電流密度において均質で
緻密なめっき皮膜を得ることができる。具体的には、め
っき温度は5〜90″C1より好ましくは10〜60°
Cとすることができ、陰極電流密度はO,OO1〜30
A/dm”、より好ましくは0.1〜I OA/dm”
とすることができる。また、攪拌は、バレルの回転、カ
ソードロッキング、ポンプ流、決過機による液流、空気
攪拌等によって行なうことができ、場合によっては無攪
拌でもよい。陽極としては、めっき浴の種類に応じ金属
錫、金属鉛、或いは錫−鉛合金めっきの場合はそのめっ
き皮膜の組成に応じて金属錫と金属鉛とを併用したり錫
−鉛合金を用いることができるが、不溶性陽極を使用し
てもよい。The plating bath of the present invention can be used not only for normal rack plating but also for barrel plating, and can also be applied to high-speed plating, through-hole plating, etc., but the plating conditions should be selected depending on the type of plating, etc. According to the plating bath of the present invention, a homogeneous and dense plating film can be obtained over a wide range of current densities. Specifically, the plating temperature is more preferably 10-60° than 5-90″C1.
C, and the cathode current density is O, OO1~30
A/dm", more preferably 0.1 to IOA/dm"
It can be done. Further, stirring can be carried out by rotation of a barrel, cathode locking, pump flow, liquid flow by a resolution machine, air stirring, etc., and in some cases, stirring may be performed without stirring. For the anode, depending on the type of plating bath, metal tin, metal lead, or in the case of tin-lead alloy plating, use a combination of metal tin and metal lead, or a tin-lead alloy depending on the composition of the plating film. However, an insoluble anode may also be used.
本発明において、被めっき物は制限されず、電気めっき
可能なものであればいずれのものでもよいが、特に本発
明では金属とセラミック、ガラス等との複合材料からな
る電子部品などのめっきに好適である。In the present invention, the object to be plated is not limited to any object as long as it can be electroplated, but the present invention is particularly suitable for plating electronic components made of composite materials such as metals, ceramics, and glass. It is.
以下、実施例を示し、本発明を具体的に説明するが、本
発明は下記の実施例に制限されるものではない。EXAMPLES Hereinafter, the present invention will be specifically explained with reference to examples, but the present invention is not limited to the following examples.
〔実施例1]
メタンスルホン酸第1.錫(Snとして)10g#!メ
タンスルホン酸鉛(pbとして) 1 〃アスコ
ルビン酸 200 〃ホウ酸
30 〃牛脂アミンのエチレンオ
キサイド
15モル付加物 1 〃メタンス
ルホン酸 100 〃pH(アンモニア
水で調整) 7上記組成のめっき浴を用い
、単相全波整流により銅板上に40°C,Dx I A
/dm”の条件で10分間めっきした。[Example 1] Methanesulfonic acid 1st. Tin (as Sn) 10g#! Lead methanesulfonate (as PB) 1 Ascorbic acid 200 Boric acid
30 15 moles of ethylene oxide adduct of beef tallow amine 1 Methanesulfonic acid 100 pH (adjusted with aqueous ammonia) 7 Using a plating bath with the above composition, plating on a copper plate by single-phase full-wave rectification at 40°C, Dx I A
Plating was carried out for 10 minutes under the condition of "/dm".
その結果、平滑緻密な白色半光沢の錫−鉛合金めっき皮
膜が得られた。皮膜中のpb含有量は10%であり、ま
た電流効率は99%であった。As a result, a smooth, dense, white semi-glossy tin-lead alloy plating film was obtained. The PB content in the film was 10%, and the current efficiency was 99%.
なお、上記めっき浴により鉛ガラス付IC部品にDK
I A/di”で約7μmのめっきを行なったが、鉛ガ
ラスを侵すことなく、良好な白色半光沢の錫−鉛合金め
っき皮膜が得られた。In addition, the above plating bath gives DK to IC parts with lead glass.
Plating was carried out to a thickness of about 7 μm using IA/di”, and a good white semi-gloss tin-lead alloy plating film was obtained without corroding the lead glass.
また、アルミ蒸着膜を有するセラミック仮に対し、常法
により亜鉛置換処理を行なった後、上記めっき浴を用い
て10μmの錫−鉛合金めっきを行なったが、蒸着アル
ミを溶解侵食することもなく、蒸着アルミ上に錫−鉛合
金めっき皮膜が密着性よく形成された。In addition, after zinc substitution treatment was performed on a temporary ceramic having an aluminum vapor-deposited film by a conventional method, tin-lead alloy plating of 10 μm was performed using the above plating bath, but the vapor-deposited aluminum was not dissolved and eroded. A tin-lead alloy plating film was formed on the vapor-deposited aluminum with good adhesion.
[実施例2]
硫酸第1錫(Snとして)’ 工Og/l
メタンスルホン酸鉛(pbとして) 1 〃デヒ
ドロアスコルビン酸 200 〃ホウ酸
30 〃牛脂アミンのエチレンオ
キサイド
15モル付加物 1g/2硫酸ア
ンモニウム 50 ノIpH(アンモ
ニア水で調整) 7上記組成のめっき浴を
用いて実施例1と同様にめっきを行なったところ、実施
例1と同様の結果が得られた。[Example 2] Stannous sulfate (as Sn) 'Og/l
Lead methanesulfonate (as PB) 1 Dehydroascorbic acid 200 Boric acid
30 15 moles of ethylene oxide adduct of beef tallow amine 1 g/2 ammonium sulfate 50 IpH (adjusted with aqueous ammonia) 7 Plating was carried out in the same manner as in Example 1 using a plating bath with the above composition, and the result was the same as in Example 1. The results were obtained.
(実施例3)
実施例1のめっき浴において、アスコルビン酸の代りに
イソアスコルビン酸、2−ケトグルコン酸、ソルビトー
ル、ソルボース、グルコース、グルクロン酸、グロン酸
、グロノラクトン、2.3−ジケトグロン酸をそれぞれ
用いてめっきを行なったところ、実施例1と同様の結果
が得られた。(Example 3) In the plating bath of Example 1, isoascorbic acid, 2-ketogluconic acid, sorbitol, sorbose, glucose, glucuronic acid, gulonic acid, gulonolactone, and 2,3-diketogulonic acid were used instead of ascorbic acid. When plating was carried out, the same results as in Example 1 were obtained.
〔実施例4]
3−ハイドロキシ−1−プロパン
スルホン酸第1錫(Snとして) 20g/lソ
ルビトール 200 〃クエン酸3
アンモニウム 30 〃アデカトールPC−
103〃
硫酸ナトリウム 50g、1ベン
ザルアセトン 0.1〃p)l
6上記めっき浴を用い
、完全直流により銅板上に25°C,DK 2 A/d
m2の条件で5分間めっきを行なった。[Example 4] Stannous 3-hydroxy-1-propanesulfonic acid (as Sn) 20 g/l Sorbitol 200 Citric acid 3
Ammonium 30 〃Adecatol PC-
103〃 Sodium sulfate 50g, 1 benzalacetone 0.1〃p)l
6 Using the above plating bath, coat the copper plate with complete direct current at 25°C, DK 2 A/d.
Plating was performed for 5 minutes under conditions of m2.
その結果、平滑緻密な光沢錫めっき皮膜が得られた。な
お、電流効率は99%であった。As a result, a smooth, dense, and glossy tin plating film was obtained. Note that the current efficiency was 99%.
また、上記めっき浴により鉛ガラス付IC部品にDx
2 A/dm2で約8μmのめっきを行なったが、鉛ガ
ラスを侵すことなく、良好な光沢錫めっき皮膜が得られ
た。In addition, the above plating bath can cause Dx to be applied to IC parts with lead glass.
Plating was carried out to a thickness of about 8 μm at 2 A/dm2, and a good bright tin plating film was obtained without corroding the lead glass.
C実施例5〕
酢酸鉛(pbとして) 10g/β
フェノールスルホン酸カリウム 50 〃2−ケト
グルコン酸 150 〃チモーゲンNα8
3 〃N−(3−ヒドロキシブ
チリデン)
−p−スルファニル酸 0.2〃pH
7,5’
上記めっき浴を用い、単相半波整流により銅板上に50
°C,Dx 3 A/di2の条件で5分間めっきを行
なった。C Example 5] Lead acetate (as pb) 10g/β
Potassium phenolsulfonate 50 2-ketogluconic acid 150 Zymogen Nα8
3〃N-(3-hydroxybutylidene)-p-sulfanilic acid 0.2〃pH
7,5' Using the above plating bath, 50% plating was applied on a copper plate by single-phase half-wave rectification.
Plating was carried out for 5 minutes under the conditions of °C and Dx 3 A/di2.
その結果、平滑緻密な半光沢鉛めっき皮膜が得られた。As a result, a smooth and dense semi-bright lead plating film was obtained.
なお、電流効率は98%であった。Note that the current efficiency was 98%.
本発明によれば、pH2〜9の領域で良好な錫。 According to the present invention, tin is good in the pH range of 2 to 9.
鉛、又は錫−鉛合金めっき皮膜を与えると共に、電流効
率が高く、広い電流密度範囲で使用でき、このため電子
部品のめっき等に好適に用いられる。It provides a lead or tin-lead alloy plating film, has high current efficiency, and can be used in a wide current density range, and is therefore suitably used for plating electronic parts.
出 願人 上村工業株式会社Applicant: Uemura Kogyo Co., Ltd.
Claims (1)
有する錫、鉛又は錫−鉛合金めっき浴に錯化剤としてア
スコルビン酸、イソアスコルビン酸、デヒドロアスコル
ビン酸、2−ケトグルコン酸、ソルビトール、ソルボー
ス、グルコース、グルクロン酸、グロン酸、グロノラク
トン、2,3−ジケトグロン酸及びこれらの塩から選ば
れる1種又は2種以上を配合することを特徴とする錫、
鉛又は錫−鉛合金電気めっき浴。 2、請求項1記載のめっき浴を用いて被めっき物を電気
めっきすることを特徴とする錫、鉛又は錫−鉛合金電気
めっき方法。[Claims] 1. Ascorbic acid, isoascorbic acid, dehydroascorbic acid as a complexing agent in a tin, lead or tin-lead alloy plating bath containing tin ions, lead ions, or tin ions and lead ions; - a tin containing one or more selected from ketogluconic acid, sorbitol, sorbose, glucose, glucuronic acid, gulonic acid, gulonolactone, 2,3-diketogulonic acid, and salts thereof;
Lead or tin-lead alloy electroplating bath. 2. A method for electroplating tin, lead, or tin-lead alloy, which comprises electroplating an object to be plated using the plating bath according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1121344A JP2709510B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1121344A JP2709510B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02301588A true JPH02301588A (en) | 1990-12-13 |
JP2709510B2 JP2709510B2 (en) | 1998-02-04 |
Family
ID=14808947
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JP1121344A Expired - Lifetime JP2709510B2 (en) | 1989-05-17 | 1989-05-17 | Tin, lead, tin-lead alloy electroplating bath and electroplating method |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0544074A (en) * | 1991-04-01 | 1993-02-23 | Kawasaki Steel Corp | Antioxidant, additive for plating bath and plating bath using the same |
WO2003071001A1 (en) * | 2002-02-15 | 2003-08-28 | Technic, Inc. | Electroplating solution containing organic acid complexing agent |
CN107287629A (en) * | 2016-04-12 | 2017-10-24 | 日本电镀工程股份有限公司 | Non- cyanogen system Au Sn Alloy Plating covering liquids |
CN110205659A (en) * | 2019-07-17 | 2019-09-06 | 广州三孚新材料科技股份有限公司 | Electrotinning additive and preparation method thereof |
JP2021019007A (en) * | 2019-07-17 | 2021-02-15 | 株式会社村田製作所 | Electronic component |
WO2022153740A1 (en) * | 2021-01-13 | 2022-07-21 | 三菱マテリアル株式会社 | Tin alloy plating solution |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003272790A1 (en) | 2002-10-08 | 2004-05-04 | Honeywell International Inc. | Semiconductor packages, lead-containing solders and anodes and methods of removing alpha-emitters from materials |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929240A (en) * | 1972-07-18 | 1974-03-15 | ||
JPS62270793A (en) * | 1986-05-19 | 1987-11-25 | Kawasaki Steel Corp | Method for preventing formation of wood grain pattern on surface treated steel sheet |
-
1989
- 1989-05-17 JP JP1121344A patent/JP2709510B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929240A (en) * | 1972-07-18 | 1974-03-15 | ||
JPS62270793A (en) * | 1986-05-19 | 1987-11-25 | Kawasaki Steel Corp | Method for preventing formation of wood grain pattern on surface treated steel sheet |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0544074A (en) * | 1991-04-01 | 1993-02-23 | Kawasaki Steel Corp | Antioxidant, additive for plating bath and plating bath using the same |
WO2003071001A1 (en) * | 2002-02-15 | 2003-08-28 | Technic, Inc. | Electroplating solution containing organic acid complexing agent |
CN107287629A (en) * | 2016-04-12 | 2017-10-24 | 日本电镀工程股份有限公司 | Non- cyanogen system Au Sn Alloy Plating covering liquids |
CN107287629B (en) * | 2016-04-12 | 2021-04-13 | 日本电镀工程股份有限公司 | Non-cyanide Au-Sn alloy plating solution |
CN110205659A (en) * | 2019-07-17 | 2019-09-06 | 广州三孚新材料科技股份有限公司 | Electrotinning additive and preparation method thereof |
CN110205659B (en) * | 2019-07-17 | 2020-06-16 | 广州三孚新材料科技股份有限公司 | Electrotinning additive and preparation method thereof |
JP2021019007A (en) * | 2019-07-17 | 2021-02-15 | 株式会社村田製作所 | Electronic component |
WO2022153740A1 (en) * | 2021-01-13 | 2022-07-21 | 三菱マテリアル株式会社 | Tin alloy plating solution |
Also Published As
Publication number | Publication date |
---|---|
JP2709510B2 (en) | 1998-02-04 |
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